公开(公告)号：US3943278A

公开(公告)日：1976-03-09

申请号：US499486

申请日：1974-08-22

申请人： Stevens David Ramsey, Jr.

发明人： Stevens David Ramsey, Jr.

IPC分类号： G01B11/24 ,  G01B11/25 ,  G02B27/60 ,  H04N7/02 ,  H04N7/18

CPC分类号： G02B27/60 ,  G01B11/2441 ,  G01B11/254

摘要： A technique for comparing master parts with replicas to determine differences in shapes or sizes, is disclosed, which uses interferometric techniques as disclosed. A television camera is used to scan the pattern established by illuminating the subject with a set of optical fringes. An objective lens images these on a transmission line grating. A television camera scans the transmission grating. The spatial frequencies of the subject fringes and of the grating are especially selected so that the camera can not resolve either of them but can resolve their difference. As a result, the output signals of the camera represent a contour map of the object placed on a low frequency spatial carrier, but yet, the measurement sensitivity is still determined by the spatial frequency of the subject fringes.

摘要翻译： 公开了一种用于将主要部分与副本进行比较以确定形状或尺寸的差异的技术，其使用所公开的干涉技术。 电视摄像机用于扫描通过用一组光学条纹照亮被摄体而建立的图案。 物镜在传输线光栅上成像。 电视摄像机扫描传输光栅。 特别选择主体条纹和光栅的空间频率，使相机无法解析其中任何一个，但可以解决它们的差异。 结果，相机的输出信号表示放置在低频空间载波上的对象的等高线图，但仍然由被摄体条纹的空间频率确定测量灵敏度。