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公开(公告)号:US5841219A
公开(公告)日:1998-11-24
申请号:US778789
申请日:1997-01-06
CPC分类号: H01J19/08 , H01J21/105
摘要: An integrated circuit vacuum tube array includes an insulating or highly resistive substrate, electrically conductive materials disposed on the substrate to define and surround a plurality of first voids extending from the substrate upwardly through the material, a plurality of cathodes disposed on the material to bridge over the respective first voids, for emitting electrons when heated by circuitry that selectively heats the cathodes, first electrically resistive material disposed on the electrically conductive material to surround the cathodes and define a plurality of second voids thereabove, an electrically conductive grid disposed on the electrically resistive material to project partially into the second voids to define an opening in the grid above each cathode, for allowing the passage of electrons therethrough, circuitry to selectively apply a voltage to the grid to control electron flow and thereby control the electrical current produced at the anodes, second electrically resistive material disposed on the grid to define a plurality of third voids above the openings in the grid, and a plurality of electrically conductive anodes disposed on the second electrically resistive material over the third voids to receive electrons emitted by the cathodes and thereby produce an electrical current.
摘要翻译: 集成电路真空管阵列包括绝缘或高电阻衬底,导电材料设置在衬底上以限定和围绕从衬底向上延伸通过材料的多个第一空隙,多个阴极设置在材料上以跨越 相应的第一空隙,用于当由选择性地加热阴极的电路加热时发射电子,设置在导电材料上的第一电阻材料以包围阴极并在其上限定多个第二空隙,设置在电阻上的导电栅格 材料部分地投入到第二空隙中以在每个阴极上方的栅格中限定开口,以允许电子通过其中,用于选择性地向电网施加电压以控制电子流并由此控制在阳极处产生的电流的电路 ,第二电解 设置在栅格上以在栅格中的开口上方限定多个第三空隙的多个材料,以及设置在第三空隙上的第二电阻材料上的多个导电阳极,以接收由阴极发射的电子,从而产生电 当前。