公开(公告)号：US5077473A

公开(公告)日：1991-12-31

申请号：US558225

申请日：1990-07-26

Applicant: Virgil B. Elings ,  John A. Gurley ,  Mark R. Rodgers

Inventor： Virgil B. Elings ,  John A. Gurley ,  Mark R. Rodgers

IPC: G01Q10/00 ,  G01Q10/06 ,  G01Q30/06

CPC classification number: G01Q10/06 ,  B82Y35/00 ,  G01Q30/06 ,  Y10S977/851

Abstract: This invention is an enhanced probe positioning technique for Scanning Tunneling Microscopes, Atomic Force Microscopes, and other scanning probe microscopes. The invention has particular application for drift compensation. The invention adds a controllable motion to the probe that is totally independent of the scanning or other probe positioning. If the drift velocity is known, the invention can be used to compensate for the drift. In addition, several implementations are shown for measuring drift velocity. One method has the operator identify a significant feature of the acquired image on separate frames of data. The shift of this pattern or feature, along with the time between frames, can be used to calculate the drift velocity. Two methods are described that utilize the frequency shift of the image spatial spectrum due to the effect of the drift velocity on bi-directional scans. Another method is described that derives drift velocity and direction from the correlation of separate frames of data. The invention can also be used to compensate for predicted drift, such as the drift after a scan area offset.

Abstract translation: 本发明是用于扫描隧道显微镜，原子力显微镜和其它扫描探针显微镜的增强的探针定位技术。 本发明特别适用于漂移补偿。 本发明为探针增加了完全独立于扫描或其他探针定位的可控运动。 如果漂移速度是已知的，本发明可以用于补偿漂移。 另外，示出了用于测量漂移速度的几个实施方案。 一种方法使操作者在单独的数据帧上识别所获取的图像的显着特征。 这种图案或特征的移动以及帧之间的时间可以用于计算漂移速度。 描述了利用漂移速度对双向扫描的影响的图像空间频谱的频移的两种方法。 描述了从单独的数据帧的相关性导出漂移速度和方向的另一种方法。 本发明还可以用于补偿预测漂移，例如扫描区域偏移之后的漂移。