公开(公告)号：US10191392B2

公开(公告)日：2019-01-29

申请号：US15324264

申请日：2015-07-10

Applicant: ASML Netherlands B.V.

Inventor： Johannes Adrianus Antonius Theodorus Dams ,  Dirk Hendrikus Marinus Engelen ,  Peter Michel Silvester Maria Heijmans ,  Simon Bernardus Cornelis Maria Martens ,  Hans Butler ,  Antonius Franciscus Johannes De Groot

IPC: G03F7/20 ,  H02K41/03 ,  H02K11/21 ,  H02K11/30 ,  H02K15/06

Abstract: An actuator includes coil assemblies arranged in an array, wherein each coil assembly defines a core chamber having a core chamber height; and at least one magnetic member that extends partly along the core chamber height of the core chamber of a corresponding at least one coil assembly, wherein the at least one magnetic member is made of a magnetic material. A shape of the at least one magnetic member, a size of the at least one magnetic member, a position of the at least one magnetic member and/or the magnetic material of the at least one magnetic member may be selected so as to control one or more parameters of the actuator.