公开(公告)号：US20070258086A1

公开(公告)日：2007-11-08

申请号：US11418454

申请日：2006-05-05

申请人： Arno Bleeker ,  Vadim Banine ,  Johannes Onvlee ,  Jacques Van Der Donck ,  Michiel Oderwald

发明人： Arno Bleeker ,  Vadim Banine ,  Johannes Onvlee ,  Jacques Van Der Donck ,  Michiel Oderwald

IPC分类号： G01N21/88

CPC分类号： G01N21/9501 ,  G01N21/4738 ,  G01N21/94 ,  G01N21/956 ,  G03F1/84 ,  G03F1/86

摘要： The invention relates to a method and device of inspecting contamination particles on an object comprising a patterned structure. The device includes a radiation system for directing a radiation beam to the object. The object is configured to scatter the beam. The device also includes an optical system arranged to receive scattered radiation from the object, and a filter provided in the optical system. The filter is associated with the patterned structure so as to filter out radiation from the scattered radiation. The device also includes a detector arranged to detect a fraction of radiation that is transmitted by the filter. Accordingly, contamination particles may be detected quickly and accurately.

摘要翻译： 本发明涉及一种在包含图案化结构的物体上检查污染颗粒的方法和装置。 该装置包括用于将辐射束引导到物体的辐射系统。 物体被配置为散射光束。 该装置还包括被配置为接收来自物体的散射辐射的光学系统和设置在光学系统中的滤光器。 滤波器与图案化结构相关联，以便滤出散射辐射的辐射。 该装置还包括检测器，其被布置成检测由滤波器传输的辐射的一部分。 因此，可以快速且准确地检测污染颗粒。

公开(公告)号：US20060112619A1

公开(公告)日：2006-06-01

申请号：US10528026

申请日：2003-09-15

申请人： Michiel Oderwald ,  Justus Herder ,  Roland Higler

发明人： Michiel Oderwald ,  Justus Herder ,  Roland Higler

IPC分类号： A01M7/00

CPC分类号： A01G7/00 ,  A01G2/30 ,  A01H4/003

摘要： A method for separating a lump piece of rosette plants. The method includes the steps of gripping a rosette plant and positioning it parallel to a longitudinal axis of an elongated holder which has a longitudinal opening at least along the longitudinal axis; introducing a part of the lump piece of the rosette plant into the holder via the mentioned longitudinal opening; cutting off the lump piece along a cutting plane parallel to the longitudinal axis, while closing the longitudinal opening, such that the introduced part of the lump piece is enclosed in the holder; and removing the enclosed cut-off part of the lump piece from the holder. The method includes the further step of cutting off a part of the rosette plant enclosed in the holder along a second cutting plane.