公开(公告)号：US20230171869A1

公开(公告)日：2023-06-01

申请号：US17922056

申请日：2021-04-26

Applicant: ASML Netherlands B.V.

Inventor： Benjamin Andrew Sams ,  Dietmar Uwe Herbert Trees ,  Theodorus Wilhelmus Driessen ,  Herman Harry Borggreve ,  Brandon Michael Johnson ,  Vikas Giridhar Telkar

IPC: H05G2/00 ,  B05B1/02 ,  G03F7/20

CPC classification number: H05G2/006 ,  B05B1/02 ,  G03F7/70033 ,  H05G2/008

Abstract: A droplet generator nozzle (800, 820/830) includes a metal body (802, 822), a metal fitting (812, 823/833) arranged adjacent to the metal body, and a capillary (804, 824/834) comprising a first end and a second end. The first end of the capillary is disposed within the metal fitting, and the capillary is configured to eject initial droplets of a material from the second end of the capillary. The droplet generator nozzle further includes an electromechanical element (808 828/838) disposed within the metal body and coupled to the first end of the capillary and a fastener element (810) configured to clamp around a portion of the metal body and around the metal fitting. The electromechanical element is configured to apply a change that affects droplet generation from the capillary. The second end of the capillary protrudes out from an opening in the fastener element of the droplet generator nozzle. Droplet generator nozzle 830 of FIG. 8C represents the embodiment shown in FIG. 8B, in a cross section orthogonal to the cross section shown in FIG. 8B.

公开(公告)号：US12295088B2

公开(公告)日：2025-05-06

申请号：US17922056

申请日：2021-04-26

Applicant: ASML Netherlands B.V.

Inventor： Benjamin Andrew Sams ,  Dietmar Uwe Herbert Trees ,  Theodorus Wilhelmus Driessen ,  Herman Harry Borggreve ,  Brandon Michael Johnson ,  Vikas Giridhar Telkar

IPC: H05G2/00 ,  B05B1/02 ,  G03F7/00

Abstract: A droplet generator nozzle (800, 820/830) includes a metal body (802, 822), a metal fitting (812, 823/833) arranged adjacent to the metal body, and a capillary (804, 824/834) comprising a first end and a second end. The first end of the capillary is disposed within the metal fitting, and the capillary is configured to eject initial droplets of a material from the second end of the capillary. The droplet generator nozzle further includes an electromechanical element (808 828/838) disposed within the metal body and coupled to the first end of the capillary and a fastener element (810) configured to clamp around a portion of the metal body and around the metal fitting. The electromechanical element is configured to apply a change that affects droplet generation from the capillary. The second end of the capillary protrudes out from an opening in the fastener element of the droplet generator nozzle. Droplet generator nozzle 830 of FIG. 8C represents the embodiment shown in FIG. 8B, in a cross section orthogonal to the cross section shown in FIG. 8B.