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公开(公告)号:US12109650B2
公开(公告)日:2024-10-08
申请号:US17403989
申请日:2021-08-17
Applicant: 21TH CENTURY CO., LTD
Inventor: Sung Hwan Kim , Hyoung Shik Kang , Dong Bin You
Abstract: Proposed is a planing-polishing apparatus 1 using a femtosecond pulsed laser and performing polishing of a planar workpiece to reduce surface roughness of the workpiece after performing planing of the workpiece using a femtosecond pulsed laser beam.