公开(公告)号：US11003095B2

公开(公告)日：2021-05-11

申请号：US16332002

申请日：2017-08-31

Applicant: ASML NETHERLANDS B.V. ,  ASML HOLDING N.V.

Inventor： Krijn Frederik Bustraan ,  Yang-Shan Huang ,  Antonius Franciscus Johannes De Groot ,  Minkyu Kim ,  Jasper Anne Frido Marikus Simons ,  Theo Anjes Maria Ruijl ,  Ronald Josephus Maria Lamers

IPC: G03F7/20

Abstract: A positioning system for positioning an object. The positioning system includes a stage, a balance mass and an actuator system. The stage is for holding the object. The actuator system is arranged to drive the stage in a first direction while driving the balance mass in a second direction opposite to the first direction. The stage is moveable in the first direction in a movement range. When the stage is moving in the first direction and is at an end of the movement range, the positioning system is arranged to collide the stage frontally into the balance mass.