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    Transport Device, In Particular for Transporting Sheet-Like Substrates Through a Coating Installation
    1.
    发明申请
    Transport Device, In Particular for Transporting Sheet-Like Substrates Through a Coating Installation 有权
    运输装置，特别是通过涂层安装运输片状基板

    公开(公告)号：US20090214784A1

    公开(公告)日：2009-08-27

    申请号：US11918009

    申请日：2006-04-07

    申请人： Hubertus Von Der Waydbrink ,  Georg Laimer ,  Siegfried Scheibe ,  Ricky C. Powell ,  James Ernest Hinkle ,  James B. Foote

    发明人： Hubertus Von Der Waydbrink ,  Georg Laimer ,  Siegfried Scheibe ,  Ricky C. Powell ,  James Ernest Hinkle ,  James B. Foote

    IPC分类号： B05D1/00 ,  B05C13/00

    CPC分类号： H01L21/67706 ,  C23C14/56 ,  C23C16/54 ,  H01L21/6776

    摘要： The transporting device according to the invention, in particular for transporting sheet-like substrates through a coating installation, comprises transporting rollers which are rotatably mounted on both sides and horizontally arranged transversely in relation to the transporting direction, the uppermost surface lines of the transporting rollers defining the transporting plane, and is characterized in that the end parts of the transporting rollers have a smaller diameter than the middle part of the transporting rollers and in that baffles which are mounted displaceably in the axial direction of the transporting rollers between a first position and a second position are arranged between the end parts of the transporting rollers and the transporting plane. The fact that the baffles are mounted in an axially displaceable manner has the effect of considerably extending the cleaning intervals of the transporting device. At first the baffles are arranged in a first position, in which the end of the baffle lies underneath the substrate and, in the horizontal direction, as close as possible to the middle of the transporting roller Vapour-depositing material that gets beyond the edge of the substrate hits the baffle. During operation of the transporting device, the baffles are continuously displaced from the middle part to the ends of the transporting rollers. As a result, the increase in thickness of the layer produced on the baffles is limited, since the vapour keeps hitting new portions of the baffle.

    摘要翻译： 根据本发明的传送装置，特别是用于通过涂布装置传送片状基片的传送装置包括：输送辊，其可旋转地安装在两侧并相对于输送方向横向布置，输送辊的最上表面线 限定输送平面，其特征在于，输送辊的端部具有比输送辊的中间部分更小的直径，并且其中挡板在输送辊的轴向方向上可移动地位于第一位置和 在输送辊的端部和输送平面之间设置有第二位置。 挡板以可轴向移位的方式安装的事实具有显着延长输送装置的清洁间隔的效果。 首先，挡板被布置在第一位置，其中挡板的端部位于基板的下方，并且在水平方向上尽可能靠近输送辊的中部。气相沉积材料超出边缘的边缘 衬底撞击挡板。 在输送装置的运行过程中，挡板从传送辊的中间部分到端部连续地移位。 结果，在挡板上产生的层的厚度的增加是有限的，因为蒸汽持续击打挡板的新部分。

    System and method for removing film from planar substrate peripheries
    2.
    发明授权
    System and method for removing film from planar substrate peripheries 有权
    从平面基板外围去除薄膜的系统和方法

    公开(公告)号：US07318769B2

    公开(公告)日：2008-01-15

    申请号：US11284028

    申请日：2005-11-22

    申请人： James Ernest Hinkle

    发明人： James Ernest Hinkle

    IPC分类号： B24B1/00

    CPC分类号： H01L21/6776 ,  H01L21/67132 ,  H01L21/67173 ,  H01L21/67236

    摘要： A system for removing film from a planar substrate includes a shuttle which transports a film-coated substrate through a film removal station to a rotation station. At the rotation station, the substrate is removed from the shuttle and rotated to a new orientation. After being repositioned on the shuttle, the substrate is transported by the shuttle through a second film removal station.

    摘要翻译： 用于从平面基板去除薄膜的系统包括穿膜，其将经薄膜去除工位的薄膜被覆基板输送到旋转台。 在旋转站处，将衬底从梭子上移开并转动到新的取向。 在梭子上重新定位之后，基片通过穿梭机通过第二薄膜去除台传送。

    Transport device, in particular for transporting sheet-like substrates through a coating installation
    3.
    发明授权
    Transport device, in particular for transporting sheet-like substrates through a coating installation 有权
    运输装置，特别是用于通过涂布装置输送片状基材

    公开(公告)号：US08277890B2

    公开(公告)日：2012-10-02

    申请号：US11918009

    申请日：2006-04-07

    申请人： Hubertus Von Der Waydbrink ,  Georg Laimer ,  Siegfried Scheibe ,  Ricky C. Powell ,  James Ernest Hinkle ,  James B. Foote

    发明人： Hubertus Von Der Waydbrink ,  Georg Laimer ,  Siegfried Scheibe ,  Ricky C. Powell ,  James Ernest Hinkle ,  James B. Foote

    IPC分类号： C23C16/00 ,  B05C13/00

    CPC分类号： H01L21/67706 ,  C23C14/56 ,  C23C16/54 ,  H01L21/6776

    摘要： The transporting device according to the invention, in particular for transporting sheet-like substrates through a coating installation, comprises transporting rollers which are rotatably mounted on both sides and horizontally arranged transversely in relation to the transporting direction, the uppermost surface lines of the transporting rollers defining the transporting plane, and is characterized in that the end parts of the transporting rollers have a smaller diameter than the middle part of the transporting rollers and in that baffles which are mounted displaceably in the axial direction of the transporting rollers between a first position and a second position are arranged between the end parts of the transporting rollers and the transporting plane. The fact that the baffles are mounted in an axially displaceable manner has the effect of considerably extending the cleaning intervals of the transporting device. At first the baffles are arranged in a first position, in which the end of the baffle lies underneath the substrate and, in the horizontal direction, as close as possible to the middle of the transporting roller Vapor-depositing material that gets beyond the edge of the substrate hits the baffle. During operation of the transporting device, the baffles are continuously displaced from the middle part to the ends of the transporting rollers. As a result, the increase in thickness of the layer produced on the baffles is limited, since the vapor keeps hitting new portions of the baffle.

    摘要翻译： 根据本发明的传送装置，特别是用于通过涂布装置传送片状基片的传送装置包括：输送辊，其可旋转地安装在两侧并相对于输送方向横向布置，输送辊的最上表面线 限定输送平面，其特征在于，输送辊的端部具有比输送辊的中间部分更小的直径，并且其中挡板在输送辊的轴向方向上可移动地位于第一位置和 在输送辊的端部和输送平面之间设置有第二位置。 挡板以可轴向移位的方式安装的事实具有显着延长输送装置的清洁间隔的效果。 首先，挡板被布置在第一位置，其中挡板的端部位于基板的下方，并且在水平方向上尽可能靠近输送辊的中部。气相沉积材料超出边缘的边缘 衬底撞击挡板。 在输送装置的运行过程中，挡板从传送辊的中间部分到端部连续地移位。 结果，在挡板上产生的层的厚度的增加是有限的，因为蒸汽持续击打挡板的新部分。