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公开(公告)号：US4889605A
公开(公告)日：1989-12-26
申请号：US129152
申请日：1987-12-07
申请人： John F. Asmus , Ralph H. Lovberg
发明人： John F. Asmus , Ralph H. Lovberg
IPC分类号： C23F4/00 , G03F7/20 , H01J61/72 , H01L21/02 , H01L21/268 , H01L21/302 , H01L21/3065 , H05H1/04 , H05H1/52
CPC分类号： B82Y10/00 , G03F7/70016 , H01J61/72 , H05H1/04 , H05H1/52 , Y10S148/045
摘要： A plasma pinch system includes a fluid-jet pinch device for establishing a plasma source composed of a tenuous vapor preconditioning cloud surrounding a central narrow flowing fine stream of fluid under pressure. A discharge device is connected electrically to the fluid-jet pinch device for supplying an electrical flow through a portion of the fluid stream for establishing an incoherent light emitting plasma therealong. A method of using the plamsa pinch system for manufacturing semiconductors, includes exposing a semiconductor wafer to the incoherent light emitted by the plasma for either annealing or etching purposes.
摘要翻译： 等离子体夹管系统包括用于建立等离子体源的流体喷射挤压装置，该等离子体源由围绕中心狭窄流动的流动细流压力下的微细蒸气预处理云构成。 放电装置电连接到流体喷射夹送装置，用于提供流过流体流的一部分的电流，用于在其周围建立不相干的发光等离子体。 使用二极管夹持系统制造半导体的方法包括将半导体晶片暴露于由等离子体发射的非相干光，用于退火或蚀刻目的。
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公开(公告)号：US5079187A
公开(公告)日：1992-01-07
申请号：US347422
申请日：1989-05-04
申请人： John F. Asmus , Ralph H. Lovberg
发明人： John F. Asmus , Ralph H. Lovberg
CPC分类号： B82Y10/00 , B08B7/0057 , G03F7/70016 , H01J61/72 , H01L21/2686 , H01L21/67017 , H01L21/67132 , H05H1/04 , H05H1/52 , Y10S148/045 , Y10S148/071
摘要： A method for processing semiconductor material for annealing or circuitizing purposes, includes establishing a high intensity light which is controlled at a high repetition rate, and exposing it toward the surface of the semiconductor material to process it in an improved manner. The high speed light is directed transversely to the surface of the material to be processed, only to a shallow depth.
摘要翻译： 一种用于退火或电路化的半导体材料的处理方法，包括建立以高重复率控制的高强度光，并将其暴露于半导体材料的表面，以改进的方式进行处理。 高速光线横向于要处理的材料的表面，只有浅的深度。
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公开(公告)号：US5048163A
公开(公告)日：1991-09-17
申请号：US347423
申请日：1989-05-04
申请人： John F. Asmus , Ralph H. Lovberg
发明人： John F. Asmus , Ralph H. Lovberg
CPC分类号： B82Y10/00 , G03F7/70016 , H01J61/72 , H05H1/04 , H05H1/52 , Y10T29/41 , Y10T29/413
摘要： A system for processing the surface of semiconductor material for annealing and etching purposes. The system established a high intensity ultraviolet light which is repetitively pulsed to rapidly raise the surface temperature of the semiconductor material to a predetermined temperature for either etching or annealing purposes.
摘要翻译： 一种用于处理用于退火和蚀刻目的的半导体材料的表面的系统。 该系统建立了高强度的紫外光，其被重复地脉冲以将半导体材料的表面温度快速提高到用于蚀刻或退火目的的预定温度。
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公开(公告)号：US5207760A
公开(公告)日：1993-05-04
申请号：US734723
申请日：1991-07-23
摘要： This invention discloses an engine for use in sustained space travel. The engine is of an electric type powered by a nuclear reactor. The electric engine includes a pulsed inductive magnetic thruster. A gas is discharged against an inductor comprising a series of parallel coils arranged in a spiral fashion. Each coil consists of four separate electrically connected coil sections. Each coil section traverses one-quarter of the distance around the inductor from an outer perimeter to an inner perimeter to form a single closed loop. A capacitor is electrically connected to two outer perimeter connector points for each coil forming a Marx Bank arrangement. All capacitors are charged to full charge and discharged simultaneously by a trigger generator immediately after a puff of propellant gas reaches the inductor. The high induced EMF in the inductor caused by the multiple capacitors in series in a single loop creates a rapidly rising magnetic field which ionizes the propellant gas. The current and magnetic field in the ionized gas drives the gas away from the coil creating the thrust which drives the spaceship.
摘要翻译： 本发明公开了一种用于持续空间行驶的发动机。 发动机是由核反应堆供电的电动式。 电动发动机包括脉冲感应磁力推进器。 气体被排放到包括以螺旋方式布置的一系列平行线圈的电感器上。 每个线圈由四个分开的电连接的线圈段组成。 每个线圈段从外周到穿过电感周围的距离的四分之一到内周，以形成单个闭环。 电容器电连接到两个外周边连接点，每个线圈形成一个马克思银行布置。 所有的电容器在推进剂气体到达电感器之后立即被触发发生器同时充满电并同时放电。 由单个环路中串联的多个电容器引起的电感器中的高感应EMF产生使推进剂气体电离的快速上升的磁场。 电离气体中的电流和磁场驱使气体远离线圈，产生驱动太空飞船的推力。
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公开(公告)号：US5204506A
公开(公告)日：1993-04-20
申请号：US425865
申请日：1989-10-24
申请人： John F. Asmus , Ralph H. Lovberg
发明人： John F. Asmus , Ralph H. Lovberg
CPC分类号： B82Y10/00 , B08B7/0057 , G03F7/70016 , H01J61/72 , H01L21/2686 , H01L21/67017 , H01L21/67132 , H05H1/04 , H05H1/52
摘要： The inventive system treating the surface of a material by utilizing high intensity ultraviolet light for glazing, cleaning and other such purposes. The system includes a high intensity ultraviolet light is generated by a liquid jet plasma pinch unit, and is repetitively pulsed to raise the surface temperature of the material rapidly to a predetermined high temperature. In one form of the invention, the system is mounted either on a vehicle, or on an overhead structure for facilitating the movement of the pinch unit to the surface to be treated. In another form of the invention, the pinch unit includes a light emitting assembly which can be lowered into an opening in a workpiece to be treated.
摘要翻译： 本发明的系统通过利用高强度的紫外光来处理材料的表面，用于玻璃，清洁和其它这些目的。 该系统包括由液体喷射等离子体夹持单元产生的高强度紫外线，并且被重复地脉冲以将材料的表面温度快速升高到预定的高温。 在本发明的一种形式中，该系统安装在车辆上或架空结构上，以便于将夹紧单元移动到待处理表面。 在本发明的另一形式中，夹紧单元包括可以下降到待处理工件中的开口中的发光组件。
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公开(公告)号：US5170623A
公开(公告)日：1992-12-15
申请号：US646309
申请日：1991-01-28
CPC分类号： F03H1/0081 , F02K9/74 , F02K9/97 , H02K44/00
摘要： A hybrid chemical/electromagnetic propulsion system which combines thermal expansion of a chemically-reacted propellant with electromagnetic acceleration of the propellant to provide an efficient propulsion system that operates in the specific impulse I.sub.sp range of 800 to 2500 seconds. The hybrid chemical/electromagnetic propulsion system includes a reaction chamber, an expansion nozzle mounted to the exit of the reaction chamber, and an induction coil wound around a portion of the expansion nozzle. The reaction chamber supports the combustion or chemical reaction of a propellant to form high-temperature ionizable reaction products. The expansion nozzle then expands these high-temperature reaction products to generate thrust. The induction coil generates a varying electric and magnetic field which ionizes and magnetically accelerates the reaction products to generate additional thrust. A drive circuit supplies current to the induction coil in a manner that maximizes this additional thrust.
摘要翻译： 一种混合化学/电磁推进系统，其将化学反应的推进剂的热膨胀与推进剂的电磁加速相结合，以提供在800至2500秒的比脉冲Isp范围内操作的有效的推进系统。 混合型化学/电磁推进系统包括反应室，安装在反应室出口处的膨胀喷嘴和缠绕在膨胀喷嘴的一部分上的感应线圈。 反应室支持推进剂的燃烧或化学反应，形成高温可电离的反应产物。 膨胀喷嘴然后膨胀这些高温反应产物以产生推力。 感应线圈产生变化的电场和磁场，其电离并磁加速反应产物以产生额外的推力。 驱动电路以使该附加推力最大化的方式向感应线圈提供电流。
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公开(公告)号：US4994715A
公开(公告)日：1991-02-19
申请号：US223025
申请日：1988-07-21
申请人： John F. Asmus , Ralph H. Lovberg , Keith Boyer
发明人： John F. Asmus , Ralph H. Lovberg , Keith Boyer
CPC分类号： B82Y10/00 , G03F7/70016 , H01J61/72 , H05H1/04 , H05H1/52
摘要： A plasma pinch system includes a fluid-jet pinch device for establishing a plasma source composed of a tenuous vapor preconditioning cloud surrounding a central narrow flowing fine stream of fluid under pressure. A discharge device is connected electrically to the fluid-jet pinch device for supplying an electrical flow through a portion of the fluid stream for establishing an incoherent light emitting plasma therealong. A method of using the plasma pinch system for manufacturing semiconductors, includes exposing a semiconductor wafer to the incoherent light emitted by the plasma for either annealing or etching purposes.
摘要翻译： 等离子体夹管系统包括用于建立等离子体源的流体喷射挤压装置，该等离子体源由围绕中心狭窄流动的流动细流压力下的微细蒸气预处理云构成。 放电装置电连接到流体喷射夹送装置，用于提供流过流体流的一部分的电流，用于在其周围建立不相干的发光等离子体。 使用等离子体夹持系统制造半导体的方法包括将半导体晶片暴露于由等离子体发射的非相干光，用于退火或蚀刻目的。
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