公开(公告)号：US07580606B2

公开(公告)日：2009-08-25

申请号：US12231392

申请日：2008-09-02

申请人： Osamu Imaki ,  Yoshihiko Hamada ,  Yoshichika Kato ,  Keiichi Mori ,  Kenji Kondou

发明人： Osamu Imaki ,  Yoshihiko Hamada ,  Yoshichika Kato ,  Keiichi Mori ,  Kenji Kondou

IPC分类号： G02B6/00 ,  G02B6/02 ,  G02B6/36 ,  B26F3/00 ,  B65H35/10 ,  B65H35/00 ,  B26F3/02

CPC分类号： G02B6/3652 ,  G02B6/3636 ,  G02B6/3692 ,  Y10T225/321

摘要： Marker grooves of an optical fiber are formed by a marker groove forming device including at least, on a substrate, a fiber guide and optical fiber pressing springs formed on a side wall surface in the fiber guide. The optical fiber pressing springs include edges contacted and pressed to the side of an optical fiber stored in the fiber guide, and plate springs for pressing the edges to the side of the optical fiber with fulcra on the side wall surface in the fiber guide. The optical fiber is pressed to a side wall surface in the fiber guide, and the edges are formed at a predetermined distance from each other.

公开(公告)号：US20090181487A1

公开(公告)日：2009-07-16

申请号：US12315652

申请日：2008-12-05

申请人： Keiichi Mori ,  Yoshichika Kato ,  Satoshi Yoshida ,  Kenji Kondou ,  Yoshihiko Hamada ,  Osamu Imaki

发明人： Keiichi Mori ,  Yoshichika Kato ,  Satoshi Yoshida ,  Kenji Kondou ,  Yoshihiko Hamada ,  Osamu Imaki

IPC分类号： H01L21/02

CPC分类号： B81C1/00825 ,  B81B7/0029 ,  B81B2201/045 ,  B81B2203/033 ,  G02B26/0841 ,  Y10T29/49 ,  Y10T29/49002 ,  Y10T307/865

摘要： A microminiature moving device has disposed on a single-crystal silicon substrate movable elements such as a movable rod and a movable comb electrode that are displaceable in parallel to the substrate surface and stationary parts that are fixedly secured to the single-crystal silicon substrate with an insulating layer sandwiched between. Depressions are formed in the surface regions of the single-crystal silicon substrate where no stationary parts are present and the movable parts are positioned above the depressions. The depressions form gaps large enough to prevent foreign bodies from causing shorts and malfunctioning of the movable parts.

摘要翻译： 微型移动装置设置在单晶硅衬底上，可移动元件如活动杆和可移动梳状电极可平行移动到衬底表面，固定部分固定固定在单晶硅衬底上 绝缘层夹在中间。 在单晶硅衬底的不存在固定部分并且可移动部件位于凹部上方的表面区域中形成凹陷。 凹陷形成足够大的间隙，以防止异物引起可动部件的短路和故障。

公开(公告)号：US20090004765A1

公开(公告)日：2009-01-01

申请号：US12070931

申请日：2008-02-22

申请人： Yoshichika Kato ,  Satoshi Yoshida ,  Keiichi Mori ,  Kenji Kondou ,  Yoshihiko Hamada ,  Osamu Imaki

发明人： Yoshichika Kato ,  Satoshi Yoshida ,  Keiichi Mori ,  Kenji Kondou ,  Yoshihiko Hamada ,  Osamu Imaki

IPC分类号： H01L21/02

CPC分类号： G02B6/3584 ,  B81B3/0083 ,  B81B2201/045 ,  B81C1/00182 ,  G02B6/122 ,  G02B6/136 ,  G02B6/3514 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/357 ,  G02B6/3596 ,  G02B26/0841

摘要： A micro-optic device including a complicate structure and a movable mirror is made to be manufactured in a reduced length of time. A silicon substrate and a single crystal silicon device layer with an intermediate layer of silicon dioxide interposed therebetween defines a substrate on which a layer of mask material is formed and is patterned to form a mask having the same pattern as the configuration of the intended optical device as viewed in plan view. A surface which is to be constricted as a mirror surface is chosen to be in a plane of the silicon crystal. Using the mask, the device layer is vertically etched by a reactive ion dry etching until the intermediate layer is exposed. Subsequently, using KOH solution, a wet etching which is anisotropic to the crystallographic orientation is performed with an etching rate which is on the order of 0.1 μm/min for a time interval on the order of ten minutes is performed to convert the sidewall surface of the mirror into a smooth crystallographic surface. Subsequently, the intermediate layer is selectively subject to a wet etching to remove the intermediate layer only in an area located below the movable part of the optical device.

摘要翻译： 制造包括复杂结构的微光学装置和可移动反射镜以缩短的时间来制造。 硅衬底和介于其间的二氧化硅中间层的单晶硅器件层限定了其上形成有掩模材料层的衬底并且被图案化以形成具有与所需光学器件的配置相同的图案的掩模 如平面图所示。 要被收缩成为镜面的表面被选择在硅晶体的平面内。 使用掩模，通过反应离子干蚀刻垂直蚀刻器件层，直到中间层露出。 随后，使用KOH溶液，对晶体取向进行各向异性的湿式蚀刻，以10分钟左右的时间间隔进行蚀刻速度为0.1μm/分钟左右的蚀刻速度， 镜子变成光滑的结晶表面。 随后，中间层选择性地进行湿式蚀刻，仅在位于光学器件的可移动部分下方的区域中除去中间层。

公开(公告)号：US20090003773A1

公开(公告)日：2009-01-01

申请号：US12231392

申请日：2008-09-02

申请人： Osamu Imaki ,  Yoshihiko Hamada ,  Yoshichika Kato ,  Keiichi Mori ,  Kenji Kondou

发明人： Osamu Imaki ,  Yoshihiko Hamada ,  Yoshichika Kato ,  Keiichi Mori ,  Kenji Kondou

IPC分类号： G02B6/36 ,  C03B37/16

CPC分类号： G02B6/3652 ,  G02B6/3636 ,  G02B6/3692 ,  Y10T225/321

摘要： Marker grooves of an optical fiber are formed by a marker groove forming device including at least, on a substrate, a fiber guide and optical fiber pressing springs formed on a side wall surface in the fiber guide. The optical fiber pressing springs include edges contacted and pressed to the side of an optical fiber stored in the fiber guide, and plate springs for pressing the edges to the side of the optical fiber with fulcra on the side wall surface in the fiber guide. The optical fiber is pressed to a side wall surface in the fiber guide, and the edges are formed at a predetermined distance from each other.

摘要翻译： 光纤的标记槽由标记槽形成装置形成，标记槽形成装置至少包括在基板上，纤维引导件和形成在光纤引导件的侧壁表面上的光纤按压弹簧。 光纤按压弹簧包括接触并压在存储在光纤引导器中的光纤的一侧的边缘，以及用于在光纤引导件的侧壁表面上用光束将边缘压向光纤侧面的板簧。 光纤被压到纤维引导件中的侧壁表面，并且边缘彼此以预定的距离形成。

公开(公告)号：US20090146228A1

公开(公告)日：2009-06-11

申请号：US12315363

申请日：2008-12-01

申请人： Keiichi Mori ,  Yoshichika Kato ,  Satoshi Yoshida ,  Kenji Kondou ,  Yoshihiko Hamada ,  Osamu Imaki

发明人： Keiichi Mori ,  Yoshichika Kato ,  Satoshi Yoshida ,  Kenji Kondou ,  Yoshihiko Hamada ,  Osamu Imaki

IPC分类号： H01L29/82

CPC分类号： B81C1/00825 ,  B81B7/0029 ,  B81B2201/045 ,  B81B2203/033 ,  G02B26/0841 ,  Y10T29/49 ,  Y10T29/49002 ,  Y10T307/865

摘要： A microminiature moving device has disposed on a single-crystal silicon substrate movable elements such as a movable rod and a movable comb electrode that are displaceable in parallel to the substrate surface and stationary parts that are fixedly secured to the single-crystal silicon substrate with an insulating layer sandwiched between. Depressions are formed in the surface regions of the single-crystal silicon substrate where no stationary parts are present and the movable parts are positioned above the depressions. The depressions form gaps large enough to prevent foreign bodies from causing shorts and malfunctioning of the movable parts.

摘要翻译： 微型移动装置设置在单晶硅衬底上，可移动元件如活动杆和可移动梳状电极可平行移动到衬底表面，固定部分固定固定在单晶硅衬底上 绝缘层夹在中间。 在单晶硅衬底的不存在固定部分并且可移动部件位于凹部上方的表面区域中形成凹陷。 凹陷形成足够大的间隙，以防止异物引起可动部件的短路和故障。

公开(公告)号：US07379635B2

公开(公告)日：2008-05-27

申请号：US11580599

申请日：2006-10-13

申请人： Yoshichika Kato ,  Keiichi Mori ,  Kenji Kondou ,  Osamu Imaki ,  Yoshihiko Hamada

发明人： Yoshichika Kato ,  Keiichi Mori ,  Kenji Kondou ,  Osamu Imaki ,  Yoshihiko Hamada

IPC分类号： G02B6/26

CPC分类号： G02B6/352 ,  G02B6/3514 ,  G02B6/355 ,  G02B6/357 ,  G02B6/358 ,  G02B26/0841

摘要： The end parts of three optical waveguide parts are supported, mutually in parallel, on a substrate, the end part of the center optical waveguide part being one input port and the end parts of other two optical waveguide parts being a first and a second output port,the emitted light from the input port is switched, by means of a first moving mirror and a second moving mirror which are switchingly inserted into positions having the same distance from the end face of the input port, to either the first output port side or the second output port side,the light from the first moving mirror and the light from the second moving mirror being reflected respectively in a first fixed mirror or a second fixed mirror, the light being respectively coupled to the first or the second output port.

摘要翻译： 三个光波导部分的端部相互并联地支撑在基板上，中心光波导部分的端部是一个输入端口，另外两个光波导部分的端部是第一和第二输出端口 通过第一移动反射镜和第二移动反射镜将来自输入端口的发射光切换到与输入端口的端面相同距离的位置切换到第一输出端口侧或第二输入端口侧 第二输出端口侧，来自第一移动镜的光和来自第二移动镜的光分别被反射在第一固定镜或第二固定镜中，所述光分别耦合到第一输出端口或第二输出端口。

公开(公告)号：US20080089648A1

公开(公告)日：2008-04-17

申请号：US11973836

申请日：2007-10-09

申请人： Osamu Imaki ,  Yoshihiko Hamada ,  Yoshichika Kato ,  Keiichi Mori ,  Kenji Kondou

发明人： Osamu Imaki ,  Yoshihiko Hamada ,  Yoshichika Kato ,  Keiichi Mori ,  Kenji Kondou

IPC分类号： G02B6/26

CPC分类号： G02B6/3652 ,  G02B6/3636 ,  G02B6/3692 ,  Y10T225/321

摘要： Marker grooves of an optical fiber are formed by a marker groove forming device including at least, on a substrate, a fiber guide and optical fiber pressing springs formed on a side wall surface in the fiber guide. The optical fiber pressing springs include edges contacted and pressed to the side of an optical fiber stored in the fiber guide, and plate springs for pressing the edges to the side of the optical fiber with fulcra on the side wall surface in the fiber guide. The optical fiber is pressed to a side wall surface in the fiber guide, and the edges are formed at a predetermined distance from each other.

摘要翻译： 光纤的标记槽由标记槽形成装置形成，标记槽形成装置至少包括在基板上，纤维引导件和形成在光纤引导件的侧壁表面上的光纤按压弹簧。 光纤按压弹簧包括接触并压在存储在光纤引导器中的光纤的一侧的边缘，以及用于在光纤引导件的侧壁表面上用光束将边缘压向光纤侧面的板簧。 光纤被压到纤维引导件中的侧壁表面，并且边缘彼此以预定的距离形成。

公开(公告)号：US07039268B2

公开(公告)日：2006-05-02

申请号：US10975208

申请日：2004-10-27

申请人： Satoshi Yoshida ,  Kenji Kondou ,  Osamu Imaki ,  Yoshihiko Hamada ,  Yoshichika Kato ,  Keiichi Mori

发明人： Satoshi Yoshida ,  Kenji Kondou ,  Osamu Imaki ,  Yoshihiko Hamada ,  Yoshichika Kato ,  Keiichi Mori

IPC分类号： G02B6/26

CPC分类号： G02B6/358 ,  G02B6/3514 ,  G02B6/3546 ,  G02B6/357 ,  G02B6/3584

摘要： An optical device formed on a substrate comprises: plural fiber channels formed in the top surface of the substrate; a mirror to be pushed into and pulled out of an optical path between optical fibers disposed in the fiber channels; a movable rod carrying at one end the mirror; a comb-type electrostatic actuator disposed in association with the intermediate portion of the movable rod, for moving the movable rod lengthwise thereof; and plural support beams disposed near the one and the other end of the movable rod on both sides of the point of application of driving force by the comb-type electrostatic actuator, for movably supporting the movable rod. The support beams support the movable rod at positions having line symmetry with respect to a center line parallel to the lengthwise direction of the movable rod, and points of supporting the movable rod by the plural support beams are symmetrical with respect to the point of application of the driving force by the comb-type electrostatic actuator. Even if the driving force by the comb-type electrostatic actuator contains a vector component of a direction different from the desired one in which to drive the movable rod, it is possible to suppress movement of the movable rod in other directions than the desired one to drive the movable rod.

摘要翻译： 形成在基板上的光学元件包括：形成在基板的顶面的多个光纤通道; 被设置在光纤通道中的光纤之间的光路中被推入和拉出的反射镜; 一个可移动的杆，在一端承载镜子; 与可动杆的中间部分相关联地设置的用于使活动杆纵向移动的梳状静电致动器; 以及多个支撑梁，其设置在通过梳型静电致动器施加驱动力的两侧的可动杆的一端和另一端附近，用于可移动地支撑可动杆。 支撑梁将可动杆支撑在相对于可移动杆的长度方向的中心线具有对称性的位置处，并且通过多个支撑梁支撑可动杆的点相对于应用点对称 梳状静电执行机构的驱动力。 即使通过梳型静电致动器的驱动力包含与驱动可动杆的期望方向不同的方向的矢量分量，也可以抑制可动杆在除了所需的方向以外的方向上的移动， 驱动可动杆。

公开(公告)号：US07003193B2

公开(公告)日：2006-02-21

申请号：US10958722

申请日：2004-10-04

申请人： Yoshichika Kato ,  Keiichi Mori ,  Satoshi Yoshida ,  Kenji Kondou ,  Yoshihiko Hamada ,  Osamu Imaki

发明人： Yoshichika Kato ,  Keiichi Mori ,  Satoshi Yoshida ,  Kenji Kondou ,  Yoshihiko Hamada ,  Osamu Imaki

IPC分类号： G02B6/26 ,  G02B6/00

CPC分类号： G02B6/3566 ,  G02B6/3514 ,  G02B6/3546 ,  G02B6/357 ,  G02B6/358 ,  G02B6/3584 ,  G02B6/3596 ,  G02B6/3636 ,  G02B6/3692

摘要： A movable part formed on a substrate and adapted to be displaced in a direction parallel to the sheet surface of the substrate, a fixing part formed and fixedly mounted on the substrate, and springy hinges extending parallel to the sheet surface of the substrate and having their opposite ends connected to the movable part and the fixing part for supporting the movable part in a displaceable manner are provided. As viewed in cross section in a plane perpendicular to the lengthwise direction of the hinges, the hinge has a width which is diminishing as the top surface of the substrate is approached, thus having a trapezoidal or triangular cross section. A width as measured on the top surface of the hinge which is required to provide an equivalent spring constant can be chosen to be greater than the width of a hinge having a rectangular cross section (constant width), and this facilitates the implementation of the photolithography during the manufacture.

摘要翻译： 可移动部件形成在基板上并且适于沿平行于基板的板表面的方向移位，形成并固定地安装在基板上的固定部分，以及平行于基板的板表面延伸的弹性铰链， 提供连接到可移动部分的相对端和用于以可移位方式支撑可移动部件的固定部分。 从与铰链长度方​​向垂直的平面中的横截面看，铰链的宽度随着基板的上表面接近而减小，因此具有梯形或三角形横截面。 可以选择在铰链的顶表面上测量的提供等效弹簧常数的宽度大于具有矩形横截面（恒定宽度）的铰链的宽度，并且这有助于实现光刻 在制造过程中。

公开(公告)号：US20050078908A1

公开(公告)日：2005-04-14

申请号：US10958722

申请日：2004-10-04

申请人： Yoshichika Kato ,  Keiichi Mori ,  Satoshi Yoshida ,  Kenji Kondou ,  Yoshihiko Hamada ,  Osamu Imaki

发明人： Yoshichika Kato ,  Keiichi Mori ,  Satoshi Yoshida ,  Kenji Kondou ,  Yoshihiko Hamada ,  Osamu Imaki

IPC分类号： G02B6/35 ,  G02B6/36

CPC分类号： G02B6/3566 ,  G02B6/3514 ,  G02B6/3546 ,  G02B6/357 ,  G02B6/358 ,  G02B6/3584 ,  G02B6/3596 ,  G02B6/3636 ,  G02B6/3692

摘要： A movable part formed on a substrate and adapted to be displaced in a direction parallel to the sheet surface of the substrate, a fixing part formed and fixedly mounted on the substrate, and springy hinges extending parallel to the sheet surface of the substrate and having their opposite ends connected to the movable part and the fixing part for supporting the movable part in a displaceable manner are provided. As viewed in cross section in a plane perpendicular to the lengthwise direction of the hinges, the hinge has a width which is diminishing as the top surface of the substrate is approached, thus having a trapezoidal or triangular cross section. A width as measured on the top surface of the hinge which is required to provide an equivalent spring constant can be chosen to be greater than the width of a hinge having a rectangular cross section (constant width), and this facilitates the implementation of the photolithography during the manufacture.

摘要翻译： 可移动部件形成在基板上并且适于沿平行于基板的板表面的方向移位，形成并固定地安装在基板上的固定部分，以及平行于基板的板表面延伸的弹性铰链， 提供连接到可移动部分的相对端和用于以可移位方式支撑可移动部件的固定部分。 从与铰链长度方​​向垂直的平面中的横截面看，铰链的宽度随着基板的上表面接近而减小，因此具有梯形或三角形横截面。 可以选择在铰链的顶表面上测量的提供等效弹簧常数的宽度大于具有矩形横截面（恒定宽度）的铰链的宽度，并且这有助于实现光刻 在制造过程中。