发明申请
- 专利标题： Dual ID verification system and switching method therefor
- 专利标题（中）： 双ID验证系统及其切换方法
-
申请号： US10655049申请日： 2003-09-04
-
公开(公告)号： US20050051616A1公开(公告)日： 2005-03-10
- 发明人: Jui-An Shin , Shun-An Chen , Ko-Pin Chang , Hui-Tang Liu , James You
- 申请人： Jui-An Shin , Shun-An Chen , Ko-Pin Chang , Hui-Tang Liu , James You
- 主分类号： G05B19/418
- IPC分类号： G05B19/418 ; G06F7/00
摘要：
A method for switch dual Id verification systems for installing another carrier ID system on an equipment installation complying with SEMI E87. A first identification access system has internally installed on an equipment installation on which a second identification access system is then installed. Both systems are switched using a control flow and a wafer carrier ID is obtained by the chosen verification system.
公开/授权文献
- US07077310B2 Dual ID verification system and switching method therefor 公开/授权日：2006-07-18
信息查询
IPC分类:
