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公开(公告)号：US06513397B2
公开(公告)日：2003-02-04
申请号：US10011737
申请日：2001-12-11
IPC分类号： G01N122
CPC分类号： G01N1/405 , G01N1/2252 , G01N2001/2264
摘要： A unit for sampling aldehydes and ketones contained in diluted exhaust gases from thermal combustion engines has a specific trapping circuit and a simulation circuit that simulates the specific trapping circuit. The specific trapping circuit and the simulation circuit are arranged in parallel so that the diluted gases can be passed for some time in the simulation circuit (5) before they are passed into the specific trapping circuit wherein aldehydes and ketones are trapped.
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2.发明授权公开(公告)号：US08686381B2
公开(公告)日：2014-04-01
申请号：US12803461
申请日：2010-06-28
IPC分类号： H05G2/00
CPC分类号： G21K1/067 , G03F7/70033 , G03F7/70166 , G03F7/70175 , H05G2/005
摘要： A source-collector module (SOCOMO) for generating a laser-produced plasma (LPP) that emits EUV radiation, and a grazing-incidence collector (GIC) mirror arranged relative to the LPP and having an input end and an output end. The LPP is formed using an LPP target system having a light source portion and a target portion, wherein a pulsed laser beam from the light source portion irradiates Sn vapor from a Sn vapor source of the target portion. The GIC mirror is arranged relative to the LPP to receive the EUV radiation at its input end and focus the received EUV radiation at an intermediate focus adjacent the output end. A radiation collection enhancement device may be used to increase the amount of EUV radiation provided to the intermediate focus. An EUV lithography system that utilizes the SOCOMO is also disclosed.
摘要翻译： 用于产生发射EUV辐射的激光产生等离子体（LPP）的源极集电极模块（SOCOMO）以及相对于LPP布置并具有输入端和输出端的掠入射收集器（GIC）反射镜。 使用具有光源部和目标部的LPP靶系统形成LPP，其中来自光源部的脉冲激光束从目标部的Sn蒸气源照射Sn蒸气。 GIC反射镜相对于LPP布置以在其输入端接收EUV辐射，并将接收的EUV辐射聚焦在邻近输出端的中间焦点。 可以使用辐射收集增强装置来增加提供给中间聚焦的EUV辐射的量。 还公开了利用SOCOMO的EUV光刻系统。
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3.发明申请公开(公告)号：US20110318694A1
公开(公告)日：2011-12-29
申请号：US12803461
申请日：2010-06-28
CPC分类号： G21K1/067 , G03F7/70033 , G03F7/70166 , G03F7/70175 , H05G2/005
摘要： A source-collector module (SOCOMO) for generating a laser-produced plasma (LPP) that emits EUV radiation, and a grazing-incidence collector (GIC) mirror arranged relative to the LPP and having an input end and an output end. The LPP is formed using an LPP target system having a light source portion and a target portion, wherein a pulsed laser beam from the light source portion irradiates Sn vapor from a Sn vapor source of the target portion. The GIC mirror is arranged relative to the LPP to receive the EUV radiation at its input end and focus the received EUV radiation at an intermediate focus adjacent the output end. A radiation collection enhancement device may be used to increase the amount of EUV radiation provided to the intermediate focus. An EUV lithography system that utilizes the SOCOMO is also disclosed.
摘要翻译： 用于产生发射EUV辐射的激光产生等离子体（LPP）的源极集电极模块（SOCOMO）以及相对于LPP布置并具有输入端和输出端的掠入射收集器（GIC）反射镜。 使用具有光源部和目标部的LPP靶系统形成LPP，其中来自光源部的脉冲激光束从目标部的Sn蒸气源照射Sn蒸气。 GIC反射镜相对于LPP布置以在其输入端接收EUV辐射，并将接收的EUV辐射聚焦在邻近输出端的中间焦点。 可以使用辐射收集增强装置来增加提供给中间聚焦的EUV辐射的量。 还公开了利用SOCOMO的EUV光刻系统。
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4.发明授权公开(公告)号：US06339965B1
公开(公告)日：2002-01-22
申请号：US09344807
申请日：1999-06-25
IPC分类号： G01N122
CPC分类号： G01N1/405 , G01N1/2252 , G01N2001/2264
摘要： A process for sampling aldehydes and ketones contained in diluted exhaust gases from thermal combustion engines uses a sampling unit that has a specific trapping circuit and a simulation circuit that simulates the specific trapping circuit. The specific trapping circuit and the simulation circuit are arranged in parallel. The diluted gases are passed for some time in the simulation circuit (5) before they are passed into specific trapping circuit wherein aldehydes and ketones are trapped.
摘要翻译： 用于对来自热燃烧发动机的稀释废气中所含的醛和酮进行取样的方法使用具有特定捕集电路的采样单元和模拟特定捕集电路的模拟电路。 具体的捕获电路和仿真电路并联布置。 稀释的气体在模拟电路（5）中通过一段时间后，再进入特定的捕集回路，其中醛和酮被捕获。
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5.发明授权System for sampling specific pollutants contained in diluted exhaust gases from thermal engines 失效用于对来自热力发动机的稀释废气中包含的特定污染物进行采样的系统
公开(公告)号：US6134942A
公开(公告)日：2000-10-24
申请号：US337261
申请日：1999-06-22
申请人： Michel Pasquereau , Jean-Fran.cedilla.ois Papagni , Richard Levesque , Jean-Pierre Dumas , Xavier Montagne
发明人： Michel Pasquereau , Jean-Fran.cedilla.ois Papagni , Richard Levesque , Jean-Pierre Dumas , Xavier Montagne
CPC分类号： G01N33/0047 , G01N33/0022 , G01N33/0018
摘要： The present invention is a system for specific pollutants contained in diluted exhaust gases from thermal combustion engines, comprising a first module (1) which samples aldehyde and ketone emissions and a second module (2) which samples hydrocarbon emissions. The system according to the invention further comprises a control which coordinates the sampling(s) with predetermined working phases of the thermal engine. The first module (1) comprises a circuit (3) for trapping the aldehydes and the ketones contained in the diluted exhaust gases and a dilution air sampling circuit (4).
摘要翻译： 本发明是一种用于来自热燃烧发动机的稀释废气中的特定污染物的系统，包括：第一模块（1），其对醛和酮排放进行取样;以及第二模块（2），其对碳氢化合物排放进行采样。 根据本发明的系统还包括一个控制器，该控制器使得具有预定工作阶段的热引擎协调采样。 第一模块（1）包括用于捕集稀释废气中所含的醛和酮的电路（3）和稀释空气取样电路（4）。
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6.发明申请Method and device for sampling gaseous compounds contained in a gas steam, notably in diluted exhaust gases from an internal-combustion engine 审中-公开用于对包含在气体蒸汽中的气态化合物进行取样的方法和装置，特别是在来自内燃机的稀释废气中公开(公告)号：US20050109128A1
公开(公告)日：2005-05-26
申请号：US10985947
申请日：2004-11-12
IPC分类号： G01N1/22
CPC分类号： G01N1/2214
摘要： The present invention relates to a method and to a device for sampling gaseous compounds contained in a gas stream, notably in diluted exhaust gases from an internal-combustion engine. According to the invention, the method consists in providing passage of the gas stream through at least one sampling channel (26, 26a; 80, 80a) containing an adsorbent that traps the polycyclic aromatic hydrocarbons in gaseous form.
摘要翻译： 本发明涉及一种用于对包含在气流中的气态化合物进行取样的方法和装置，特别是在来自内燃机的稀释废气中。 根据本发明，该方法包括提供气流通过至少一个采样气道（26,29a; 80,80aa）的取样通道，该取样通道含有以气态形式捕获多环芳烃的吸附剂。
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