Transport management system and method thereof
    2.
    发明授权
    Transport management system and method thereof 有权
    运输管理系统及其方法

    公开(公告)号:US07151980B2

    公开(公告)日:2006-12-19

    申请号:US10811255

    申请日:2004-03-26

    IPC分类号: G06F7/00

    摘要: A system and method for carrier transport traffic management. A host computer connects to a fabrication tool, configured to acquire an available number of a resource type for the fabrication tool upon detecting a fabrication tool loadport of the fabrication tool is available. A material transport system connects to the host computer, receives the available number of a resource type for the fabrication tool, acquires a carrier identity corresponding to a carrier, acquires a required number of the resource type corresponding to the carrier, and issues a load command to an automated material handling system (AMHS) to transport the carrier to the fabrication tool if the available number of the resource type exceeds or equals to the required number of the resource type.

    摘要翻译: 一种运营商运输管理的系统和方法。 主计算机连接到制造工具,其被配置为在检测到制造工具的制造工具加载端口可用时获取用于制造工具的可用数量的资源类型。 物料运输系统连接到主计算机,接收制造工具的资源类型的可用数量,获取与载体相对应的载体标识,获取与载体相对应的资源类型所需数量,并发出加载命令 涉及如果所述资源类型的可用数量超过或等于所述资源类型的数量,则将所述载体传送到所述制造工具的自动材料处理系统(AMHS)。

    Job queue management system and method thereof
    5.
    发明申请
    Job queue management system and method thereof 有权
    作业队列管理系统及其方法

    公开(公告)号:US20050221596A1

    公开(公告)日:2005-10-06

    申请号:US10818916

    申请日:2004-04-06

    IPC分类号: G05B19/418 H04N1/32

    摘要: A system and method for job queue management. A job queue management apparatus acquires multiple wafer lot records individually regarding a plurality of wafers processed by a recipe, clusters the wafer lots by the common recipe into a group, creates a process job corresponding to the group, and stores the process job in a job queue of a fabrication tool.

    摘要翻译: 一种用于作业队列管理的系统和方法。 作业队列管理装置单独地获取关于通过食谱处理的多个晶片的多个晶片批次记录,通过公式将晶片批次分组成一组,创建与该组对应的处理作业,并将处理作业存储在作业中 制造工具的队列。

    Transport management system and method thereorf
    6.
    发明申请
    Transport management system and method thereorf 有权
    运输管理系统和方法

    公开(公告)号:US20050216115A1

    公开(公告)日:2005-09-29

    申请号:US10811255

    申请日:2004-03-26

    IPC分类号: G06F7/00 H01L21/00

    摘要: A system and method for carrier transport traffic management. A host computer connects to a fabrication tool, configured to acquire an available number of a resource type for the fabrication tool upon detecting a fabrication tool loadport of the fabrication tool is available. A material transport system connects to the host computer, receives the available number of a resource type for the fabrication tool, acquires a carrier identity corresponding to a carrier, acquires a required number of the resource type corresponding to the carrier, and issues a load command to an automated material handling system (AMHS) to transport the carrier to the fabrication tool if the available number of the resource type exceeds or equals to the required number of the resource type.

    摘要翻译: 一种运营商运输管理的系统和方法。 主计算机连接到制造工具,其被配置为在检测到制造工具的制造工具加载端口可用时获取用于制造工具的可用数量的资源类型。 物料运输系统连接到主计算机,接收制造工具的资源类型的可用数量,获取与载体相对应的载体标识,获取与载体相对应的资源类型所需数量,并发出加载命令 涉及如果所述资源类型的可用数量超过或等于所述资源类型的数量,则将所述载体传送到所述制造工具的自动材料处理系统(AMHS)。

    Systems and methods for manufacturing control using radio frequency identification
    7.
    发明授权
    Systems and methods for manufacturing control using radio frequency identification 有权
    使用射频识别制造控制的系统和方法

    公开(公告)号:US07145459B2

    公开(公告)日:2006-12-05

    申请号:US11030854

    申请日:2005-01-07

    IPC分类号: G08B13/18 H04Q5/22

    摘要: A system for manufacturing control using radio frequency identification (RFID). A trigger issues a trigger signal when activated by user contact. A RFID interrogator retrieves information from a RFID tag when activated. A controller is configured to activate the RFID interrogator, get the relative information from associated systems and control the indicator according to the trigger signal. An indicator provides operating status of the RFID interrogator and/or information getting from the controller.

    摘要翻译: 一种使用射频识别(RFID)制造控制的系统。 当用户接触激活时,触发器发出触发信号。 RFID询问器在激活时从RFID标签检索信息。 控制器配置为激活RFID询问器,从相关系统获取相关信息,并根据触发信号控制指示器。 指示器提供RFID询问器的操作状态和/或从控制器获得的信息。