公开(公告)号：US20250028254A1

公开(公告)日：2025-01-23

申请号：US18712560

申请日：2022-10-27

Applicant: ASML NETHERLANDS B.V.

Inventor： Huaichen ZHANG ,  Vadim Yourievich TIMOSHKOV ,  Cyrus Emil TABERY ,  Marc HAUPTMANN ,  Oleksandr KHODKO

IPC: G03F7/00

Abstract: A method for determining a mechanical property of a layer applied to a substrate. The method includes obtaining input data including metrology data relating to the layer and layout data relating to a layout of a pattern to be applied in the layer. A first model or first model term is used to determine a global mechanical property related to the layer based on at least the input data; and at least one second model or at least one second model term is used to predict a mechanical property distribution or associated overlay map based on the first mechanical property and the layout data, the mechanical property distribution describing the mechanical property variation over the layer.