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10 条记录 (耗时 0.024 秒)

    Robot with load sensor
    1.
    发明授权
    Robot with load sensor 有权
    带负载传感器的机器人

    公开(公告)号：US08396596B2

    公开(公告)日：2013-03-12

    申请号：US12832018

    申请日：2010-07-07

    申请人： Takenori Oka ,  Manabu Okahisa

    发明人： Takenori Oka ,  Manabu Okahisa

    IPC分类号： G05B15/00 ,  B25J9/06 ,  B25J13/08

    CPC分类号： B25J9/1694 ,  B25J9/1633 ,  Y10T74/20305 ,  Y10T74/20311 ,  Y10T74/20317

    摘要： A robot includes an arm including a plurality of joints, arm members that form the arm, each arm member supporting a load, actuators that drive the joints and that are supported by the arm members, a load sensor embedded in at least one of the arm members to measure the load applied to the at least one of the arm members, a controller that controls movements of the actuators on the basis of a result of the measurement performed by the load sensor, and a wire hole through which a sensor line extend from a space inside the at least one of the arm members to a space inside the arm, the sensor line connecting the load sensor to the controller.

    摘要翻译： 一种机器人包括：臂，包括多个接头，形成臂的臂构件，支撑负载的每个臂构件，驱动接头并由臂构件支撑的致动器，嵌入至少一个臂的负载传感器 用于测量施加到所述至少一个臂构件的负载的控制器，控制器，其基于由所述负载传感器执行的测量结果来控制所述致动器的运动;以及线孔，所述传感器线从所述线孔延伸 所述至少一个臂构件内的空间到所述臂内的空间，所述传感器线将所述负载传感器连接到所述控制器。

    Substrate processing apparatus, coolant gas supply nozzle and semiconductor device manufacturing method
    5.
    发明授权
    Substrate processing apparatus, coolant gas supply nozzle and semiconductor device manufacturing method 有权
    基板加工装置，冷却剂气体供给喷嘴和半导体装置的制造方法

    公开(公告)号：US08148271B2

    公开(公告)日：2012-04-03

    申请号：US11989698

    申请日：2006-07-19

    申请人： Masaaki Ueno ,  Akira Hayashida ,  Masakazu Shimada ,  Takenori Oka

    发明人： Masaaki Ueno ,  Akira Hayashida ,  Masakazu Shimada ,  Takenori Oka

    IPC分类号： H01L21/302

    CPC分类号： H01L21/67769 ,  C23C16/463 ,  C23C16/54 ,  H01L21/67109

    摘要： A substrate processing apparatus comprises a processing chamber for storing a boat supporting multiple substrates and for processing the multiple substrates, a heater unit installed around the processing chamber for heating the substrates, and a coolant gas supply nozzle including a pipe section extending perpendicular to a main surface of the substrate supported in the boat stored in the processing chamber, and a spray hole formed on the pipe section for spraying coolant gas to at least two of the multiple substrates, wherein the coolant gas supply nozzle is formed so that the cross sectional area of the pipe section in the area where the spray hole is formed is larger than the total opening area of the spray hole.

    摘要翻译： 基板处理装置包括：处理室，用于存储支撑多个基板并用于处理多个基板的船;加热器单元，安装在处理室周围用于加热基板;以及冷却剂气体供给喷嘴，其包括垂直于主体的管段 支撑在存储在处理室中的舟皿中的基板的表面，以及形成在管段上用于将冷却剂气体喷射到多个基板中的至少两个的喷射孔，其中冷却剂气体供给喷嘴形成为横截面积 在喷孔形成区域中的管段大于喷孔的总开口面积。

    ROBOT
    7.
    发明申请
    ROBOT 审中-公开
    机器人

    公开(公告)号：US20120266712A1

    公开(公告)日：2012-10-25

    申请号：US13404002

    申请日：2012-02-24

    申请人： Takenori OKA ,  Masato Itou ,  Yusuke Kinoshita ,  Manabu Okahisa

    发明人： Takenori OKA ,  Masato Itou ,  Yusuke Kinoshita ,  Manabu Okahisa

    IPC分类号： B25J18/00

    CPC分类号： B25J17/0283 ,  Y10T74/20329

    摘要： This robot includes an arm and a joint provided on one end portion of the arm, and either the arm or the joint is provided with an end effector driving source to operate an end effector mounted to the arm through the joint.

    摘要翻译： 该机器人包括设置在臂的一个端部上的臂和接头，并且臂或接头设置有末端执行器驱动源，以通过接头操作安装到臂的端部执行器。

    ROBOT
    8.
    发明申请
    ROBOT 审中-公开
    机器人

    公开(公告)号：US20110107866A1

    公开(公告)日：2011-05-12

    申请号：US12912750

    申请日：2010-10-27

    申请人： Takenori OKA ,  Manabu Okahisa

    发明人： Takenori OKA ,  Manabu Okahisa

    IPC分类号： B25J18/00 ,  B25J17/00

    CPC分类号： B25J17/00 ,  B25J9/0084 ,  B25J9/0087 ,  B25J9/046 ,  B25J9/06 ,  Y10T74/20317 ,  Y10T74/20323 ,  Y10T74/20329

    摘要： A robot includes a base and an arm formed by a plurality of members connected by a plurality of joints. The arm has an offset portion where a rotation axis of a certain joint is offset from a rotation axis of the next joint in a predetermined direction and the rotation axis of the next joint is offset from a rotation axis of a joint next to the next joint in a direction opposite the predetermined direction.

    摘要翻译： 机器人包括由多个通过多个接头连接的多个构件形成的底座和臂。 臂具有偏移部，其中某个接头的旋转轴线沿着预定方向偏离下一个接头的旋转轴线，并且下一个接头的旋转轴线偏离接下来接头旁边的接头的旋转轴线 在与预定方向相反的方向上。

    Substrate Processing Apparatus, Coolant Gas Supply Nozzle and Semiconductor Device Manufacturing Method
    9.
    发明申请
    Substrate Processing Apparatus, Coolant Gas Supply Nozzle and Semiconductor Device Manufacturing Method 有权
    基板处理装置，冷却剂气体供给喷嘴和半导体装置制造方法

    公开(公告)号：US20090291566A1

    公开(公告)日：2009-11-26

    申请号：US11989698

    申请日：2006-07-19

    申请人： Masaaki Ueno ,  Akira Hayashida ,  Masakazu Shimada ,  Takenori Oka

    发明人： Masaaki Ueno ,  Akira Hayashida ,  Masakazu Shimada ,  Takenori Oka

    IPC分类号： H01L21/477 ,  C23C16/00

    CPC分类号： H01L21/67769 ,  C23C16/463 ,  C23C16/54 ,  H01L21/67109

    摘要： A substrate processing apparatus comprises a processing chamber for storing a boat supporting multiple substrates and for processing the multiple substrates, a heater unit installed around the processing chamber for heating the substrates, and a coolant gas supply nozzle including a pipe section extending perpendicular to a main surface of the substrate supported in the boat stored in the processing chamber, and a spray hole formed on the pipe section for spraying coolant gas to at least two of the multiple substrates, wherein the coolant gas supply nozzle is formed so that the cross sectional area of the pipe section in the area where the spray hole is formed is larger than the total opening area of the spray hole.

    摘要翻译： 基板处理装置包括：处理室，用于存储支撑多个基板并用于处理多个基板的船;加热器单元，安装在处理室周围用于加热基板;以及冷却剂气体供给喷嘴，其包括垂直于主体的管段 支撑在存储在处理室中的舟皿中的基板的表面，以及形成在管段上用于将冷却剂气体喷射到多个基板中的至少两个的喷射孔，其中冷却剂气体供给喷嘴形成为横截面积 在喷孔形成区域中的管段大于喷孔的总开口面积。

    ROBOT
    10.
    发明申请
    ROBOT 有权
    机器人

    公开(公告)号：US20110010011A1

    公开(公告)日：2011-01-13

    申请号：US12832018

    申请日：2010-07-07

    申请人： Takenori OKA ,  Manabu Okahisa

    发明人： Takenori OKA ,  Manabu Okahisa

    IPC分类号： G05B15/00

    CPC分类号： B25J9/1694 ,  B25J9/1633 ,  Y10T74/20305 ,  Y10T74/20311 ,  Y10T74/20317

    摘要： A robot includes an arm including a plurality of joints, arm members that form the arm, each arm member supporting a load, actuators that drive the joints and that are supported by the arm members, a load sensor embedded in at least one of the arm members to measure the load applied to the at least one of the arm members, a controller that controls movements of the actuators on the basis of a result of the measurement performed by the load sensor, and a wire hole through which a sensor line extend from a space inside the at least one of the arm members to a space inside the arm, the sensor line connecting the load sensor to the controller.

    摘要翻译： 一种机器人包括：臂，包括多个接头，形成臂的臂构件，支撑负载的每个臂构件，驱动接头并由臂构件支撑的致动器，嵌入至少一个臂的负载传感器 用于测量施加到所述至少一个臂构件的负载的控制器，控制器，其基于由所述负载传感器执行的测量结果来控制所述致动器的运动;以及线孔，所述传感器线从所述线孔延伸 所述至少一个臂构件内的空间到所述臂内的空间，所述传感器线将所述负载传感器连接到所述控制器。