公开(公告)号：US06547939B2

公开(公告)日：2003-04-15

申请号：US09681402

申请日：2001-03-29

Applicant: Paul Hsueh ,  Shyang Chang ,  Hans Schiesser ,  Michael Ma ,  Jack Hsu ,  Abraham C. Ma

Inventor： Paul Hsueh ,  Shyang Chang ,  Hans Schiesser ,  Michael Ma ,  Jack Hsu ,  Abraham C. Ma

IPC: C23C1434

CPC classification number: C23C14/46 ,  C23C14/044 ,  C23C14/547

Abstract: A vacuum chamber deposits thin films on a substrate by sputtering a target. The beam of atoms or ions from the target is partially blocked by a shadow or adjustable uniformity mask, reducing the deposition rate onto the substrate. The adjustable uniformity mask has several adjustable fingers. The fingers extend or retract to enlarge or reduce the size of the mask. Each finger covers a different annular region or radius of the substrate. The deposition rate at different substrate radii is thus adjustable by the fingers. Several optical beams monitor the film transmittance at different substrate radii. A transmittance profile is continually generated during deposition. As deposition proceeds, radii with a thicker film have their fingers extended to reduce their deposition rate, producing a more uniform film thickness across all radii. Motors extend or retract the individual fingers.

公开(公告)号：US06462865B1

公开(公告)日：2002-10-08

申请号：US09681964

申请日：2001-06-29

Applicant: Tzu-Yih Chu ,  Shyang Chang ,  Chi Au ,  Abraham C. Ma

Inventor： Tzu-Yih Chu ,  Shyang Chang ,  Chi Au ,  Abraham C. Ma

IPC: H01S300

CPC classification number: H01S5/50 ,  G02F2/004 ,  G02F3/00 ,  G02F2203/70

Abstract: A novel semiconductor optical amplifier (SOA) can operate as an optical inverter as well as a power-restoring device. Together, an optical-OR and the optical inverter can provide a wide variety of high speed optical logic gates and functions. The optical inverter uses cross-gain modulation (XGM) to invert a modulated signal on a first input, to produce an inverted output. The inverse of the modulation is transferred from a first wavelength of the modulated first input to a second wavelength of a continuous-wave second input. A filter can then block the first wavelength, allowing the inversely-modulated second wavelength to be output as the inverted output. The first and second wavelengths are swapped in alternate inverters in a logic path. The Y-junction can be implemented as a Multi-Mode Interference (MMI) device.

Abstract translation: 一种新型的半导体光放大器（SOA）可以作为光逆变器以及功率恢复装置。 光学和光学逆变器一起可以提供各种各样的高速光逻辑门和功能。 光反向器使用交叉增益调制（XGM）来反转第一输入上的调制信号，以产生反相输出。 调制的反相从调制的第一输入的第一波长传送到连续波第二输入的第二波长。 滤波器然后可以阻挡第一波长，允许反向调制的第二波长作为反相输出输出。 第一和第二波长交替在逻辑路径中的交替逆变器中。 Y结可以实现为多模干扰（MMI）设备。

公开(公告)号：US06522462B2

公开(公告)日：2003-02-18

申请号：US09682283

申请日：2001-08-14

Applicant: Tzu-Yih Chu ,  Shyang Chang ,  Chi Au ,  Abraham C. Ma

Inventor： Tzu-Yih Chu ,  Shyang Chang ,  Chi Au ,  Abraham C. Ma

IPC: H01S300

CPC classification number: G02F2/004 ,  G02B6/26 ,  G02B6/29352 ,  G02F3/00 ,  G02F2203/70

Abstract: Optical logic gates are constructed from Mach-Zehnder Interferometer (MZI) optical circuits. A multi-mode interference (MMI) splitter divides a continuous-wave input into two branches of the interferometer. Each branch has a semiconductor optical amplifier (SOA). When a logic input having a logic-high power level is applied to one of the SOA's, cross-phase modulation occurs in the SOA. The phase shift increases through the SOA. The branch coupled to the logic input has a relative phase shift of &pgr; compared with the other branch. When two branches with the &pgr; phase difference are combined, destructive interference occurs, producing a logic low. An MMI combiner or an equivalent phase shifter is used to combine the two branches. The MMI splitter adds a phase shift of &pgr;/2 to the upper branch but not to the lower branch, while the MMI combiner also adds &pgr;/2 shifts.

Abstract translation: 光逻辑门由Mach-Zehnder干涉仪（MZI）光电路构成。 多模干扰（MMI）分离器将连续波输入分成干涉仪的两个分支。 每个分支都有一个半导体光放大器（SOA）。 当具有逻辑高功率电平的逻辑输入被应用于SOA中的一个时，在SOA中发生交叉相位调制。 相移通过SOA增加。 耦合到逻辑输入的分支与其他分支相比具有pi的相对相移。 当具有pi相位差的两个分支组合时，发生相消干扰，产生逻辑低电平。 使用MMI组合器或等效移相器来组合两个分支。 MMI分路器将pi / 2的相移添加到上分支，但不分配给下分支，而MMI组合器也增加pi / 2移位。