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公开(公告)号：US20050215413A1
公开(公告)日：2005-09-29
申请号：US11087885
申请日：2005-03-23
申请人： Jochen Alkemper , Joerg Schuhmacher , Hrabanus Hack , Oliver Sohr
发明人： Jochen Alkemper , Joerg Schuhmacher , Hrabanus Hack , Oliver Sohr
CPC分类号： C03C3/06 , C03C2201/21 , C03C2201/42 , C03C2203/44 , C03C2203/50
摘要： The invention discloses an SiO2—TiO2 glass, which is preferably made by flame-hydrolysis and which distinguishes itself by increased resistance to radiation, especially in connection with EUV lithography. By purposefully reducing the hydrogen content, clearly improved resistance to radiation and reduced shrinking is achieved.
摘要翻译： 本发明公开了一种SiO 2 -TiO 2 SiO 2玻璃，其优选通过火焰水解制备，并且通过增加的耐辐射性，特别是与EUV光刻相关联来自身区分。 通过有目的地降低氢含量，实现了明显改善的耐辐射性和减少的收缩。
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公开(公告)号：US07172983B2
公开(公告)日：2007-02-06
申请号：US11087885
申请日：2005-03-23
申请人： Jochen Alkemper , Joerg Schuhmacher , Hrabanus Hack , Oliver Sohr
发明人： Jochen Alkemper , Joerg Schuhmacher , Hrabanus Hack , Oliver Sohr
CPC分类号： C03C3/06 , C03C2201/21 , C03C2201/42 , C03C2203/44 , C03C2203/50
摘要： The invention discloses an SiO2—TiO2 glass, which is preferably made by flame-hydrolysis and which distinguishes itself by increased resistance to radiation, especially in connection with EUV lithography. By purposefully reducing the hydrogen content, clearly improved resistance to radiation and reduced shrinking is achieved.
摘要翻译： 本发明公开了一种SiO 2 -TiO 2 SiO 2玻璃，其优选通过火焰水解制备，并且通过增加的耐辐射性，特别是与EUV光刻相关联来自身区分。 通过有目的地降低氢含量，实现了明显改善的耐辐射性和减少的收缩。
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公开(公告)号：US20140345600A1
公开(公告)日：2014-11-27
申请号：US14344954
申请日：2012-09-14
申请人： Marc Mollenhoff , Oliver Sohr , Thomas Kuckelkorn
发明人： Marc Mollenhoff , Oliver Sohr , Thomas Kuckelkorn
IPC分类号： F24J2/46
CPC分类号： F24S80/00 , F24S10/45 , F24S20/20 , F24S23/74 , F24S40/46 , F24S40/80 , F24S2025/6011 , Y02E10/41 , Y02E10/44
摘要： An absorber tube is provided that has a metal tube and a sleeve tube, which is made of glass and encloses the metal tube such that an annular space is formed between the metal tube and the sleeve tube. The annular space is evacuated and has at least one container filled with protective gas, where the container is a solder-free pressure container.
摘要翻译： 提供了一种吸收管，其具有由玻璃制成的金属管和套管，并且包围金属管，使得在金属管和套管之间形成环形空间。 环形空间被抽真空并且具有填充有保护气体的至少一个容器，其中容器是无焊料的压力容器。
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