公开(公告)号：US20220102117A1

公开(公告)日：2022-03-31

申请号：US17032220

申请日：2020-09-25

Applicant: APPLIED MATERIALS, INC.

Inventor： Reyn Tetsuro WAKABAYASHI ,  Carlaton WONG ,  Timothy Joseph FRANKLIN

IPC: H01J37/32 ,  H01L21/67

Abstract: Embodiments of components for use in substrate process chambers are provided herein. In some embodiments, a component for use in a substrate process chamber includes: a body having an opening extending partially through the body from a top surface of the body, wherein the opening includes a threaded portion for fastening the body to a second process chamber component, wherein the threaded portion includes a plurality of threads defining a plurality of rounded crests and a plurality of rounded roots, and wherein a depth of the threaded portion, being a radial distance between a rounded crest of the plurality of rounded crests and an adjacent root of the plurality of rounded roots, decreases from a first depth to a second depth at a last thread of the plurality of threads.

公开(公告)号：US20220093361A1

公开(公告)日：2022-03-24

申请号：US17028587

申请日：2020-09-22

Applicant: Applied Materials, Inc.

Inventor： Reyn Tetsuro WAKABAYASHI ,  Carlaton WONG ,  Timothy Joseph FRANKLIN

IPC: H01J37/32

Abstract: Embodiments of showerheads are provided herein. In some embodiments, a showerhead assembly includes a chill plate having a plurality of recursive gas paths and one or more cooling channels disposed therein, wherein each of the plurality of recursive gas paths is fluidly coupled to a single gas inlet extending to a first side of the chill plate and a plurality of gas outlets extending to a second side of the chill plate; and a heater plate coupled to the chill plate, wherein the heater plate includes a plurality of first gas distribution holes extending from a top surface thereof to a plurality of plenums disposed within the heater plate, the plurality of first gas distribution holes corresponding with the plurality of gas outlets of the chill plate, and a plurality of second gas distribution holes extending from the plurality of plenums to a lower surface of the heater plate.

公开(公告)号：US20210287881A1

公开(公告)日：2021-09-16

申请号：US17156957

申请日：2021-01-25

Applicant: APPLIED MATERIALS, INC.

Inventor： Timothy Joseph FRANKLIN ,  Carlaton WONG ,  Reyn Tetsuro WAKABAYASHI ,  Daniel Sang BYUN ,  Steven BABAYAN

IPC: H01J37/32 ,  H01L21/687

Abstract: An apparatus for processing substrates that includes a process chamber with a process volume located above a substrate support assembly surrounded by an edge ring, an upper electrode located above the process volume and a conductive tuning ring surrounding the upper electrode and in electrical contact with the upper electrode. The conductive tuning ring has at least one gas port on a lower surface above the edge ring. The conductive tuning may also have at least one stepped portion on the lower surface that forms an extended bottom surface. In some embodiments, the extended bottom surface may slant radially inwardly or radially outwardly. In some embodiments, the extended bottom surface may have one or more radiused edges.

公开(公告)号：US20220093362A1

公开(公告)日：2022-03-24

申请号：US17370619

申请日：2021-07-08

Applicant: Applied Materials, Inc.

Inventor： Joseph Frederick BEHNKE ,  Reyn Tetsuro WAKABAYASHI ,  Carlaton WONG ,  Timothy Joseph FRANKLIN ,  Joseph F. SOMMERS

IPC: H01J37/32

Abstract: Embodiments of showerheads are provided herein. In some embodiments, a showerhead assembly includes a chill plate comprising a gas plate and a cooling plate having an aluminum-silicon foil interlayer disposed therebetween for diffusion bonding the gas plate to the cooling plate and a heater plate comprising a first plate, a second plate, and a third plate, wherein an aluminum-silicon foil interlayer is disposed between the first plate and the cooling plate for diffusion bonding the first plate to the cooling plate, wherein an aluminum-silicon foil interlayer is disposed between the first plate and the second plate for diffusion bonding the first plate to the second plate, and wherein an aluminum-silicon foil interlayer is disposed between the second plate and the third plate for diffusion bonding the second plate to the third plate.

公开(公告)号：US20210331183A1

公开(公告)日：2021-10-28

申请号：US17240462

申请日：2021-04-26

Applicant: APPLIED MATERIALS, INC.

Inventor： Carlaton WONG ,  Reyn Tetsuro WAKABAYASHI

IPC: B05B1/18 ,  F16B37/04

Abstract: Embodiments of showerhead assemblies and fasteners for use in coupling components of showerhead assemblies are provided herein. More particularly, the fasteners described herein can advantageously be used to connect a gas distribution plate to a backing plate of the showerhead assembly. The fasteners described herein can further advantageously be used to robustly connect components together where the components have different coefficients of thermal expansion.