摘要:
A method for driving a magnetic element is provided. The method includes steps of: a) providing a first magnetic field, b) providing a second magnetic field interacting with the first magnetic field to generate a magnetostatic field, c) putting the magnetic element into the magnetostatic field, and d) generating a magnetic torque by modulating the first magnetic field and the second magnetic field so as to drive the magnetic element.
摘要:
A method for manufacturing a magnetic-induction element is provided. The method includes steps of: a) providing a substrate, b) forming an adhesive layer on the substrate, c) forming a seed layer on the adhesive layer, d) removing a part of the seed layer to reveal a part of the adhesive layer, e) partially forming a resistance on the seed layer and the revealed part of the adhesive layer, f) forming a magnetic-induction layer on the seed layer and the revealed part of the adhesive layer, g) removing the resistance, and h) removing a part of the substrate and the revealed part of the adhesive layer.
摘要:
The present disclosure provides a focus module including a substrate, a holder, at lease one second magnet, a frame and an elastic element. The substrate includes at least one first magnet and an aperture. The frame is fixed on the substrate and defining a hole receiving the holder. The second magnet is fixed on the holder. At least one of the first magnet and the second magnet is an electromagnet. The elastic element includes a first end, a second end, and at least one U-shape bend connected the first and second ends. The first end is fixed on the side surface of the holder. The second end is fixed on the inner surface of the hole. The two sides of the U-shape bend are parallel to the side surface of the holder and the inner surface of the hole. The present invention also provides a method for manufacturing the focus module.
摘要:
The present disclosure provides a focus module including a substrate, a holder, at lease one second magnet, a frame and an elastic element. The substrate includes at least one first magnet and an aperture. The frame is fixed on the substrate and defining a hole receiving the holder. The second magnet is fixed on the holder. At least one of the first magnet and the second magnet is an electromagnet. The elastic element includes a first end, a second end, and at least one U-shape bend connected the first and second ends. The first end is fixed on the side surface of the holder. The second end is fixed on the inner surface of the hole. The two sides of the U-shape bend are parallel to the side surface of the holder and the inner surface of the hole. The present invention also provides a method for manufacturing the focus module.
摘要:
A magnetic element and its manufacturing method are provided. A magnetic element includes an actuation part having a first surface and a second surface, a torsion bar connected to the actuation part, and a frame connected to the first torsion bar, wherein the first surface of the actuation part is an uneven surface. The manufacturing method of the magnetic element starts with forming an passivation layer on a substrate and defining a special area by the mask method, then continues with forming the adhesion layer and electroplate-initializing layer on the substrate sequentially. The photoresist layer are formed and the magnetic-inductive material is electroformed on the electroplate area. Finally, the substrate is etched and the passivation layer is removed to obtain the magnetic element. The manufacturing method of magnetic element of the present invention can be applied in the microelectromechanical system field and other categories.
摘要:
A pressure sensor comprises a deformable membrane deflecting in response to pressure applied, a first stationary electrode, and a second electrode coupled to the deformable membrane, for determining a change in a capacitance between the first and the second electrode in response to the pressure applied. At least one of the first and the second electrode comprises a getter material for collecting gas molecules.
摘要:
A magnetic element and its manufacturing method are provided. A magnetic element includes an actuation part having a first surface and a second surface, a torsion bar connected to the actuation part, and a frame connected to the first torsion bar, wherein the first surface of the actuation part is an uneven surface. The manufacturing method of the magnetic element starts with forming an passivation layer on a substrate and defining a special area by the mask method, then continues with forming the adhesion layer and electroplate-initializing layer on the substrate sequentially. The photoresist layer are formed and the magnetic-inductive material is electroformed on the electroplate area. Finally, the substrate is etched and the passivation layer is removed to obtain the magnetic element. The manufacturing method of magnetic element of the present invention can be applied in the microelectromechanical system field and other categories.