METHODS AND APPARATUS FOR IMPROVING THE ACCURACY AND REACH OF ELECTRONIC MEDIA EXPOSURE MEASUREMENT SYSTEMS
    1.
    发明申请
    METHODS AND APPARATUS FOR IMPROVING THE ACCURACY AND REACH OF ELECTRONIC MEDIA EXPOSURE MEASUREMENT SYSTEMS 审中-公开
    提高电子媒体曝光测量系统的准确性和方法的方法和装置

    公开(公告)号:US20080133291A1

    公开(公告)日:2008-06-05

    申请号:US11668931

    申请日:2007-01-30

    Abstract: Methods, systems, and computer program products for implementing product randomization and analysis in a manufacturing environment are provided. A method includes processing products for a plurality of lots, at process equipment, using a randomization technique for selecting each product in the lots. The method further including generating an operation identification record for each operation in the process recipe that includes mapping, for each operation, a slot identifier associated with a randomly selected product to a process variable identifier, a process tool, and the operation. The method also includes defining slot groupings using slot identifiers for a product carrier and identifying product yield patterns by analyzing historical yields for each of the slot groupings. The method also includes determining the frequency of occurrence of one or more product yield patterns for each operation in the process recipe by analyzing product yields from the operation identification records corresponding to the plurality of lots.

    Abstract translation: 提供了在制造环境中实施产品随机化和分析的方法,系统和计算机程序产品。 一种方法包括使用用于选择批次中的每个产品的随机化技术在处理设备处处理多个批次的产品。 所述方法还包括为所述过程配方中的每个操作生成操作识别记录,所述操作识别记录包括对于每个操作,将与随机选择的产品相关联的时隙标识符映射到过程变量标识符,处理工具和操作。 该方法还包括使用产品载体的时隙标识符来定义时隙分组,并通过分析每个时隙分组的历史收益率来识别产品产量模式。 该方法还包括通过从与多个批次相对应的操作识别记录中分析产品产量来确定处理配方中的每个操作的一个或多个产品收益模式的发生频率。

Patent Agency Ranking