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公开(公告)号：US20130153285A1
公开(公告)日：2013-06-20
申请号：US13328543
申请日：2011-12-16
申请人： Chwen YU , Yung-Ti HUNG , Kuo-An YEH , Tzu-Sou CHUANG , Chien-Teh HUANG
发明人： Chwen YU , Yung-Ti HUNG , Kuo-An YEH , Tzu-Sou CHUANG , Chien-Teh HUANG
IPC分类号： H05K9/00
CPC分类号： H05K9/0003 , H05K9/0075
摘要： A magnetic field shielding raised floor panel having a plurality of grain-oriented electrical steel (GOES) sections. The orientation of each GOES section is parallel to a top surface of the section. The plurality of GOES sections can include sidewall and lip portions. The plurality of GOES sections can be perforated to permit air flow through the GOES section. Openings in adjacent perforated GOES sections do not substantially overlap.
摘要翻译： 一种具有多个晶粒取向电工钢（GOES）部分的磁场屏蔽升高地板镶板。 每个GOES部分的方向平行于该部分的顶部表面。 多个GOES部分可以包括侧壁和唇部。 多个GOES部分可以穿孔以允许空气流过GOES部分。 相邻穿孔GOES部分中的开口基本上不重叠。
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公开(公告)号：US20140065719A1
公开(公告)日：2014-03-06
申请号：US13602528
申请日：2012-09-04
申请人： Chi-Wen Kuo , Yu-Kun Hung , Tzu-Sou Chuang
发明人： Chi-Wen Kuo , Yu-Kun Hung , Tzu-Sou Chuang
CPC分类号： G01N1/2202 , G01N21/82 , G01N31/22
摘要： A detection method for a substance and a system thereof are provided. The detection method for a substance contained in a sample includes providing a reagent in reaction with the substance to form a chelate; and pressurizing the substance to accumulate the chelate.
摘要翻译： 提供了一种物质及其系统的检测方法。 包含在样品中的物质的检测方法包括提供与物质反应形成螯合物的试剂; 并加压该物质以积聚螯合物。
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公开(公告)号：US08394156B2
公开(公告)日：2013-03-12
申请号：US12112385
申请日：2008-04-30
IPC分类号： B01D46/00
CPC分类号： H01L21/67017
摘要： In one embodiment, an air filtration system includes a first ventilation path connected between at least one external air supply and a clean room. The first ventilation path is configured to direct air from the at least one external air supply to the clean room. A second ventilation path is connected to the clean room. The second ventilation path is configured to recirculate air in the clean room. A third ventilation path, separate from the first path, is connected between the at least one external air supply and a tool environment disposed within the clean room. The third ventilation path includes an ultra-pure air filtration unit disposed between the outdoor air supply and the tool environment. The ultra-pure air filtration unit includes a compressor and a dryer.
摘要翻译： 在一个实施例中，空气过滤系统包括连接在至少一个外部空气供应和洁净室之间的第一通风路径。 第一通风路径构造成将空气从至少一个外部空气供应引导到洁净室。 第二个通风道连接到洁净室。 第二通风路径构造成使洁净室中的空气再循环。 与第一路径分离的第三通风路径连接在至少一个外部空气源和设置在洁净室内的工具环境之间。 第三通风路径包括设置在室外空气供应和工具环境之间的超纯空气过滤单元。 超纯空气过滤装置包括压缩机和烘干机。
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公开(公告)号：US09714887B2
公开(公告)日：2017-07-25
申请号：US13602528
申请日：2012-09-04
申请人： Chi-Wen Kuo , Yu-Kun Hung , Tzu-Sou Chuang
发明人： Chi-Wen Kuo , Yu-Kun Hung , Tzu-Sou Chuang
CPC分类号： G01N1/2202 , G01N21/82 , G01N31/22
摘要： A detection method for a substance and a system thereof are provided. The detection method for a substance contained in a sample includes providing a reagent in reaction with the substance to form a chelate; and pressurizing the substance to accumulate the chelate.
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公开(公告)号：US20090275278A1
公开(公告)日：2009-11-05
申请号：US12112385
申请日：2008-04-30
CPC分类号： H01L21/67017
摘要： In one embodiment, an air filtration system includes a first ventilation path connected between at least one external air supply and a clean room. The first ventilation path is configured to direct air from the at least one external air supply to the clean room. A second ventilation path is connected to the clean room. The second ventilation path is configured to recirculate air in the clean room. A third ventilation path, separate from the first path, is connected between the at least one external air supply and a tool environment disposed within the clean room. The third ventilation path includes an ultra-pure air filtration unit disposed between the outdoor air supply and the tool environment. The ultra-pure air filtration unit includes a compressor and a dryer.
摘要翻译： 在一个实施例中，空气过滤系统包括连接在至少一个外部空气源和洁净室之间的第一通风路径。 第一通风路径构造成将空气从至少一个外部空气供应引导到洁净室。 第二个通风道连接到洁净室。 第二通风路径构造成使洁净室中的空气再循环。 与第一路径分离的第三通风路径连接在至少一个外部空气源和设置在洁净室内的工具环境之间。 第三通风路径包括设置在室外空气供应和工具环境之间的超纯空气过滤单元。 超纯空气过滤装置包括压缩机和烘干机。
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公开(公告)号：US20140095083A1
公开(公告)日：2014-04-03
申请号：US13632530
申请日：2012-10-01
CPC分类号： G01N33/0004 , G06F15/00
摘要： The present disclosure provides a method of identifying an airborne molecular contamination (AMC) leaking source in a fab. The method includes distributing a sensor in the fab, executing a forward computational fluid dynamics (CFD) simulation of an air flow in the fab, setting an inversed modeling of the forward CFD simulation of the air flow in the fab, building up a database of a spatial response probability distribution matrix of the sensor using an AMC measurement data in the fab, and identifying the AMC leaking source using the database of the spatial response probability distribution matrix of the sensor.
摘要翻译： 本公开提供了一种在晶圆厂中识别空气传播分子污染（AMC）泄漏源的方法。 该方法包括在晶圆厂中分布传感器，对晶圆厂中的空气流进行前向计算流体动力学（CFD）仿真，设置晶圆厂中空气流的前向CFD模拟的反向建模，建立数据库 使用工厂中的AMC测量数据的传感器的空间响应概率分布矩阵，以及使用传感器的空间响应概率分布矩阵的数据库来识别AMC泄漏源。
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公开(公告)号：US08629356B2
公开(公告)日：2014-01-14
申请号：US13328543
申请日：2011-12-16
申请人： Chwen Yu , Yung-Ti Hung , Kuo-An Yeh , Tzu-Sou Chuang , Chien-Teh Huang
发明人： Chwen Yu , Yung-Ti Hung , Kuo-An Yeh , Tzu-Sou Chuang , Chien-Teh Huang
IPC分类号： H05K9/00
CPC分类号： H05K9/0003 , H05K9/0075
摘要： A magnetic field shielding raised floor panel having a plurality of grain-oriented electrical steel (GOES) sections. The orientation of each GOES section is parallel to a top surface of the section. The plurality of GOES sections can include sidewall and lip portions. The plurality of GOES sections can be perforated to permit air flow through the GOES section. Openings in adjacent perforated GOES sections do not substantially overlap.
摘要翻译： 一种具有多个晶粒取向电工钢（GOES）部分的磁场屏蔽升高地板镶板。 每个GOES部分的方向平行于该部分的顶部表面。 多个GOES部分可以包括侧壁和唇部。 多个GOES部分可以穿孔以允许空气流过GOES部分。 相邻穿孔GOES部分中的开口基本上不重叠。
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