公开(公告)号：US09455650B2

公开(公告)日：2016-09-27

申请号：US13522788

申请日：2011-01-18

申请人： Jinchun Hu ,  Yu Zhu ,  Jinsong Wang ,  Ming Zhang ,  Kai Liao ,  Kaiming Yang ,  Dengfeng Xu ,  Wensheng Yin ,  Guanghong Duan

发明人： Jinchun Hu ,  Yu Zhu ,  Jinsong Wang ,  Ming Zhang ,  Kai Liao ,  Kaiming Yang ,  Dengfeng Xu ,  Wensheng Yin ,  Guanghong Duan

IPC分类号： G06F17/11 ,  H02N15/00 ,  G01D5/14

CPC分类号： H02N15/00 ,  G01D5/145

摘要： A two-dimensional locating method of a motion platform based on a magnetic steel array involves the following steps: placing more than four linear Hall sensors at any different positions within one or more polar distances of the magnetic steel array on the surface of the motion platform in a motion system; determining a magnetic flux density distribution model according to the magnetic steel array; determining the mounting positions of the above-mentioned linear Hall sensors, which are converted into phases with respect to the mass center of the motion platform; recording the magnetic flux density measured values of the linear Hall sensors as the motion proceeds; solving the phases of the mass center of the motion platform in a plane, with the measured values being served as observed quantities and the magnetic flux density distribution model being served as a computation model; and determining the position of the mass center of the motion platform with respect to an initial phase according to the phase, so as to realize the planar location of the motion platform. The present invention provides a simple, fast and robust method for computing mass center positions for a motion system containing a magnetic steel array.

摘要翻译： 基于磁钢阵列的运动平台的二维定位方法包括以下步骤：将多于四个线性霍尔传感器放置在运动平台表面上的磁钢阵列的一个或多个极距离内的任何不同位置 在运动系统中 根据磁钢阵列确定磁通密度分布模型; 确定上述线性霍尔传感器的安装位置，其相对于运动平台的质心转换成相位; 在运动过程中记录线性霍尔传感器的磁通密度测量值; 解决平面中运动平台质心的相位，测量值作为观测量，磁通密度分布模型用作计算模型; 并根据相位确定运动平台的质量中心相对于初始相位的位置，以便实现运动平台的平面位置。 本发明提供了一种用于计算包含磁钢阵列的运动系统的质心位置的简单，快速和鲁棒的方法。

公开(公告)号：US20140160495A1

公开(公告)日：2014-06-12

申请号：US14234870

申请日：2012-07-26

申请人： Ming Zhang ,  Yu Zhu ,  Zhao Liu ,  Jinchun Hu ,  Dengfeng Xu ,  Kaiming Yang ,  Wensheng Yin ,  Haihua Mu

发明人： Ming Zhang ,  Yu Zhu ,  Zhao Liu ,  Jinchun Hu ,  Dengfeng Xu ,  Kaiming Yang ,  Wensheng Yin ,  Haihua Mu

IPC分类号： G01B11/14

CPC分类号： G01B11/14 ,  G03F7/70775

摘要： A two-dimensional, position-sensitive sensor-based system for positioning an object having six degrees of freedom in space, used for positioning of a silicon table and mask table of a lithography machine. The system comprises mainly a semiconductor laser 1, an optical fiber collimator 2, optical fibers 3, 7, 10, and 13, an optical fiber splitter 4, filter plates 6, 9, and 12, three PSD sensors 5, 8, and 11, and a signal processing system. Laser emitted by the semiconductor laser 1 is irradiated onto the optical fiber collimator 2, then transmitted respectively via three paths, and received by the PSD sensors 5, 8, and 11 after having background light filtered out by the filter plates 6, 9, and 12, while the positions of laser spots on the three PSD sensors 5, 8, and 11 are processed by the signal processing system to acquire the position and orientation.

摘要翻译： 一种二维，位置敏感的基于传感器的系统，用于定位具有六个自由度的物体，用于定位硅平台和光刻机的掩模台。 该系统主要包括半导体激光器1，光纤准直器2，光纤3,7,10和13，光纤分路器4，滤光板6,9和12，三个PSD传感器5,8和11 ，以及信号处理系统。 由半导体激光器1发射的激光照射到光纤准直器2上，然后分别通过三条路径传输，并且由背景光被过滤板6,9滤掉后由PSD传感器5,8和11接收， 在图12中，三个PSD传感器5,8和11上的激光点的位置由信号处理系统处理以获取位置和方位。

公开(公告)号：US08284380B2

公开(公告)日：2012-10-09

申请号：US12669671

申请日：2008-03-14

申请人： Yu Zhu ,  Ming Zhang ,  Jinsong Wang ,  Guang Li ,  Dengfeng Xu ,  Wensheng Yin ,  Guanghong Duan ,  Kaiming Yang

发明人： Yu Zhu ,  Ming Zhang ,  Jinsong Wang ,  Guang Li ,  Dengfeng Xu ,  Wensheng Yin ,  Guanghong Duan ,  Kaiming Yang

IPC分类号： G03B27/42 ,  G03B27/58 ,  H02K41/02

CPC分类号： G03F7/70725 ,  G03F7/70733

摘要： A dual-stage switching system for lithographic machine includes a wafer stage to be operated in an exposure station and another wafer stage to be operated in a pre-processing station. The two wafer stages are provided on a base, with four 2-DOF driving units capable of moving along X direction and Y direction being provided along the edge of the base, and the wafer stages being disposed in a space surrounded by the four 2-DOF driving units and suspended on an upper surface of the base by air bearings. Each of the 2-DOF driving units includes upper and lower linear guides and a guiding sleeve, with the upper and lower linear guides being installed vertical to each other in their corresponding guiding sleeve. Two adjacent 2-DOF driving units cooperatively drive the wafer stage) to move in the X direction and Y direction.

摘要翻译： 用于光刻机的双级切换系统包括在曝光站中操作的晶片台和在预处理站中操作的另一晶片台。 两个晶片台设置在基座上，四个2-DOF驱动单元能够沿X方向移动，Y方向沿着基座的边缘设置，并且晶片台设置在由四个2- DOF驱动单元，并通过空气轴承悬挂在基座的上表面上。 每个2自由度驱动单元包括上和下线性引导件和引导套筒，其中上和下线性引导件在其相应的导向套筒中彼此垂直地安装。 两个相邻的2-DOF驱动单元协同驱动晶片台）沿X方向和Y方向移动。

公开(公告)号：US08084897B2

公开(公告)日：2011-12-27

申请号：US12666055

申请日：2008-03-14

申请人： Yu Zhu ,  Jinsong Wang ,  Ming Zhang ,  Guang Li ,  Dengfeng Xu ,  Wensheng Yin ,  Guanghong Duan ,  Kaiming Yang

发明人： Yu Zhu ,  Jinsong Wang ,  Ming Zhang ,  Guang Li ,  Dengfeng Xu ,  Wensheng Yin ,  Guanghong Duan ,  Kaiming Yang

IPC分类号： H02K41/02

CPC分类号： G03F7/70758 ,  G03F7/70725

摘要： A micro stage with 6 degrees of freedom used in super-precise processing and sensing equipment fields is disclosed. The micro stage has three sets of electromagnetic driving units arranged in a horizontal plane for driving the micro stage to obtain movements within the horizontal plane with 3 degrees of freedom in X, Y and θz directions and three electromagnetic driving units arranged in a vertical direction for driving the micro stage to obtain additional movements with 3 degrees of freedom in Z, θx and θy directions. Direct driving by electromagnetic force is used in the invention. The invention is also applicable in super-precise processing and sensing fields for achieving 6 degree-of-freedom motions. The micro stage, which operates on the basis of Lorentz Law, provides a linear relation between the output pushing force and the input electrical current.

摘要翻译： 公开了一种在超精密加工和感测设备领域中使用6自由度的微型台。 微型平台具有三组电磁驱动单元，其布置在水平面中，用于驱动微型平台，以在X，Y和...以及z方向上获得3度自由度的水平面内的移动;以及垂直布置的三个电磁驱动单元 方向用于驱动微型平台，以获得Z，...，x和y方向的3个自由度的附加运动。 本发明使用电磁力直接驱动。 本发明也适用于实现6自由度运动的超精密加工和感测领域。 基于洛伦兹定律运行的微观阶段提供了输出推力与输入电流之间的线性关系。

公开(公告)号：US20100208227A1

公开(公告)日：2010-08-19

申请号：US12669671

申请日：2008-03-14

申请人： Yu Zhu ,  Ming Zhang ,  Jinsong Wang ,  Guang Li ,  Dengfeng Xu ,  Wensheng Yin ,  Guanghong Duan ,  Kaiming Yang

发明人： Yu Zhu ,  Ming Zhang ,  Jinsong Wang ,  Guang Li ,  Dengfeng Xu ,  Wensheng Yin ,  Guanghong Duan ,  Kaiming Yang

IPC分类号： G03B27/58

CPC分类号： G03F7/70725 ,  G03F7/70733

摘要： A dual-stage switching system for lithographic machine includes a wafer stage to be operated in an exposure station and another wafer stage to be operated in a pre-processing station. The two wafer stages are provided on a base, with four 2-DOF driving units capable of moving along X direction and Y direction being provided along the edge of the base, and the wafer stages being disposed in a space surrounded by the four 2-DOF driving units and suspended on an upper surface of the base by air bearings. Each of the 2-DOF driving units includes upper and lower linear guides and a guiding sleeve, with the upper and lower linear guides being installed vertical to each other in their corresponding guiding sleeve. Two adjacent 2-DOF driving units cooperatively drive the wafer stage) to move in the X direction and Y direction.

摘要翻译： 用于光刻机的双级切换系统包括在曝光站中操作的晶片台和在预处理站中操作的另一晶片台。 两个晶片台设置在基座上，四个2-DOF驱动单元能够沿着X方向移动，Y方向沿着基座的边缘设置，并且晶片台被布置在由四个2- DOF驱动单元，并通过空气轴承悬挂在基座的上表面上。 每个2自由度驱动单元包括上和下线性引导件和引导套筒，其中上和下线性引导件在其相应的导向套筒中彼此垂直地安装。 两个相邻的2-DOF驱动单元协同驱动晶片台）沿X方向和Y方向移动。

公开(公告)号：US08958078B2

公开(公告)日：2015-02-17

申请号：US14234870

申请日：2012-07-26

申请人： Ming Zhang ,  Yu Zhu ,  Zhao Liu ,  Jinchun Hu ,  Dengfeng Xu ,  Kaiming Yang ,  Wensheng Yin ,  Haihua Mu

发明人： Ming Zhang ,  Yu Zhu ,  Zhao Liu ,  Jinchun Hu ,  Dengfeng Xu ,  Kaiming Yang ,  Wensheng Yin ,  Haihua Mu

IPC分类号： G01B11/00 ,  G01B11/03 ,  G01B11/14 ,  G01C1/00 ,  G01C9/00 ,  G03F7/20

CPC分类号： G01B11/14 ,  G03F7/70775

摘要： A two-dimensional, position-sensitive sensor-based system for positioning an object having six degrees of freedom in space, used for positioning of a silicon table and mask table of a lithography machine. The system comprises mainly a semiconductor laser 1, an optical fiber collimator 2, optical fibers 3, 7, 10, and 13, an optical fiber splitter 4, filter plates 6, 9, and 12, three PSD sensors 5, 8, and 11, and a signal processing system. Laser emitted by the semiconductor laser 1 is irradiated onto the optical fiber collimator 2, then transmitted respectively via three paths, and received by the PSD sensors 5, 8, and 11 after having background light filtered out by the filter plates 6, 9, and 12, while the positions of laser spots on the three PSD sensors 5, 8, and 11 are processed by the signal processing system to acquire the position and orientation.

摘要翻译： 一种二维，位置敏感的基于传感器的系统，用于定位具有六个自由度的物体，用于定位硅平台和光刻机的掩模台。 该系统主要包括半导体激光器1，光纤准直器2，光纤3,7,10和13，光纤分路器4，滤光板6,9和12，三个PSD传感器5,8和11 ，以及信号处理系统。 由半导体激光器1发射的激光照射到光纤准直器2上，然后分别通过三条路径传输，并且由背景光被过滤板6,9滤掉后由PSD传感器5,8和11接收， 在图12中，三个PSD传感器5,8和11上的激光点的位置由信号处理系统处理以获取位置和方位。

公开(公告)号：US08599361B2

公开(公告)日：2013-12-03

申请号：US13635168

申请日：2011-03-15

申请人： Yu Zhu ,  Ming Zhang ,  Guang Li ,  Jinsong Wang ,  Jinchun Hu ,  Wensheng Yin ,  Kaiming Yang ,  Li Zhang ,  Jing Ma ,  Yan Xu ,  Yujie Li ,  Li Tian ,  Guanghong Duan

发明人： Yu Zhu ,  Ming Zhang ,  Guang Li ,  Jinsong Wang ,  Jinchun Hu ,  Wensheng Yin ,  Kaiming Yang ,  Li Zhang ,  Jing Ma ,  Yan Xu ,  Yujie Li ,  Li Tian ,  Guanghong Duan

IPC分类号： G03B27/42 ,  G03B27/58 ,  G03B27/62 ,  H02K41/02

CPC分类号： G03F7/70758 ,  G03F7/70716

摘要： A nanometer precision six-DOF magnetic suspension micro-stage and the application thereof are provided which are mainly used in semiconductor photolithography devices. The micro-stage includes a cross support and four two-DOF actuators. Each 2-DOF actuator comprises a vertically polarized permanent magnet, a horizontal force coil and a vertical force coil; the permanent magnet being mounted on an end of the cross support, the horizontal force coil and the vertical force coil being arranged on a side of and below the permanent magnet respectively and being spaced apart from the permanent magnet; the cross support and four vertically polarized permanent magnets constitute a mover of the micro-stage; the horizontal force coil and the vertical force coil being fixed by a coil framework respectively and constituting a stator of the micro-stage; and the stator being mounted on a base of the micro-stage. A dual-wafer table positioning system of a photolithography machine may be constructed by two said micro-stages in combination with a two-DOF large stroke linear motor. The present invention features simple structure, large driving force, small mass and absence of cable disturbance, and is possible to realize high precision, high acceleration six-DOF micro-motion.

摘要翻译： 提供了主要用于半导体光刻设备的纳米精密六自由度磁悬浮微步及其应用。 微型平台包括十字支架和四个双自由度执行器。 每个2-DOF致动器包括垂直极化永磁体，水平力线圈和垂直力线圈; 所述永磁体安装在所述十字支架的一端上，所述水平力线圈和所述垂直力线圈分别设置在所述永久磁铁的一侧和下方并与所述永磁体隔开; 交叉支撑和四个垂直极化永磁体构成微型载物; 水平力线圈和垂直力线圈分别由线圈框架固定并构成微型定子; 并且定子安装在微型台的基座上。 光刻机的双晶片台定位系统可以由两个微步与二自由度大行程直线电机组合构成。 本发明结构简单，驱动力大，质量小，无电缆扰动，可实现高精度，高加速度六自由度微动作。

公开(公告)号：US20130038853A1

公开(公告)日：2013-02-14

申请号：US13635168

申请日：2011-03-15

申请人： Yu Zhu ,  Ming Zhang ,  Guang Li ,  Jinsong Wang ,  Jinchun Hu ,  Wensheng Yin ,  Kaiming Yang ,  Li Zhang ,  Jing Ma ,  Yan Xu ,  Yujie Li ,  Li Tian ,  Guanghong Duan

发明人： Yu Zhu ,  Ming Zhang ,  Guang Li ,  Jinsong Wang ,  Jinchun Hu ,  Wensheng Yin ,  Kaiming Yang ,  Li Zhang ,  Jing Ma ,  Yan Xu ,  Yujie Li ,  Li Tian ,  Guanghong Duan

IPC分类号： H02K41/02 ,  G03B27/58

CPC分类号： G03F7/70758 ,  G03F7/70716

摘要： A nanometer precision six-DOF magnetic suspension micro-stage and the application thereof are provided which are mainly used in semiconductor photolithography devices. The micro-stage includes a cross support and four two-DOF actuators. Each 2-DOF actuator comprises a vertically polarized permanent magnet, a horizontal force coil and a vertical force coil; the permanent magnet being mounted on an end of the cross support, the horizontal force coil and the vertical force coil being arranged on a side of and below the permanent magnet respectively and being spaced apart from the permanent magnet; the cross support and four vertically polarized permanent magnets constitute a mover of the micro-stage; the horizontal force coil and the vertical force coil being fixed by a coil framework respectively and constituting a stator of the micro-stage; and the stator being mounted on a base of the micro-stage. A dual-wafer table positioning system of a photolithography machine may be constructed by two said micro-stages in combination with a two-DOF large stroke linear motor. The present invention features simple structure, large driving force, small mass and absence of cable disturbance, and is possible to realize high precision, high acceleration six-DOF micro-motion.

摘要翻译： 提供了主要用于半导体光刻设备的纳米精密六自由度磁悬浮微步及其应用。 微型平台包括十字支架和四个双自由度执行器。 每个2-DOF致动器包括垂直极化永磁体，水平力线圈和垂直力线圈; 所述永磁体安装在所述十字支架的一端上，所述水平力线圈和所述垂直力线圈分别设置在所述永久磁铁的一侧和下方并与所述永磁体隔开; 交叉支撑和四个垂直极化永磁体构成微型载物; 水平力线圈和垂直力线圈分别由线圈框架固定并构成微型定子; 并且定子安装在微型台的基座上。 光刻机的双晶片台定位系统可以由两个微步与二自由度大行程直线电机组合构成。 本发明结构简单，驱动力大，质量小，无电缆扰动，可实现高精度，高加速度六自由度微动作。

公开(公告)号：US20130024157A1

公开(公告)日：2013-01-24

申请号：US13522788

申请日：2011-01-18

申请人： Jinchun Hu ,  Yu Zhu ,  Jinsong Wang ,  Ming Zhang ,  Kai Liao ,  Kaiming Yang ,  Dengfeng Xu ,  Wensheng Yin ,  Guanghong Duan

发明人： Jinchun Hu ,  Yu Zhu ,  Jinsong Wang ,  Ming Zhang ,  Kai Liao ,  Kaiming Yang ,  Dengfeng Xu ,  Wensheng Yin ,  Guanghong Duan

IPC分类号： G06F17/11 ,  G01B7/14

CPC分类号： H02N15/00 ,  G01D5/145

摘要： A two-dimensional locating method of a motion platform based on a magnetic steel array involves the following steps: placing more than four linear Hall sensors at any different positions within one or more polar distances of the magnetic steel array on the surface of the motion platform in a motion system; determining a magnetic flux density distribution model according to the magnetic steel array; determining the mounting positions of the above-mentioned linear Hall sensors, which are converted into phases with respect to the mass center of the motion platform; recording the magnetic flux density measured values of the linear Hall sensors as the motion proceeds; solving the phases of the mass center of the motion platform in a plane, with the measured values being served as observed quantities and the magnetic flux density distribution model being served as a computation model; and determining the position of the mass center of the motion platform with respect to an initial phase according to the phase, so as to realize the planar location of the motion platform. The present invention provides a simple, fast and robust method for computing mass center positions for a motion system containing a magnetic steel array.

摘要翻译： 基于磁钢阵列的运动平台的二维定位方法包括以下步骤：将多于四个线性霍尔传感器放置在运动平台表面上的磁钢阵列的一个或多个极距离内的任何不同位置 在运动系统中 根据磁钢阵列确定磁通密度分布模型; 确定上述线性霍尔传感器的安装位置，其相对于运动平台的质心转换成相位; 在运动过程中记录线性霍尔传感器的磁通密度测量值; 解决平面中运动平台质心的相位，测量值作为观测量，磁通密度分布模型用作计算模型; 并根据相位确定运动平台的质量中心相对于初始相位的位置，以便实现运动平台的平面位置。 本发明提供了一种用于计算包含磁钢阵列的运动系统的质心位置的简单，快速和鲁棒的方法。

公开(公告)号：US20100187917A1

公开(公告)日：2010-07-29

申请号：US12666055

申请日：2008-03-14

申请人： Yu Zhu ,  Jinsong Wang ,  Ming Zhang ,  Guang Li ,  Dengfeng Xu ,  Wensheng Yin ,  Guanghong Duan ,  Kaiming Yang

发明人： Yu Zhu ,  Jinsong Wang ,  Ming Zhang ,  Guang Li ,  Dengfeng Xu ,  Wensheng Yin ,  Guanghong Duan ,  Kaiming Yang

IPC分类号： H02K41/035

CPC分类号： G03F7/70758 ,  G03F7/70725

摘要： A micro stage with 6 degrees of freedom used in super-precise processing and sensing equipment filed is disclosed. The micro stage has three sets of electromagnetic driving units arranged in a horizontal plane for driving the micro stage to obtain movements within the horizontal plane with 3 degrees of freedom in X, Y and θz directions and three electromagnetic driving units arranged in a vertical direction for driving the micro stage to obtain additional movements with 3 degrees of freedom in Z, θx and θy directions. Direct driving by electromagnetic force is used in the invention, resulting in advantages over stacked structures of having a simple structure, a compact profile, a low driven weight center, low stator inertia, etc. Thus, there is no mechanical friction and damping, and high displacement resolution can be provided. The positioning error of a wafer table of a lithographic machine can be compensated, and the leveling and focusing of the lithographic machine can be achieved. The invention is also applicable in super-precise processing and sensing fields for achieving 6 degree-of-freedom motions. The micro stage, which operates on the basis of Lorentz Law, provides a linear relation between the output pushing force and the input electrical current, and thus the movement control technique for it can be well established.

摘要翻译： 公开了一种用于超精密加工和感测设备的6自由度的微型台。 微型平台具有三组电磁驱动单元，其布置在水平面中，用于驱动微型平台，以在X，Y和...以及z方向上获得3度自由度的水平面内的移动;以及垂直布置的三个电磁驱动单元 方向用于驱动微型平台，以获得Z，...，x和y方向的3个自由度的附加运动。 本发明中采用电磁力直接驱动，结构优越，结构简单，结构紧凑，主动重量低，定子惯性低等优点。因此，不存在机械摩擦和阻尼， 可以提供高位移分辨率。 可以补偿平版印刷机的晶片台的定位误差，并且可以实现平版印刷机的调平和聚焦。 本发明也适用于实现6自由度运动的超精密加工和感测领域。 基于洛伦兹定律运行的微型平台提供了输出推力与输入电流之间的线性关系，因此可以很好地建立起来的运动控制技术。