公开(公告)号：US20210349398A1

公开(公告)日：2021-11-11

申请号：US17282871

申请日：2019-09-19

Applicant: ASML NETHERLANDS B.V.

Inventor： Vahid MOHAMMADI ,  Yassin CHOWDHURY ,  Pieter Cristiaan DE GROOT ,  Wouter Joep ENGELEN ,  Marcel Johannes Petrus Theodorus VAN DER HOORN

IPC: G03F7/20 ,  H01L31/02 ,  H01L31/0216 ,  H01L31/18

Abstract: A radiation filter for reducing transmission of an unwanted wavelength of radiation. The radiation filter includes zirconium and SiN3. The radiation filter may form part of a radiation sensor including a passivation layer arranged to receive radiation transmitted by the radiation filter, a photodiode arranged to receive radiation transmitted by the passivation layer, and circuit elements connected to the photodiode. The radiation sensor may perform optical measurements as part of an extreme ultraviolet lithographic apparatus or a lithographic tool.