公开(公告)号：US10811219B2

公开(公告)日：2020-10-20

申请号：US16057762

申请日：2018-08-07

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Ofer Shneyour ,  Ron Naftali ,  Ronnie Porat

IPC: H01J37/28 ,  H01J37/22 ,  H01J37/305

Abstract: A method for evaluating a region of an object, the method may include repeating, for each sub-region out of a first sub-region of the region till a penultimate sub-region of the region, the steps of: (a) acquiring, by a charged particle imager, a charged particle image of the sub-region; and (b) milling, by a charged particle miller, the sub-region to expose another sub-region of region; acquiring, by the charged particle imager, a charged particle image of a last sub-region of the region; and generating three-dimensional information about a content of the region based on charge particle images of the first sub-region till last sub-region of the region.

公开(公告)号：US20200051777A1

公开(公告)日：2020-02-13

申请号：US16057762

申请日：2018-08-07

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Ofer Shneyour ,  Ron Naftali ,  Ronnie Porat

IPC: H01J37/22 ,  H01J37/305 ,  H01J37/28

Abstract: A method for evaluating a region of an object, the method may include repeating, for each sub-region out of a first sub-region of the region till a penultimate sub-region of the region, the steps of: (a) acquiring, by a charged particle imager, a charged particle image of the sub-region; and (b) milling, by a charged particle miller, the sub-region to expose another sub-region of region; acquiring, by the charged particle imager, a charged particle image of a last sub-region of the region; and generating three-dimensional information about a content of the region based on charge particle images of the first sub-region till last sub-region of the region.