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公开(公告)号:US20080277826A1
公开(公告)日:2008-11-13
申请号:US11980918
申请日:2007-10-31
Applicant: Stephen Y. Chou , Zengli Fu , Lei Chen , Haixlong Ge
Inventor: Stephen Y. Chou , Zengli Fu , Lei Chen , Haixlong Ge
CPC classification number: G03F7/0002 , B82Y10/00 , B82Y40/00
Abstract: The invention is directed to new nanoimprint resist and thin-film compositions for use in nanoimprinting lithography. The compositions permit economical high-throughput mass production, using nanoimprint processes, of patterns having sub-200 nm, and even sub-50 nm features.
Abstract translation: 本发明涉及用于纳米压印光刻的新型纳米压印抗蚀剂和薄膜组合物。 该组合物允许使用纳米压印工艺的具有亚200nm,甚至低于50nm特征的图案的经济高通量大批量生产。
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公开(公告)号:US08603386B2
公开(公告)日:2013-12-10
申请号:US11980918
申请日:2007-10-31
Applicant: Stephen Y. Chou , Zengli Fu , Lei Chen , Haixlong Ge
Inventor: Stephen Y. Chou , Zengli Fu , Lei Chen , Haixlong Ge
IPC: B29C35/08
CPC classification number: G03F7/0002 , B82Y10/00 , B82Y40/00
Abstract: The invention is directed to new nanoimprint resist and thin-film compositions for use in nanoimprinting lithography. The compositions permit economical high-throughput mass production, using nanoimprint processes, of patterns having sub-200 nm, and even sub-50 nm features.
Abstract translation: 本发明涉及用于纳米压印光刻的新的纳米压印抗蚀剂和薄膜组合物。 该组合物允许使用纳米压印工艺的具有亚200nm,甚至低于50nm特征的图案的经济高通量大批量生产。
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公开(公告)号:US20070010641A1
公开(公告)日:2007-01-11
申请号:US10567292
申请日:2004-07-19
Applicant: Ashok Adur , Zengli Fu , Roger Avakian
Inventor: Ashok Adur , Zengli Fu , Roger Avakian
IPC: C08F4/00
CPC classification number: C08L23/16 , C08K3/16 , C08K5/0008 , C08L23/10 , C08L61/06 , C08L2312/00 , C08L2666/06
Abstract: A catalyst system is disclosed for use with elastomeric compositions, such as thermoset elastomers or thermoplastic elastomers. The catalyst system comprises at least one phenolic resin and at least one other ingredient selected from the group consisting of a non-transition metal halide and a nanoclay, provided that when the ingredient is nanoclay, the phenolic resin is brominated. Optionally, the catalyst system can include at least one acid or at least one hydrogen halide scavenger, or both. The catalyst system avoids the use of tin-containing materials, reducing environmental concerns. Elastomers and their preparation in the presence of the catalyst system are also disclosed, including the preparation of white elastomers.
Abstract translation: 公开了用于弹性体组合物的催化剂体系,例如热固性弹性体或热塑性弹性体。 催化剂体系包含至少一种酚醛树脂和至少一种选自非过渡金属卤化物和纳米粘土的其它成分,条件是当成分为纳米粘土时,酚醛树脂被溴化。 任选地,催化剂体系可以包括至少一种酸或至少一种卤化氢清除剂,或两者。 催化剂体系避免使用含锡材料,减少环境问题。 还公开了弹性体及其在催化剂体系存在下的制备,包括制备白色弹性体。
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