公开(公告)号：US10684558B2

公开(公告)日：2020-06-16

申请号：US16343569

申请日：2017-09-27

Applicant: ASML NETHERLANDS B.V.

Inventor： Pim Jozef Hendrik Duijsens ,  Antonius Franciscus Johannes De Groot

IPC: G03F7/20 ,  H01L21/68 ,  H02K41/03

Abstract: A motor assembly includes linear motors, each linear motor configured to generate a driving force in a driving direction and each having a first electromagnetic assembly and a second electromagnetic assembly, configured to co-operate with the first electromagnetic assembly, for generating the driving force, wherein the first electromagnetic assembly and the second electromagnetic assembly face each other and define a gap between each other in a direction perpendicular to the driving direction. A first interface connects the first electromagnetic assemblies to a common member. A second interface connects the second electromagnetic assemblies to the object to be driven. The first and second electromagnetic assemblies are stacked in the direction perpendicular to the driving direction, and the first and/or second interface is configured to enable a relative displacement between the respective first electromagnetic assemblies and the second electromagnetic assemblies in the direction perpendicular to the driving direction.