公开(公告)号：US06498410B1

公开(公告)日：2002-12-24

申请号：US09536569

申请日：2000-03-28

Applicant: Hirokazu Yashiro ,  Youichi Kuwayama

Inventor： Hirokazu Yashiro ,  Youichi Kuwayama

IPC: F04B3900

CPC classification number: F04D19/042 ,  F04D19/048 ,  F04D29/0516 ,  F04D29/057 ,  F16C17/026 ,  F16C32/044 ,  F16C33/107 ,  F16C2360/45 ,  H02K7/088 ,  H02K7/09 ,  H02K7/14

Abstract: A compact turbo-molecular pump having a high depressurizing capability. A motor driving the pump includes a rotary shaft, the distal and basal ends of which are supported by magnetic bearings. Each magnetic bearing has a rotated magnet, which is rotated integrally with the rotary shaft, and a fixed magnet, which is opposed to the rotated magnet. The rotated and fixed magnets repel each other. The diameter of the magnetic bearing at the distal end of the rotary shaft is greater than that of the magnetic bearing at the basal end. This decreases movement of the rotary shaft toward its distal end when the pump operates.

Abstract translation: 具有高减压能力的紧凑型涡轮分子泵。 驱动泵的电动机包括旋转轴，其远端和底端由磁性轴承支撑。 每个磁性轴承具有与旋转轴一体旋转的旋转磁体和与旋转的磁体相对的固定磁体。 旋转和固定的磁体彼此排斥。 旋转轴远端的磁性轴承的直径大于基端的磁性轴承的直径。 当泵工作时，这减少了旋转轴朝向其远端的运动。

公开(公告)号：US06815855B2

公开(公告)日：2004-11-09

申请号：US10636422

申请日：2003-08-06

Applicant: Hirokazu Yashiro ,  Youichi Kuwayama

Inventor： Hirokazu Yashiro ,  Youichi Kuwayama

IPC: H02K708

CPC classification number: F04D29/057 ,  F04D19/04 ,  F04D29/023 ,  F05D2300/20 ,  F05D2300/50212 ,  F16C17/02 ,  F16C17/026 ,  F16C33/107 ,  F16C2360/45 ,  H02K7/088 ,  H02K7/09 ,  H02K7/14 ,  H02K21/14

Abstract: A compact turbo-molecular pump having a high depressurizing capability. A motor for rotating a rotor vane includes an air bearing. The air bearing has a rotary cylinder and a fixed surface surrounding the rotary cylinder. The material of the rotary cylinder has a coefficient of thermal expansion that is smaller than that of the material of the fixed surface. Thus, change in the dimensions of the rotary cylinder is smaller than that of the fixed surface even if the temperature of the air bearing rises during operation of the pump. Thus, the rotary cylinder avoids contact with the fixed surface.

公开(公告)号：US06784580B2

公开(公告)日：2004-08-31

申请号：US10288120

申请日：2002-11-05

Applicant: Hirokazu Yashiro ,  Youichi Kuwayama

Inventor： Hirokazu Yashiro ,  Youichi Kuwayama

IPC: F04D1904

CPC classification number: F04D19/042 ,  F04D19/048 ,  F04D29/0516 ,  F04D29/057 ,  F16C17/026 ,  F16C32/044 ,  F16C33/107 ,  F16C2360/45 ,  H02K7/088 ,  H02K7/09 ,  H02K7/14

Abstract: A compact turbo-molecular pump having a high depressurizing capability. A motor driving the pump includes a rotary shaft, the distal and basal ends of which are supported by magnetic bearings. Each magnetic bearing has a rotated magnet, which is rotated integrally with the rotary shaft, and a fixed magnet, which is opposed to the rotated magnet. The rotated and fixed magnets repel each other. The diameter of the magnetic bearing at the distal end of the rotary shaft is greater than that of the magnetic bearing at the basal end. This decreases movement of the rotary shaft toward its distal end when the pump operates.

Abstract translation: 具有高减压能力的紧凑型涡轮分子泵。 驱动泵的电动机包括旋转轴，其远端和底端由磁性轴承支撑。 每个磁性轴承具有与旋转轴一体旋转的旋转磁体和与旋转的磁体相对的固定磁体。 旋转和固定的磁体彼此排斥。 旋转轴远端的磁性轴承的直径大于基端的磁性轴承的直径。 当泵工作时，这减少了旋转轴朝向其远端的运动。

公开(公告)号：US06664683B1

公开(公告)日：2003-12-16

申请号：US09493983

申请日：2000-01-28

Applicant: Hirokazu Yashiro ,  Youichi Kuwayama

Inventor： Hirokazu Yashiro ,  Youichi Kuwayama

IPC: H02K516

CPC classification number: F04D29/057 ,  F04D19/04 ,  F04D29/023 ,  F05D2300/20 ,  F05D2300/50212 ,  F16C17/02 ,  F16C17/026 ,  F16C33/107 ,  F16C2360/45 ,  H02K7/088 ,  H02K7/09 ,  H02K7/14 ,  H02K21/14

Abstract: A compact turbo-molecular pump having a high depressurizing capability. A motor for rotating a rotor vane includes an air bearing. The air bearing has a rotary cylinder and a fixed surface surrounding the rotary cylinder. The material of the rotary cylinder has a coefficient of thermal expansion that is smaller than that of the material of the fixed surface. Thus, change in the dimensions of the rotary cylinder is smaller than that of the fixed surface even if the temperature of the air bearing rises during operation of the pump. Thus, the rotary cylinder avoids contact with the fixed surface.

Abstract translation: 具有高减压能力的紧凑型涡轮分子泵。 用于旋转转子叶片的电动机包括空气轴承。 空气轴承具有旋转圆筒和围绕旋转圆筒的固定表面。 旋转圆筒的材料的热膨胀系数小于固定表面材料的热膨胀系数。 因此，即使在泵的运行期间空气轴承的温度上升，旋转圆筒的尺寸的变化也小于固定表面的尺寸。 因此，旋转圆筒避免与固定表面的接触。