公开(公告)号：US20110003410A1

公开(公告)日：2011-01-06

申请号：US12648308

申请日：2009-12-29

Applicant: Jenq-Dar Tsay ,  Suh-Fang Lin ,  Yu-Hsiang Chang ,  Yih-Der Guo ,  Sheng-Huei Kuo ,  Wei-Hung Kuo ,  Hsun-Chih Liu

Inventor： Jenq-Dar Tsay ,  Suh-Fang Lin ,  Yu-Hsiang Chang ,  Yih-Der Guo ,  Sheng-Huei Kuo ,  Wei-Hung Kuo ,  Hsun-Chih Liu

IPC: H01L33/48 ,  H01L33/60

CPC classification number: H01L33/0079 ,  H01L33/20 ,  H01L33/405 ,  H01L33/44

Abstract: A method of manufacturing a light emitting diode element is provided. A first patterned semi-conductor layer, a patterned light emitting layer, and a second patterned semi-conductor layer are sequentially formed on an epitaxy substrate so as to form a plurality of epitaxy structures, wherein the first patterned semi-conductor layer has a thinner portion in a non-epitaxy area outside the epitaxy structures. A passivation layer covering the epitaxy structures and the thinner portion is formed. The passivation layer covering on the thinner portion is partially removed to form a patterned passivation layer. A patterned reflector is formed directly on each of the epitaxy structures. The epitaxy structures are bonded to a carrier substrate. A lift-off process is performed to separate the epitaxy structures from the epitaxy substrate. An electrode is formed on each of the epitaxy structures far from the patterned reflector.

Abstract translation: 提供一种制造发光二极管元件的方法。 在外延基板上依次形成第一图案化半导体层，图案化发光层和第二图案化半导体层，以形成多个外延结构，其中第一图案化半导体层具有较薄的 部分在外延结构外的非外延区域。 形成覆盖外延结构和较薄部分的钝化层。 覆盖在较薄部分上的钝化层被部分地去除以形成图案化的钝化层。 在每个外延结构上直接形成图案化反射体。 外延结构被结合到载体衬底上。 进行剥离处理以将外延结构与外延基板分离。 在远离图案化反射器的每个外延结构上形成电极。

公开(公告)号：US08173456B2

公开(公告)日：2012-05-08

申请号：US12648308

申请日：2009-12-29

Applicant: Jenq-Dar Tsay ,  Suh-Fang Lin ,  Yu-Hsiang Chang ,  Yih-Der Guo ,  Sheng-Huei Kuo ,  Wei-Hung Kuo ,  Hsun-Chih Liu

Inventor： Jenq-Dar Tsay ,  Suh-Fang Lin ,  Yu-Hsiang Chang ,  Yih-Der Guo ,  Sheng-Huei Kuo ,  Wei-Hung Kuo ,  Hsun-Chih Liu

IPC: H01L21/00

CPC classification number: H01L33/0079 ,  H01L33/20 ,  H01L33/405 ,  H01L33/44

Abstract: A method of manufacturing a light emitting diode element is provided. A first patterned semi-conductor layer, a patterned light emitting layer, and a second patterned semi-conductor layer are sequentially formed on an epitaxy substrate so as to form a plurality of epitaxy structures, wherein the first patterned semi-conductor layer has a thinner portion in a non-epitaxy area outside the epitaxy structures. A passivation layer covering the epitaxy structures and the thinner portion is formed. The passivation layer covering on the thinner portion is partially removed to form a patterned passivation layer. A patterned reflector is formed directly on each of the epitaxy structures. The epitaxy structures are bonded to a carrier substrate. A lift-off process is performed to separate the epitaxy structures from the epitaxy substrate. An electrode is formed on each of the epitaxy structures far from the patterned reflector.

Abstract translation: 提供一种制造发光二极管元件的方法。 在外延基板上依次形成第一图案化半导体层，图案化发光层和第二图案化半导体层，以形成多个外延结构，其中第一图案化半导体层具有较薄的 部分在外延结构外的非外延区域。 形成覆盖外延结构和较薄部分的钝化层。 覆盖在较薄部分上的钝化层被部分地去除以形成图案化的钝化层。 在每个外延结构上直接形成图案化反射体。 外延结构被结合到载体衬底上。 进行剥离处理以将外延结构与外延基板分离。 在远离图案化反射器的每个外延结构上形成电极。