摘要:
An apparatus adapted to measure gaseous hydrogen concentrations in a mechanical vacuum pump (MVP) gas stream includes connection ports adapted to allow the apparatus to be connected to an MVP system and allow a gas stream sample to be taken from the MVP gas stream. The apparatus further includes a hydrogen concentration analyzer to measure H2 concentrations of the gas stream sample taken from the MVP gas stream.
摘要:
An apparatus adapted to measure gaseous hydrogen concentrations in a mechanical vacuum pump (MVP) gas stream includes connection ports adapted to allow the apparatus to be connected to an MVP system and allow a gas stream sample to be taken from the MVP gas stream. The apparatus further includes a hydrogen concentration analyzer to measure H2 concentrations of the gas stream sample taken from the MVP gas stream.