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公开(公告)号：US10295916B2
公开(公告)日：2019-05-21
申请号：US15961399
申请日：2018-04-24
Applicant: ASML NETHERLANDS B.V.
Inventor： Heine Melle Mulder , Andrey Sergeevich Tychkov , Willem Van Schaik
Abstract: Disclosed is a radiation source module and a radiation collector for the module with the radiation collector comprising a substrate coated with at least one reflective layer and a plurality of perforations within the reflective layer, with the plurality of holes forming vertices of a grid substantially covering the surface, and wherein the coating may comprise multiple layers.
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