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    Sampling probe
    2.
    发明授权
    Sampling probe 失效
    采样探头

    公开(公告)号：US06864091B1

    公开(公告)日：2005-03-08

    申请号：US09652489

    申请日：2000-08-31

    Applicant: Youqi Wang ,  Peijun Cong ,  Tony N. Wheeler ,  Lynn Thomas Van Erden ,  H. Sam Bergh

    Inventor： Youqi Wang ,  Peijun Cong ,  Tony N. Wheeler ,  Lynn Thomas Van Erden ,  H. Sam Bergh

    IPC: G01N1/00 ,  G01N35/00 ,  G01N35/10 ,  G01N31/10 ,  G01N1/22 ,  H01J49/00

    CPC classification number: G01N35/109 ,  G01N1/14 ,  G01N2035/00277 ,  Y10T436/11 ,  Y10T436/24 ,  Y10T436/2575 ,  Y10T436/25875

    Abstract: A sampling probe for delivering a reactant to a substance deposited on a substrate to form a reaction product and for transporting the reaction product to a product analyzer for analysis. The probe includes a tip positionable over the substance on the substrate. The probe has a recess in the tip sized and shaped for receiving at least a portion of the reaction product. The probe has a product sampling passage extending from the recess adapted for connection to the product analyzer for transporting the portion of the reaction product to the product analyzer. Further, a reactant delivery passage extends to an outlet at the recess for delivering reactant to the substance on the substrate to form the reaction product.

    Abstract translation: 用于将反应物递送到沉积在基底上的物质以形成反应产物并用于将反应产物输送到产物分析器进行分析的取样探针。 探针包括位于衬底上的物质上的尖端。 探针具有尖端中的凹部，其尺寸和形状用于容纳至少一部分反应产物。 探针具有从适于连接到产品分析器的凹部延伸的产品取样通道，用于将反应产物的一部分输送到产品分析器。 此外，反应物输送通道延伸到凹部处的出口，用于将反应物输送到基底上的物质以形成反应产物。

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