公开(公告)号：US07519252B2

公开(公告)日：2009-04-14

申请号：US11691131

申请日：2007-03-26

申请人： Keiko Morita, legal representative

发明人： Hiroyuki Morita

IPC分类号： G02B6/04

CPC分类号： G02B6/4296 ,  G02B27/0911 ,  G02B27/0927 ,  G02B27/0994 ,  H01L21/268 ,  H01S3/005

摘要： A laser annealing apparatus comprises a laser oscillator having a Q switching action, one or a plurality of partially reflective mirrors for split a laser beam emitted from the laser oscillator into a plurality of laser beams, a plurality of optical fibers which respectively transmit the plurality of laser beams split by the partially reflective mirrors, and whose respective emission ends are arranged linearly in one direction, a first optical system for synthesizing and homogenizing the plurality of laser beams emitted from the optical fibers, and a second optical system for focusing the laser beam emitted from the first optical system on the work piece surface as a rectangular laser beam whose beam shape is long in the lateral direction and short in the longitudinal direction. As a result, laser power transmission by means of slender optical fibers is possible even in cases in which a green laser such as the second harmonic of an Nd:YAG laser having a Q switching action or the like is used as a heating light source. Accordingly, a compact laser annealing apparatus that has a high-quality working performance and does not require a laser amplifier or high-frequency generating apparatus can be obtained.

摘要翻译： 激光退火装置包括具有Q切换动作的激光振荡器，用于将从激光振荡器发射的激光束分成多个激光束的一个或多个部分反射镜，分别透射多个激光振荡器的多个光纤 由部分反射镜分开的激光束，其各个发射端沿一个方向线性布置;第一光学系统，用于合成和均化从光纤发出的多个激光束;以及第二光学系统，用于聚焦激光束 从工件表面上的第一光学系统发射的光束形状在横向方向上长并且在纵向方向上短的矩形激光束。 结果，即使在使用诸如具有Q切换动作的Nd：YAG激光器的二次谐波的绿色激光等作为加热光源的情况下，也可以通过细长的光纤进行激光功率传输。 因此，可以获得具有高质量工作性能并且不需要激光放大器或高频产生装置的紧凑型激光退火装置。

公开(公告)号：US07912102B2

公开(公告)日：2011-03-22

申请号：US12648990

申请日：2009-12-29

申请人： Hiroyuki Morita ,  Keiko Morita, legal representative

发明人： Hiroyuki Morita

IPC分类号： H01S3/10

CPC分类号： H01S3/07 ,  H01S3/0602 ,  H01S3/109 ,  H01S3/127 ,  H01S3/1611 ,  H01S3/1643

摘要： Fundamental laser light having a wavelength of 1,064 nm, for example, is generated by a solid-state laser medium. The fundamental laser light is reflected by a flat mirror and amplified again passing through a Q-switch, a solid-state laser medium, a Q-switch, a Q-switch, a solid-state laser medium, and a Q-switch. The fundamental laser light furthermore reflects from a flat mirror, passes through a flat mirror for second-harmonic resonance, passes through a lens, then reflects from a flat mirror for laser light separation, and enters a nonlinear optical crystal for the third harmonic and a nonlinear optical crystal for the second harmonic. A solid-state laser generator can thereby be obtained in which second-harmonic laser light obtained in an intermediate stage can be used with good efficiency and be converted, for example, to third-harmonic laser light and higher-harmonic laser light with higher efficiency and higher output.

摘要翻译： 例如，通过固态激光介质产生波长为1064nm的基波激光。 基本激光由平面反射镜反射并再次通过Q开关，固态激光介质，Q开关，Q开关，固态激光介质和Q开关放大。 基本的激光进一步从平面反射镜反射，通过用于二次谐波谐振的平面镜，通过透镜，然后从用于激光分离的平面镜反射，并且进入用于三次谐波的非线性光学晶体和 用于二次谐波的非线性光学晶体。 由此，能够得到在中间阶段得到的二次谐波激光能够以高效率使用并被转换为例如三次谐波激光和高效率的高次谐波激光的固态激光发生器 和更高的产量。

公开(公告)号：US07715452B2

公开(公告)日：2010-05-11

申请号：US11963217

申请日：2007-12-21

申请人： Hiroyuki Morita ,  Keiko Morita, legal representative

发明人： Hiroyuki Morita

IPC分类号： H01S3/10

CPC分类号： H01S3/07 ,  H01S3/0602 ,  H01S3/109 ,  H01S3/127 ,  H01S3/1611 ,  H01S3/1643

摘要： Fundamental laser light having a wavelength of 1,064 nm, for example, is generated by a solid-state laser medium. The fundamental laser light is reflected by a flat mirror and amplified again passing through a Q-switch, a solid-state laser medium, a Q-switch, a Q-switch, a solid-state laser medium, and a Q-switch. The fundamental laser light furthermore reflects from a flat mirror, passes through a flat mirror for second-harmonic resonance, passes through a lens, then reflects from a flat mirror for laser light separation, and enters a nonlinear optical crystal for the third harmonic and a nonlinear optical crystal for the second harmonic. A solid-state laser generator can thereby be obtained in which second-harmonic laser light obtained in an intermediate stage can be used with good efficiency and be converted, for example, to third-harmonic laser light and higher-harmonic laser light with higher efficiency and higher output.

摘要翻译： 例如，通过固态激光介质产生波长为1064nm的基波激光。 基本激光由平面反射镜反射并再次通过Q开关，固态激光介质，Q开关，Q开关，固态激光介质和Q开关放大。 基本的激光进一步从平面反射镜反射，通过用于二次谐波谐振的平面镜，通过透镜，然后从用于激光分离的平面镜反射，并且进入用于三次谐波的非线性光学晶体和 用于二次谐波的非线性光学晶体。 由此，能够得到在中间阶段得到的二次谐波激光能够以高效率使用并被转换为例如三次谐波激光和高效率的高次谐波激光的固态激光发生器 和更高的产量。