摘要:
A defect review apparatus includes a storage device which stores data about a defect of an inspection target object; a first imaging device which captures an image located in a position on a surface of the inspection target object, the position being specified by information regarding the position of the inspection target object which has been input; and a control device which controls the first imaging device. The storage device stores: first defect detection data including a defect number as which the defect of the inspection target object detected by a first defect detection process is labeled, and information regarding the position of the defect; and second defect data including a defect number as which the defect of the inspection target object detected by a second defect detection process is labeled, and information regarding its position.
摘要:
A sensor apparatus includes: a sensor panel that includes an input operation surface and is configured to detect positional coordinates of a detection object that comes into contact with the input operation surface; a casing; and a pressure-sensitive sensor that includes a first electrode fixed on the sensor panel side, a second electrode fixed on the casing side, and an elastic member that is provided between the sensor panel and the casing and elastically supports the sensor panel with respect to the casing, includes, between the first electrode and the second electrode, a first area formed with a first capacitance and a second area formed with a second capacitance larger than the first capacitance, and is configured to detect a pressing force input to the input operation surface as a change in a capacitance between the first electrode and the second electrode.
摘要:
A method of inspecting defects on an object includes irradiating predetermined particles with a laser beam to measure first scattered light intensities, irradiating plural types of defects with the laser beam to measure second scattered light intensities, determining types of some defects selected out of the plural types of defects using the first scattered light intensities, setting a discrimination line indicating a boundary value of the second scattered light intensities based on the determination, and discriminating, using the discrimination line, defects on the object.
摘要:
A semiconductor wafer whose position information on defects on a surface of the semiconductor wafer is already known, is placed on a stage of an imaging apparatus. Positions in a height direction of a plurality points on the surface of the semiconductor wafer are measured. In accordance with the measured positions in the height direction, the surface is partitioned into a plurality of partial areas. One partial area for which images of defects are still not acquired, is selected from the partial areas. The height of the stage is adjusted so as to set the selected partial area in an auto focusing range. Defects in the selected partial area are imaged with the imaging apparatus to acquire images of defects. Steps between the step of selecting the partial area and the step of acquiring the images of defects are repeated until images of defects in all partial areas are acquired.
摘要:
An inspecting method is capable of efficiently inspecting a wafer. According to the inspecting method, the chip area of a wafer is inspected for defects, and based on the results, a defect density D0p of each of peripheral-zone chips in the chip area which are located closely to the peripheral area of the wafer is calculated. A peripheral-zone chip with a high defect density D0p is selected, and an area in the peripheral area which is outward of the selected peripheral-zone chip is inspected for defects. Since only the area in the peripheral area which is located outward of the peripheral-zone chip selected based on the defect density D0p is inspected for defects, the wafer is inspected efficiently.
摘要:
A first defect classification section uses a pre-inspection test target as the inspected piece, and classifies the defects, based on results of the defect inspection executed a plurality of times by the defect detection system, into first defects detected constantly in each of the plurality of times of inspection, and into second defects detected only in a part of, but not in the residual part of the plurality of times of inspection.
摘要:
A holder for mounting an air bag module, the holder including a bottomed, substantially box-like body having a peripheral wall and an opening, the holder adapted to be fastened to a side plate of a seat back frame in a cavity of a back pad with the opening thereof facing a body of an automotive vehicle and with a bottom plate section thereof being applied to the side plate, and wrapped at the peripheral wall thereof by margin pieces which are provided around an opening portion in a side of a seat cover, rolled in the holder from the opening of the holder, and fastened to the holder, the air bag module having an air bag housed within an air bag case, the air bag module adapted to be incorporated in the holder and fastened to the side plate through the holder, whereby the air bag module is installed in the side of the seat back, the holder further including flanges, and at least first and second brittle sections serving as breaking portions, the peripheral wall including a front side wall section facing a front side of the seat back, a rear side wall section facing a rear side of the seat back, an upper side wall section, and a lower side wall section, the flanges projecting outwardly from edges of the front, rear, upper and lower side wall sections, at least a flange portion of the front side wall section having a thin metal plate embedded in an inner surface thereof, whereby the flange is reinforced by the metal plate, the first brittle section provided at a corner between the front side wall section and the upper wall section, and at a corner between the flange of the front side wall section and a flange of the upper wall section, and the second brittle section provided at a corner between the front side wall section and the lower wall section, and at a corner between the flange of the front side wall section and a flange of the lower wall section.
摘要:
A module case having an air bag module accommodated therein is disposed in a side face of a seat back, so that a lid of the module case is opened by a pressure of an air bag expanded upon a side collision of a vehicle, and the air bag is deployed through the resulting opening, termed the “primary” opening into a vehicle compartment. As a result of a tear line provided in the module case, even if the lid is held down by the door which has been deformed by a shock resulting from the collision, so that the lid cannot be opened to provide the primary opening, the tear line in a case body of the module case is broken, whereby a front wall is pivoted forwardly to form an alternate or “secondary” opening from the module case. Therefore, the air bag can be deployed without hindrance through the alternate secondary opening defined in the front wall of the module case into the vehicle compartment.
摘要:
A seat having a seat back and a seat cushion, the seat back including a first frame and a first support member stretched within the first frame, the first support member being made of a first elastic body, the first elastic body including a first section having first tension suitable for supporting a person sitting on the seat, and second sections having second tension lower than the first tension.
摘要:
A trim cover 5 capable of vending and deforming together with the sheet resilient material by pressure of a body of a sitting passenger is stretched within the frame of the frame body such as to face a front surface side of the sheet resilient material 2. With this structure, it is possible to suppress the air from an air conditioner in a vehicle from directly flowing from the seating face to a sitting passenger, thereby preventing the excessive effect of the air conditioner in the vehicle. Further, the design of the entire seat can be enhanced.