公开(公告)号：US07267808B2

公开(公告)日：2007-09-11

申请号：US11174723

申请日：2005-07-06

申请人： Masato Yamazaki ,  Kenshi Mitsuishi ,  Isao Harada ,  Masao Tanaka ,  Kohichi Haruta ,  Koji Watari ,  Jin-yu Qiu ,  Yuji Hotta ,  Kimiyasu Sato

发明人： Masato Yamazaki ,  Kenshi Mitsuishi ,  Isao Harada ,  Masao Tanaka ,  Kohichi Haruta ,  Koji Watari ,  Jin-yu Qiu ,  Yuji Hotta ,  Kimiyasu Sato

IPC分类号： C01B21/072 ,  C04B35/581

CPC分类号： C04B35/6261 ,  B82Y30/00 ,  C01B21/072 ,  C01B21/0728 ,  C01P2004/50 ,  C01P2004/64 ,  C01P2006/12 ,  C01P2006/80 ,  C04B35/62625 ,  C04B35/6265 ,  C04B35/6303 ,  C04B2235/3208 ,  C04B2235/3225 ,  C04B2235/3895 ,  C04B2235/5409 ,  C04B2235/5436 ,  C04B2235/5445 ,  C04B2235/5454 ,  C04B2235/549 ,  C04B2235/77 ,  C04B2235/9607

摘要： The present invention is to produce an aluminum nitride powder which is turned into a sintered body at a temperature of not more than 1600° C., thereby obtaining a sintered aluminum nitride in which the density and thermal conductivity are high and which can be properly used as a substrate material.Using a vapor phase reaction apparatus shown in FIG. 1, ammonia gas was fed from a reactor 2 heated at from 300 to 500° C. and maintained at that temperature by a heating section 1 via a feeding tube 4 while being regulated by a flow regulator 3. At the same time, while being regulated by the flow regulator 5, nitrogen gas containing an organic aluminum compound is fed via a feeding tube 6 to obtain an aluminum nitride powder. The aluminum nitride powder is subjected to a heat treatment at from 1100 to 1500° C. in a reducing gas atmosphere and/or an inert gas atmosphere to obtain an aggregate aluminum nitride powder. The aggregate aluminum nitride powder is subjected to a mechanical treatment to obtain an aluminum nitride powder in which the specific surface area value is not less than 30 m2/g and a ratio of an average particle diameter to a particle diameter in terms of the specific surface area is not more than 10.

摘要翻译： 本发明是在不高于1600℃的温度下制造烧结体的氮化铝粉末，得到密度和导热系数高，可适当使用的烧结氮化铝 作为基材。 使用图1所示的气相反应装置， 如图1所示，从加热到300℃〜500℃的反应器2供给氨气，并在加热部1通过供给管4保持在该温度的同时由流量调节器3调节。 同时，在被流量调节器5调节的同时，通过供给管6供给含有有机铝化合物的氮气，得到氮化铝粉末。 在还原气体气氛和/或惰性气体气氛中，将氮化铝粉末在1100〜1500℃下进行热处理，得到集合的氮化铝粉末。 对该聚合氮化铝粉末进行机械处理，得到比表面积值为30m 2 / g以上的氮化铝粉末，平均粒径与 粒径以比表面积计不超过10。

公开(公告)号：US20060018818A1

公开(公告)日：2006-01-26

申请号：US11174723

申请日：2005-07-06

申请人： Masato Yamazaki ,  Kenshi Mitsuishi ,  Isao Harada ,  Masao Tanaka ,  Kohichi Haruta ,  Koji Watari ,  Jin-yu Qiu ,  Yuji Hotta ,  Kimiyasu Sato

发明人： Masato Yamazaki ,  Kenshi Mitsuishi ,  Isao Harada ,  Masao Tanaka ,  Kohichi Haruta ,  Koji Watari ,  Jin-yu Qiu ,  Yuji Hotta ,  Kimiyasu Sato

IPC分类号： C04B35/581 ,  C01B21/072

CPC分类号： C04B35/6261 ,  B82Y30/00 ,  C01B21/072 ,  C01B21/0728 ,  C01P2004/50 ,  C01P2004/64 ,  C01P2006/12 ,  C01P2006/80 ,  C04B35/62625 ,  C04B35/6265 ,  C04B35/6303 ,  C04B2235/3208 ,  C04B2235/3225 ,  C04B2235/3895 ,  C04B2235/5409 ,  C04B2235/5436 ,  C04B2235/5445 ,  C04B2235/5454 ,  C04B2235/549 ,  C04B2235/77 ,  C04B2235/9607

摘要： The present invention is to produce an aluminum nitride powder which is turned into a sintered body at a temperature of not more than 1600° C., thereby obtaining a sintered aluminum nitride in which the density and thermal conductivity are high and which can be properly used as a substrate material. Using a vapor phase reaction apparatus shown in FIG. 1, ammonia gas was fed from a reactor 2 heated at from 300 to 500° C. and maintained at that temperature by a heating section 1 via a feeding tube 4 while being regulated by a flow regulator 3. At the same time, while being regulated by the flow regulator 5, nitrogen gas containing an organic aluminum compound is fed via a feeding tube 6 to obtain an aluminum nitride powder. The aluminum nitride powder is subjected to a heat treatment at from 1100 to 1500° C. in a reducing gas atmosphere and/or an inert gas atmosphere to obtain an aggregate aluminum nitride powder. The aggregate aluminum nitride powder is subjected to a mechanical treatment to obtain an aluminum nitride powder in which the specific surface area value is not less than 30 m2/g and a ratio of an average particle diameter to a particle diameter in terms of the specific surface area is not more than 10.

摘要翻译： 本发明是在不高于1600℃的温度下制造烧结体的氮化铝粉末，得到密度和导热系数高，可适当使用的烧结氮化铝 作为基材。 使用图1所示的气相反应装置， 如图1所示，从加热到300〜500℃的反应器2供给氨气，同时由流量调节器3调节由加热部1通过加热部1维持在该温度。同时， 通过流量调节器5调节，含有有机铝化合物的氮气通过进料管6进料，得到氮化铝粉末。 在还原气体气氛和/或惰性气体气氛中，将氮化铝粉末在1100〜1500℃下进行热处理，得到集合的氮化铝粉末。 对该聚合氮化铝粉末进行机械处理，得到比表面积值为30m 2 / g以上的氮化铝粉末，平均粒径与 粒径以比表面积计不超过10。