公开(公告)号：US4363990A

公开(公告)日：1982-12-14

申请号：US212685

申请日：1980-12-03

申请人： Osamu Yamazaki ,  Junichi Inohara ,  Kazuo Tazuke ,  Kiyotaka Wasa

发明人： Osamu Yamazaki ,  Junichi Inohara ,  Kazuo Tazuke ,  Kiyotaka Wasa

IPC分类号： H03H3/08 ,  G10K11/36 ,  H03H9/145 ,  H03H9/64 ,  H01L41/08

CPC分类号： G10K11/36 ,  H03H9/145

摘要： A surface acoustic wave transducer having a piezoelectric thin film, interdigital electrodes disposed on one side surface of said piezoelectric thin film and an apodized counter electrode disposed on the opposite-side surface of said piezoelectric thin film. The outline of the apodized counter electrode is composed of parallel edges parallel to fingers of the interdigital electrode and perpendicular edges perpendicular to the fingers. The parallel edges are positioned in gaps between the fingers, so as not to lie over the fingers. Such structure remarkably reduces the deviation of characteristics of the transducer due to the incomplete alignment of the counter electrode with the interdigital electrode.

摘要翻译： 具有压电薄膜的表面声波传感器，设置在所述压电薄膜的一个侧表面上的叉指电极和设置在所述压电薄膜的相对侧表面上的变迹对置电极。 变迹对置电极的轮廓由平行于叉指电极的指状物的平行边缘和垂直于手指的垂直边缘组成。 平行的边缘位于手指之间的间隙中，以便不会在手指上。 由于对电极与叉指电极的不完全对准，这种结构显着地降低了换能器特性的偏差。