公开(公告)号：US11126007B2

公开(公告)日：2021-09-21

申请号：US16913698

申请日：2020-06-26

Applicant: ASML Holding N.V.

Inventor： Douglas C. Cappelli ,  Stanislav Smirnov ,  Richard Carl Zimmerman ,  Joshua Adams ,  Alexander Kenneth Raub ,  Yevgeniy Konstantinovich Shmarev

IPC: G03F7/20 ,  G02B27/28 ,  G01N21/47 ,  G01N21/956

Abstract: According to one embodiment, a prism system is provided. The prism system includes a polarizing beam splitter (PBS) surface. The PBS surface is configured to generate first and second sub-beams having corresponding first and second polarization information from a received beam, the second polarization information being different than the first polarization information. A first optical path of the first sub-beam within the prism system has substantially same length as a second optical path of the second sub-beam within the prism system. Additionally or alternatively, the first sub-beam achieves a predetermined polarization extinction ratio.

公开(公告)号：US10747010B2

公开(公告)日：2020-08-18

申请号：US16217424

申请日：2018-12-12

Applicant: ASML Holding N.V.

Inventor： Douglas C. Cappelli ,  Stanislav Smirnov ,  Richard Carl Zimmerman ,  Joshua Adams ,  Alexander Kenneth Raub ,  Yevgeniy Konstantinovich Shmarev

IPC: G01N21/956 ,  G03F7/20 ,  G02B27/28 ,  G01N21/47

Abstract: According to one embodiment, a prism system is provided. The prism system includes a polarizing beam splitter (PBS) surface. The PBS surface is configured to generate first and second sub-beams having corresponding first and second polarization information from a received beam, the second polarization information being different than the first polarization information. A first optical path of the first sub-beam within the prism system has substantially same length as a second optical path of the second sub-beam within the prism system. Additionally or alternatively, the first sub-beam achieves a predetermined polarization extinction ratio.