公开(公告)号：US20230005699A1

公开(公告)日：2023-01-05

申请号：US17941897

申请日：2022-09-09

Applicant: ASML Netherlands B.V.

Inventor： Christiaan OTTEN ,  Christian TEUNISSEN ,  Boudewjin Weijert Herman Jan VAN DER KROON ,  Jurgen VAN SOEST

IPC: H01J37/09 ,  H01J37/04

Abstract: Disclosed herein is an aperture body for passing a portion of a charged particle beam propagating along a beam path comprising an axis, the aperture body comprising: an up-beam facing surface; a chamber portion comprising an up-beam end, a down-beam end and an up-beam plate, wherein the up-beam plate extends radially inwards from the up-beam end and the up-beam plate is configured to define an entrance opening around the beam path; wherein: the up-beam facing surface extends radially inwards from the down-beam end; the up-beam facing surface comprises an aperture portion that is configured to define an opening around the beam path; and the opening defined by the aperture portion is smaller than the entrance opening.