公开(公告)号：US20240005457A1

公开(公告)日：2024-01-04

申请号：US18031601

申请日：2021-09-27

Applicant: ASML Netherlands B.V.

Inventor： Hairong LEI ,  Wei FANG

IPC: G06T5/00 ,  G06T7/13

CPC classification number: G06T5/003 ,  G06T7/13 ,  G06T5/002 ,  G06T2207/20192 ,  G06T2207/20084 ,  G06T2207/30148 ,  G06T2207/10061 ,  G06T2207/20081

Abstract: Described herein is a method, and system for training a deblurring model and deblurring an image (e.g., SEM image) of a patterned substrate using the deblurring model and depth data associated with multiple layers of the patterned substrate. The method includes obtaining, via a simulator using a target pattern as input, a simulated image of the substrate, the target pattern comprising a first target feature to be formed on a first layer, and a second target feature to be formed on a second layer located below the first layer; determining, based on depth data associated with multiple layers of the substrate, edge range data for features of the substrate; and adjusting, using the simulated image and the edge range data associated with the target pattern as training data, parameters of a base model to generate the deblurring model to a deblur image of a captured image.

公开(公告)号：US20250166161A1

公开(公告)日：2025-05-22

申请号：US18841032

申请日：2023-02-03

Applicant: ASML Netherlands B.V.

Inventor： Hairong LEI ,  Qian DONG ,  Cho Huak TEH ,  Lingling PU ,  Chih-Yu JEN ,  Chia Wen LIN

IPC: G06T7/00

Abstract: An automatic defect classification method may include obtaining a set of image data comprising a set of candidate defects from an inspection tool, developing a plurality of defect review types and a plurality of nuisance review types, and classifying the set of candidate defects according to the defect review types and nuisance review types using a machine learning classifier. Using the plurality of nuisance review types in the classification method reduces a nuisance rate.

公开(公告)号：US20250095116A1

公开(公告)日：2025-03-20

申请号：US18557584

申请日：2022-04-28

Applicant: ASML Netherlands B.V.

Inventor： Hairong LEI ,  Wei FANG

IPC: G06T5/70 ,  G06T7/00

Abstract: An improved systems and methods for generating a denoised inspection image are disclosed. An improved method for generating a denoised inspection image comprises acquiring an inspection image; generating a first denoised image by executing a first type denoising algorithm on the inspection image; and generating a second denoised image by executing a second type denoising algorithm on the first denoised image.

公开(公告)号：US20240212131A1

公开(公告)日：2024-06-27

申请号：US18553041

申请日：2022-02-17

Applicant: ASML Netherlands B.V.

Inventor： Hairong LEI ,  Wei FANG ,  Yung Wen FU

IPC: G06T7/00 ,  G06V10/22 ,  G06V20/69

CPC classification number: G06T7/001 ,  G06V10/22 ,  G06V20/698 ,  G06T2207/10061 ,  G06T2207/20076 ,  G06T2207/30148

Abstract: An improved method of defect classification is disclosed. An improve method comprises obtaining an inspection image, obtaining layout data associated with the image, obtaining a probability map derived from the layout data, wherein the probability map identifies a probability of a first type of defect occurring in a region of the layout data, identifying a defect in the inspection image occurring at a first location, and classifying the defect based on the probability map and the first location.

公开(公告)号：US20230230208A1

公开(公告)日：2023-07-20

申请号：US18154621

申请日：2023-01-13

Applicant: ASML Netherlands B.V.

Inventor： Hairong LEI ,  Wei FANG

IPC: G06T5/00

CPC classification number: G06T5/002 ,  G06T2207/20081 ,  G06T2207/20084 ,  G06T2207/10061

Abstract: Described herein is a method for training a denoising model. The method includes obtaining a first set of simulated images based on design patterns. The simulated images may be clean and can be added with noise to generate noisy simulated images. The simulated clean and noisy images are used as training data to generate a denoising model.