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公开(公告)号：US20220404711A1
公开(公告)日：2022-12-22
申请号：US17763698
申请日：2020-09-22
Applicant: ASML NETHERLANDS B.V.
Inventor： Ning GU , Liping REN , Kui-Jun HUANG , Jian WU
Abstract: A method for monitoring performance of a manufacturing process is described. The method includes receiving one or more input signals that convey information related to geometry of a substrate generated by the manufacturing process; and determining, with a prediction model, variation in the manufacturing process based on the one or more input signals. A method for predicting substrate geometry associated with a manufacturing process is also described. The method includes receiving input information including geometry information and manufacturing process information for a substrate; and predicting, using a machine learning prediction model, output substrate geometry based on the input information. The method may further include tuning the predicted output substrate geometry. The tuning includes comparing the output substrate geometry to corresponding physical substrate measurements and/or predictions from a different non-machine learning prediction model, generating a loss function based on the comparison, and optimizing the loss function.
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公开(公告)号：US20190250519A1
公开(公告)日：2019-08-15
申请号：US16305913
申请日：2017-06-01
Applicant: ASML NETHERLANDS B.V.
Inventor： Ning GU , Daimian WANG , Jen-Shiang WANG
Abstract: A method including computing a multi-variable cost function, the multi-variable cost function representing a metric characterizing a degree of matching between a result when measuring a metrology target structure using a substrate measurement recipe and a behavior of a pattern of a functional device, the metric being a function of a plurality of design variables including a parameter of the metrology target structure, and adjusting the design variables and computing the cost function with the adjusted design variables, until a certain termination condition is satisfied.
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