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公开(公告)号:US5076902A
公开(公告)日:1991-12-31
申请号:US291592
申请日:1988-12-29
申请人: Nobuyuki Joshima , Yasumi Sasaki , Shigeru Abe
发明人: Nobuyuki Joshima , Yasumi Sasaki , Shigeru Abe
CPC分类号: C30B35/002 , C03B32/00 , C03C23/009
摘要: An electrolysis apparatus has a furnace for setting a silica glass component such as a process tube or crucible, a heater for heating the component, a sensor for measuring a temperature of an inside portion of the furnace, an anode and an cathode for applying a voltage across the component so as to electrolyze the component, a tube for holding the anode, a device for supplying an inert gas into a space between the anode and the holding tube, and a DC power source connected to the anode and the cathode.
摘要翻译: 电解装置具有用于设置诸如处理管或坩埚的二氧化硅玻璃部件的炉,用于加热部件的加热器,用于测量炉内部温度的传感器,用于施加电压的阳极和阴极 横跨该部件以电解部件,用于保持阳极的管,用于将惰性气体供应到阳极和保持管之间的空间的装置,以及连接到阳极和阴极的直流电源。