Apparatus for transferring electronic components in stages
    1.
    发明授权
    Apparatus for transferring electronic components in stages 有权
    用于分阶段转移电子元件的装置

    公开(公告)号:US08251422B2

    公开(公告)日:2012-08-28

    申请号:US12748777

    申请日:2010-03-29

    IPC分类号: H01L21/673 H01L21/677

    CPC分类号: H01L21/6838 H01L21/67333

    摘要: A transfer assembly for transferring first and second groups of electronic components simultaneously comprises a holding plate containing first and second sets of suction holes. The respective first and second sets of suction holes are operative to hold the first and second groups of electronic components respectively against the holding plate during transfer of the electronic components. A first vacuum chamber located next to the holding plate is connected only to the first set of suction holes. A vacuum compartment located within the first vacuum chamber encloses a second vacuum chamber. The vacuum compartment includes a sealing sheet in contact with the holding plate which has vacuum holes connecting the second vacuum chamber to the second set of suction holes. First and second vacuum sources are provided for applying vacuum suction forces separately in the first and second vacuum chambers.

    摘要翻译: 用于同时传送第一组和第二组电子部件的传送组件包括容纳第一组和第二组抽吸孔的保持板。 相应的第一组和第二组抽吸孔可操作以在传送电子部件期间将第一组和第二组电子部件分别抵靠在保持板上。 位于保持板附近的第一真空室仅与第一组吸入孔连接。 位于第一真空室内的真空室包围第二真空室。 真空室包括与保持板接触的密封片,该密封片具有将第二真空室连接到第二组吸入孔的真空孔。 提供第一和第二真空源以在第一和第二真空室中分别施加真空吸力。

    APPARATUS FOR TRANSFERRING ELECTRONIC COMPONENTS IN STAGES
    3.
    发明申请
    APPARATUS FOR TRANSFERRING ELECTRONIC COMPONENTS IN STAGES 有权
    用于在阶段转移电子元件的装置

    公开(公告)号:US20110236161A1

    公开(公告)日:2011-09-29

    申请号:US12748777

    申请日:2010-03-29

    IPC分类号: H01L21/673 H01L21/677

    CPC分类号: H01L21/6838 H01L21/67333

    摘要: A transfer assembly for transferring first and second groups of electronic components simultaneously comprises a holding plate containing first and second sets of suction holes. The respective first and second sets of suction holes are operative to hold the first and second groups of electronic components respectively against the holding plate during transfer of the electronic components. A first vacuum chamber located next to the holding plate is connected only to the first set of suction holes. A vacuum compartment located within the first vacuum chamber encloses a second vacuum chamber. The vacuum compartment includes a sealing sheet in contact with the holding plate which has vacuum holes connecting the second vacuum chamber to the second set of suction holes. First and second vacuum sources are provided for applying vacuum suction forces separately in the first and second vacuum chambers.

    摘要翻译: 用于同时传送第一组和第二组电子部件的传送组件包括容纳第一组和第二组抽吸孔的保持板。 相应的第一组和第二组抽吸孔可操作以在传送电子部件期间将第一组和第二组电子部件分别抵靠在保持板上。 位于保持板附近的第一真空室仅与第一组吸入孔连接。 位于第一真空室内的真空室包围第二真空室。 真空室包括与保持板接触的密封片,该密封片具有将第二真空室连接到第二组吸入孔的真空孔。 提供第一和第二真空源以在第一和第二真空室中分别施加真空吸力。