公开(公告)号：US07132033B2

公开(公告)日：2006-11-07

申请号：US10788951

申请日：2004-02-27

申请人： Mark J. Boldizar ,  Robert T. Gamble ,  Vincent Matthew Hedrick ,  Jason M. Lawhorn ,  Alan H. Saikin ,  Katherine L. Tome

发明人： Mark J. Boldizar ,  Robert T. Gamble ,  Vincent Matthew Hedrick ,  Jason M. Lawhorn ,  Alan H. Saikin ,  Katherine L. Tome

IPC分类号： B32B37/02

CPC分类号： B32B38/10 ,  B24B37/205 ,  B24D18/00 ,  B32B37/12 ,  B32B38/0012 ,  B32B38/04 ,  B32B38/1841 ,  Y10T156/1052 ,  Y10T156/1057 ,  Y10T156/1084

摘要： A method of forming a layered polishing pad is disclosed. The method includes double-laminating a subpad on opposing sides with respective adhesive layers and bonding a polishing pad top layer to the subpad via the upper adhesive layer. The polishing pad optionally includes a window. Because the subpad is double-laminated, an opening can be formed through both the top and bottom adhesive layers as well as the subpad. Thus, when bonded to a top polishing pad layer having a window, the result is a layered polishing pad with a through optical path that does not include an adhesive layer.

摘要翻译： 公开了一种形成分层抛光垫的方法。 该方法包括在相对侧面上用相应的粘合剂层将亚垫层压并通过上部粘合剂层将抛光垫顶层粘合到子垫上。 抛光垫可选地包括窗口。 由于子层是双层的，所以可以通过顶部和底部粘合剂层以及子垫形成开口。 因此，当结合到具有窗口的顶部抛光垫层时，结果是具有不包括粘合剂层的贯穿光路的分层抛光垫。