Cantilever probe card
    1.
    发明授权
    Cantilever probe card 有权
    悬臂式探针卡

    公开(公告)号:US07679383B2

    公开(公告)日:2010-03-16

    申请号:US11712733

    申请日:2007-02-28

    IPC分类号: G01R31/02

    摘要: A method and apparatus for a flattened probe element wire is provided. A probe element wire includes a beam portion and a tip portion. At least a part of the tip portion is flattened. Flattened probe element wires may have greater z-direction height strength, thereby increasing maximum probe element wire z-direction vertical force. Flattened probe element wires may also have decreased variability in the flattened probe element wire tips. A probe card assembly may includes a substrate and a plurality of at least partially flattened probe element wires supported by the substrate. Such probe card assemblies may have an extended life and maintained within design parameters for a longer period of use.

    摘要翻译: 提供了一种用于扁平的探针元件线的方法和装置。 探针元件线包括梁部分和尖端部分。 顶端部分的至少一部分变平。 扁平的探针元件线可能具有较大的z方向高度强度,从而增加最大探针元件线z向垂直力。 扁平化的探针元件线在平坦的探针元件导线尖端中也可能具有降低的变化。 探针卡组件可以包括衬底和由衬底支撑的多个至少部分平坦的探针元件线。 这种探针卡组件可以具有延长的使用寿命并且保持在设计参数中以供更长的使用期限。

    Probes for a wafer test apparatus
    2.
    发明授权
    Probes for a wafer test apparatus 有权
    晶圆测试仪的探头

    公开(公告)号:US07808260B2

    公开(公告)日:2010-10-05

    申请号:US11885107

    申请日:2006-02-16

    IPC分类号: G01R31/02

    摘要: A probe configured for use in the testing of integrated circuits includes a first end portion terminating in a foot (42), the foot defining a substantially flat surface configured to be connected to a substrate (400), a second end portion terminating in a tip (50), the tip being configured to contact an integrated circuit during testing of the integrated circuit, and a curved body portion (56) extending between the first end portion and the second end portion.

    摘要翻译: 构造成用于集成电路测试的探针包括终止于脚部(42)的第一端部部分,所述脚部限定基本上平坦的表面,所述基本上平坦的表面被配置为连接到基底(400),第二端部终止于尖端 (50),所述尖端构造成在所述集成电路的测试期间与集成电路接触,以及在所述第一端部和所述第二端部之间延伸的弯曲主体部分(56)。

    Cantilever probe card
    3.
    发明申请
    Cantilever probe card 有权
    悬臂式探针卡

    公开(公告)号:US20080204062A1

    公开(公告)日:2008-08-28

    申请号:US11712733

    申请日:2007-02-28

    IPC分类号: G01R1/067 H01R43/00

    摘要: A method and apparatus for a flattened probe element wire is provided. A probe element wire comprises a beam portion and a tip portion. At least a part of the tip portion is flattened. Flattened probe element wires may have greater z-direction height strength, thereby increasing maximum probe element wire z-direction vertical force. Flattened probe element wires may also have decreased variability in the flattened probe element wire tips. A probe card assembly may comprise a substrate and a plurality of at least partially flattened probe element wires supported by the substrate. Such probe card assemblies may have an extended life and maintained within design parameters for a longer period of use.

    摘要翻译: 提供了一种用于扁平的探针元件线的方法和装置。 探针元件线包括梁部分和尖端部分。 顶端部分的至少一部分变平。 扁平的探针元件线可能具有较大的z方向高度强度,从而增加最大探针元件线z向垂直力。 扁平化的探针元件线在平坦的探针元件导线尖端中也可能具有降低的变化。 探针卡组件可以包括衬底和由衬底支撑的多个至少部分平坦化的探针元件线。 这种探针卡组件可以具有延长的使用寿命并且保持在设计参数中以供更长的使用期限。

    Probes for a Wafer Test Apparatus
    4.
    发明申请
    Probes for a Wafer Test Apparatus 有权
    硅片测试仪的探头

    公开(公告)号:US20080258746A1

    公开(公告)日:2008-10-23

    申请号:US11885107

    申请日:2006-02-16

    IPC分类号: G01R1/073

    摘要: A probe configured for use in the testing of integrated circuits includes a first end portion terminating in a foot (42), the foot defining a substantially flat surface configured to be connected to a substrate (400), a second end portion terminating in a tip (50), the tip being configured to contact an integrated circuit during testing of the integrated circuit, and a curved body portion (56) extending between the first end portion and the second end portion.

    摘要翻译: 构造成用于集成电路测试的探针包括终止于脚部(42)的第一端部部分,所述脚部限定基本上平坦的表面,所述基本上平坦的表面被配置为连接到基底(400),第二端部终止于尖端 (50),所述尖端构造成在所述集成电路的测试期间与集成电路接触,以及在所述第一端部和所述第二端部之间延伸的弯曲主体部分(56)。