公开(公告)号：US5585738A

公开(公告)日：1996-12-17

申请号：US414590

申请日：1995-03-31

申请人： Motohiro Kuji ,  Haruhiko Yoshioka ,  Shinji Akaike ,  Shigeaki Takahashi

发明人： Motohiro Kuji ,  Haruhiko Yoshioka ,  Shinji Akaike ,  Shigeaki Takahashi

IPC分类号： G01R1/073 ,  G01R31/28 ,  G01R1/067

CPC分类号： G01R31/2887 ,  G01R1/07314

摘要： A probe system tests the electrical characteristics of chips arranged in a matrix on a semiconductor wafer. An XYZ stage movable in the directions of three-dimensional axes is disposed under a probe card having probes to be brought into contact with the electrode pads of the chips. A wafer table rotatable within a horizontal plane is disposed on the XYZ stage. A first image pickup means for picking up the probe images is mounted on the XYZ stage. A second image pickup means for picking up a wafer image is disposed above the table. The second image pickup means is movable horizontally to and from a use position under the probe card. A target is supported and moved by a driving member mounted on the XYZ stage, for aligning the focal points and optical axes of the first and second image pickup means. The target is moved between forward and retreat positions within and outside the field of view of the first image pickup means. At the forward position, the target provides a reference point aligned with the focal point of the first image pickup means. The table, the stage, and the image pickup means are connected to control and processing section which manages the position of the stage based on the three-dimensional coordinate system defined by the pulse count of encoders.

摘要翻译： 探针系统测试在半导体晶片上排列成矩阵的芯片的电特性。 可以在具有与芯片的电极焊盘接触的探针的探针卡下面沿三维轴线方向移动的XYZ台架。 在XYZ平台上设置在水平面内可旋转的晶片台。 用于拾取探测图像的第一图像拾取装置安装在XYZ平台上。 用于拾取晶片图像的第二图像拾取装置设置在桌子上方。 第二图像拾取装置可水平移动到探针卡下方的使用位置。 目标被安装在XYZ平台上的驱动构件支撑和移动，用于对准第一和第二图像拾取装置的焦点和光轴。 目标在第一图像拾取装置的视野内和外部的前后位置之间移动。 在向前位置，目标提供与第一图像拾取装置的焦点对准的参考点。 桌子，舞台和图像拾取装置连接到控制和处理部分，该控制和处理部分基于由编码器的脉冲计数定义的三维坐标系统管理舞台的位置。

公开(公告)号：US5910727A

公开(公告)日：1999-06-08

申请号：US754767

申请日：1996-11-20

申请人： Kaoru Fujihara ,  Motohiro Kuji

发明人： Kaoru Fujihara ,  Motohiro Kuji

IPC分类号： G01R31/28 ,  G01R31/26

CPC分类号： G01R31/2893 ,  G01R31/2851

摘要： An electrical inspecting apparatus includes an apparatus body having a housing section for housing a cassette in which a plurality of wafers are housed, an inspecting section provided with probes for applying an electrical inspection to the wafer, and a transfer section provided with a transfer arm for transferring the wafer between the housing section and the inspecting section. The housing section, inspecting section and transfer section are arranged side by side within the apparatus body, fan filters are mounted on the apparatus body for blowing air in a lateral direction through the housing section, inspecting section and transfer section, and an exhaust duct is mounted on the apparatus body for discharging the air flowing through the sections to the outside of the apparatus body.

摘要翻译： 一种电气检查装置，包括：装置本体，具有用于容纳容纳多个晶片的盒的容纳部，具有用于向晶片施加电检查的探针的检查部，以及设置有用于 在所述壳体部分和所述检查部分之间传送所述晶片。 壳体部分，检查部分和传送部分并排设置在设备主体内，风扇过滤器安装在设备主体上，用于通过壳体部分，检查部分和传送部分沿横向吹送空气，排气管道 安装在装置主体上，用于将流过各部分的空气排出到装置主体的外部。

公开(公告)号：US5640101A

公开(公告)日：1997-06-17

申请号：US634675

申请日：1996-04-18

申请人： Motohiro Kuji ,  Haruhiko Yoshioka ,  Shinji Akaike ,  Shigeaki Takahashi

发明人： Motohiro Kuji ,  Haruhiko Yoshioka ,  Shinji Akaike ,  Shigeaki Takahashi

IPC分类号： G01R1/073 ,  G01R31/28 ,  G01R1/067 ,  G01R1/02

CPC分类号： G01R31/2887 ,  G01R1/07314

摘要： A probe system tests the electrical characteristics of chips arranged in a matrix on a semiconductor wafer. An XYZ stage movable in the directions of three-dimensional axes is disposed under a probe card having probes to be brought into contact with the electrode pads of the chips. A wafer table rotatable within a horizontal plane is disposed on the XYZ stage. A first image pickup means for picking up the probe images is mounted on the XYZ stage. A second image pickup means for picking up a wafer image is disposed above the table. The second image pickup means is movable horizontally to and from a use position under the probe card. A target is supported and moved by a driving member mounted on the XYZ stage, for aligning the focal points and optical axes of the first and second image pickup means. The target is moved between forward and retreat positions within and outside the field of view of the first image pickup means. At the forward position, the target provides a reference point aligned with the focal point of the first image pickup means. The table, the stage, and the image pickup means are connected to control and processing section which manages the position of the stage based on the three-dimensional coordinate system defined by the pulse count of encoders.

摘要翻译： 探针系统测试在半导体晶片上排列成矩阵的芯片的电特性。 可以在具有与芯片的电极焊盘接触的探针的探针卡下面沿三维轴线方向移动的XYZ台架。 在XYZ平台上设置在水平面内可旋转的晶片台。 用于拾取探测图像的第一图像拾取装置安装在XYZ平台上。 用于拾取晶片图像的第二图像拾取装置设置在桌子上方。 第二图像拾取装置可水平移动到探针卡下方的使用位置。 目标被安装在XYZ平台上的驱动构件支撑和移动，用于对准第一和第二图像拾取装置的焦点和光轴。 目标在第一图像拾取装置的视野内和外部的前后位置之间移动。 在向前位置，目标提供与第一图像拾取装置的焦点对准的参考点。 桌子，舞台和图像拾取装置连接到控制和处理部分，该控制和处理部分基于由编码器的脉冲计数定义的三维坐标系统管理舞台的位置。