公开(公告)号：US20190316251A1

公开(公告)日：2019-10-17

申请号：US15950726

申请日：2018-04-11

Applicant: APPLIED MATERIALS, INC.

Inventor： CHENG-HSIUNG TSAI ,  ANANTHKRISHNA JUPUDI ,  EIJI ASAHINA ,  SARATH BABU

IPC: C23C14/52 ,  C23C14/56 ,  C23C14/54 ,  C23C14/02

Abstract: Methods and apparatus for detecting a shutter disk assembly in a process chamber using a number of sensors. A first, second, and third sensor in a shutter housing for a shutter disk assembly provide indications of a status of the shutter disk assembly. The indications are used in part to determine the operational status of the shutter disk assembly along with process information from a process controller. The operational status is then used to alter a process of the process chamber when necessary.