公开(公告)号：US20170306488A1

公开(公告)日：2017-10-26

申请号：US15465526

申请日：2017-03-21

Applicant: APPLIED MATERIALS, INC.

Inventor： Daping YAO ,  Hyman W.H. LAM ,  Jiang LU ,  Dien-Yeh WU ,  Can XU ,  Paul F. MA ,  Mei CHANG

IPC: C23C16/458 ,  C23C16/455

CPC classification number: C23C16/458 ,  C23C16/4404 ,  C23C16/455 ,  C23C16/45512

Abstract: A gas feedthrough assembly and processing apparatus using the same are disclosed herein. In some embodiments, the gas feedthrough assembly, includes a dielectric body; at least one channel extending through the dielectric body; and a dielectric tube disposed within the at least one channel, wherein an inner diameter of the at least one channel is greater than an outer diameter of the dielectric tube such that a gap is formed between an outer wall of the dielectric tube and an inner wall of the at least one channel.