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公开(公告)号:US20240219238A1
公开(公告)日:2024-07-04
申请号:US18288579
申请日:2022-05-02
申请人: 4D Photonics GmbH
发明人: Christoph Franz , Oliver Bruchwald , Max Funck
IPC分类号: G01J5/0801 , G01J5/00 , G01J5/08 , G01J5/0806 , G01J5/20 , G01J5/22 , G01J5/60
CPC分类号: G01J5/0801 , G01J5/0806 , G01J5/0814 , G01J5/22 , G01J5/601 , G01J5/0018 , G01J2005/202 , G01J2005/607
摘要: The invention relates to a device for the spectrally resolved detection of optical radiation (5) during a thermal process, more particularly during laser processing. The device comprises at least two elements (4.1, 4.2) which are light-sensitive in one 5 predefined wavelength range each, a reflective diffraction grating (2), and at least one lens (3) for focusing and collimation. The device optionally comprises a reflective beam splitter (1) designed to divide the incident optical radiation (5) into a plurality of partial beams (5.1, 5.2). Said reflective beam splitter (1) is disposed upstream of the at least one lens (3) along the propagation direction of the optical radiation (5). The partial beams (5.1, 5.2) are spectrally split by means of the diffraction grating (2), and at least the first order of diffraction is deflected back through the at least one lens (3) onto one of the light-sensitive elements (4.1, 4.2).