公开(公告)号：US09209595B2

公开(公告)日：2015-12-08

申请号：US14593278

申请日：2015-01-09

Applicant: ASML Netherlands B.V.

Inventor： Kevin Zhang ,  Christo Liebenberg ,  Alexander Schafgans

IPC: H01S3/00 ,  H01S3/227 ,  H01S3/104 ,  H01S3/036 ,  H01S3/134 ,  H01S3/223 ,  H01S3/23

CPC classification number: H01S3/227 ,  H01S3/036 ,  H01S3/104 ,  H01S3/134 ,  H01S3/2232 ,  H01S3/2316 ,  H05G2/008

Abstract: An extreme ultraviolet light system includes an optical amplifier system and a catalytic conversion system. Each optical amplifier of the optical amplifier system includes a gain medium in the form of a gas mixture that produces an amplified light beam. The optical amplifier system includes a fluid input and a fluid output through which the gas mixture flows. The catalytic conversion system is fluidly connected to the fluid output of the optical amplifier system and to the fluid input of the optical amplifier system. The catalytic conversion system includes a catalytic converter that includes a housing; a substrate within the housing including openings through which the gas mixture can flow; and a catalyst applied as a coating to the interior surfaces of the openings of the substrate, the catalyst including particles of metal. The particles of metal can be nanoparticles of precious metal.

Abstract translation: 极紫外光系统包括光放大器系统和催化转化系统。 光放大器系统的每个光放大器包括产生放大光束的气体混合物形式的增益介质。 光放大器系统包括流体输入和气体混合物流过的流体输出。 催化转化系统流体地连接到光放大器系统的流体输出和光放大器系统的流体输入。 催化转化系统包括催化转化器，其包括壳体; 壳体内的衬底包括开口，气体混合物可通过该开口流动; 以及作为涂层施加到衬底的开口的内表面的催化剂，所述催化剂包括金属颗粒。 金属颗粒可以是贵金属的纳米颗粒。

公开(公告)号：US20150222083A1

公开(公告)日：2015-08-06

申请号：US14593278

申请日：2015-01-09

Applicant: ASML Netherlands B.V.

Inventor： Kevin Zhang ,  Christo Liebenberg ,  Alexander Schafgans

IPC: H01S3/227

CPC classification number: H01S3/227 ,  H01S3/036 ,  H01S3/104 ,  H01S3/134 ,  H01S3/2232 ,  H01S3/2316 ,  H05G2/008

Abstract: An extreme ultraviolet light system includes an optical amplifier system and a catalytic conversion system. Each optical amplifier of the optical amplifier system includes a gain medium in the form of a gas mixture that produces an amplified light beam. The optical amplifier system includes a fluid input and a fluid output through which the gas mixture flows. The catalytic conversion system is fluidly connected to the fluid output of the optical amplifier system and to the fluid input of the optical amplifier system. The catalytic conversion system includes a catalytic converter that includes a housing; a substrate within the housing including openings through which the gas mixture can flow; and a catalyst applied as a coating to the interior surfaces of the openings of the substrate, the catalyst including particles of metal. The particles of metal can be nanoparticles of precious metal.

Abstract translation: 极紫外光系统包括光放大器系统和催化转化系统。 光放大器系统的每个光放大器包括产生放大光束的气体混合物形式的增益介质。 光放大器系统包括流体输入和气体混合物流过的流体输出。 催化转化系统流体地连接到光放大器系统的流体输出和光放大器系统的流体输入。 催化转化系统包括催化转化器，其包括壳体; 壳体内的衬底包括开口，气体混合物可通过该开口流动; 以及作为涂层施加到衬底的开口的内表面的催化剂，所述催化剂包括金属颗粒。 金属颗粒可以是贵金属的纳米颗粒。