公开(公告)号：US20130141813A1

公开(公告)日：2013-06-06

申请号：US13310428

申请日：2011-12-02

Applicant: Takashi Wagatsuma ,  Yukimasa Okada ,  Ichiro Oodake ,  Atsushi Kato

Inventor： Takashi Wagatsuma ,  Yukimasa Okada ,  Ichiro Oodake ,  Atsushi Kato

IPC: G11B5/02 ,  G11B5/127 ,  B05D5/12

CPC classification number: G11B5/607 ,  G11B5/3133

Abstract: In one embodiment, a method includes forming a conducting material above an insulating film, applying a mask to portions of the conducting material in a shape of a TFC structure, removing exposed portions of the conducting material to form the TFC structure, depositing an insulating film above the TFC structure, and planarizing the insulating film to form a planar upper surface of the insulating film. In another embodiment, a magnetic head includes a TFC structure positioned between insulating films and a magnetic element positioned above the TFC structure, the TFC structure configured for providing localized thermal protrusion of the magnetic head on a media facing surface thereof, wherein an upper surface of an upper of the insulating films is planar, the magnetic element includes at least one of a main magnetic pole and a read sensor, and the TFC structure is configured for providing thermal protrusion of the magnetic element.

Abstract translation: 在一个实施例中，一种方法包括在绝缘膜的上方形成导电材料，以TFC结构的形式对导电材料的部分施加掩模，去除导电材料的暴露部分以形成TFC结构，沉积绝缘膜 在TFC结构之上，并且平坦化绝缘膜以形成绝缘膜的平面上表面。 在另一个实施例中，磁头包括定位在绝缘膜和位于TFC结构之上的磁性元件之间的TFC结构，该TFC结构被配置用于在其面向介质的表面上提供磁头的局部热突出，其中， 绝缘膜的上部是平面的，磁性元件包括主磁极和读取传感器中的至少一个，并且TFC结构被配置为提供磁性元件的热突起。

公开(公告)号：US07333301B2

公开(公告)日：2008-02-19

申请号：US10650832

申请日：2003-08-29

Applicant: Kimitoshi Etoh ,  Nobuo Yoshida ,  Moriaki Fuyama ,  Makoto Morijiri ,  Kenichi Meguro ,  Ichiro Oodake ,  Kazue Kudo ,  Yohji Maruyama ,  Katsuro Watanabe

Inventor： Kimitoshi Etoh ,  Nobuo Yoshida ,  Moriaki Fuyama ,  Makoto Morijiri ,  Kenichi Meguro ,  Ichiro Oodake ,  Kazue Kudo ,  Yohji Maruyama ,  Katsuro Watanabe

IPC: G11B5/127

CPC classification number: B82Y25/00 ,  B82Y10/00 ,  G11B5/3136 ,  G11B5/3909 ,  G11B5/3912 ,  Y10T29/49044

Abstract: A thin-film magnetic head having little temperature rise in the element, good heat dissipation and a short magnetic path length (narrow coil pitch) and manufacturing method for same is provided. To form the coil of the thin-film magnetic head, a lower coil is first formed and after forming alumina and an inorganic compound containing alumina, a trench is formed for the upper coil by reactive ion etching. The lower coil allows uniform etching at this time and functions as a film to prevent loading effects occurring during reactive ion etching. This trench is then plated in copper and chemical mechanical planarization performed to form the upper layer coil as the dual-layer coil of the present invention. Heat from the coil is efficiently radiated towards the substrate by alumina and an inorganic compound containing alumina with good heat propagation. The ratio of alumina or inorganic compound containing alumina in the lower coil can be selected by reactive ion etching so that an upper coil trench functioning as an etching stopper can be securely formed to allow forming a stable coil film thickness and a short magnetic path length.

Abstract translation: 提供元件温度上升较小，散热好，磁路长度短（窄线圈间距）及其制造方法的薄膜磁头。 为了形成薄膜磁头的线圈，首先形成下线圈，在形成氧化铝和含有氧化铝的无机化合物之后，通过反应离子蚀刻形成用于上部线圈的沟槽。 此时，下线圈允许均匀刻蚀，起到膜的作用，以防止在反应离子蚀刻期间发生的负载效应。 然后将该沟槽镀铜并进行化学机械平面化以形成上层线圈作为本发明的双层线圈。 来自线圈的热量通过氧化铝和含有良好热传播的氧化铝的无机化合物有效地朝向基板辐射。 可以通过反应离子蚀刻来选择下层线圈中的氧化铝或含有氧化铝的无机化合物的比例，从而可以可靠地形成用作蚀刻停止层的上部线圈沟槽，以形成稳定的线圈膜厚度和短的磁路长度。

公开(公告)号：US08760787B2

公开(公告)日：2014-06-24

申请号：US13310428

申请日：2011-12-02

Applicant: Takashi Wagatsuma ,  Yukimasa Okada ,  Ichiro Oodake ,  Atsushi Kato

Inventor： Takashi Wagatsuma ,  Yukimasa Okada ,  Ichiro Oodake ,  Atsushi Kato

IPC: G11B5/02

CPC classification number: G11B5/607 ,  G11B5/3133

Abstract: In one embodiment, a method includes forming a conducting material above an insulating film, applying a mask to portions of the conducting material in a shape of a TFC structure, removing exposed portions of the conducting material to form the TFC structure, depositing an insulating film above the TFC structure, and planarizing the insulating film to form a planar upper surface of the insulating film. In another embodiment, a magnetic head includes a TFC structure positioned between insulating films and a magnetic element positioned above the TFC structure, the TFC structure configured for providing localized thermal protrusion of the magnetic head on a media facing surface thereof, wherein an upper surface of an upper of the insulating films is planar, the magnetic element includes at least one of a main magnetic pole and a read sensor, and the TFC structure is configured for providing thermal protrusion of the magnetic element.

Abstract translation: 在一个实施例中，一种方法包括在绝缘膜的上方形成导电材料，以TFC结构的形式对导电材料的部分施加掩模，去除导电材料的暴露部分以形成TFC结构，沉积绝缘膜 在TFC结构之上，并且平坦化绝缘膜以形成绝缘膜的平面上表面。 在另一个实施例中，磁头包括定位在绝缘膜和位于TFC结构之上的磁性元件之间的TFC结构，该TFC结构被配置用于在其面向介质的表面上提供磁头的局部热突出，其中， 绝缘膜的上部是平面的，磁性元件包括主磁极和读取传感器中的至少一个，并且TFC结构被配置为提供磁性元件的热突起。

公开(公告)号：US20130077189A1

公开(公告)日：2013-03-28

申请号：US13247931

申请日：2011-09-28

Applicant: Atsushi Kato ,  Hideaki Tanaka ,  Ichiro Oodake ,  Takao Yonekawa

Inventor： Atsushi Kato ,  Hideaki Tanaka ,  Ichiro Oodake ,  Takao Yonekawa

IPC: G11B5/56 ,  G01R27/08

CPC classification number: G11B5/607 ,  G11B5/6076

Abstract: According to one embodiment, a magnetic data system includes a magnetic disk medium, a magnetic head having a writer element and/or a reader element, an exothermic resistor element for thermal fly-height control (TFC), a contact detection sensor having a resistor element and at least one contact detection electrode, and an insulating film on a medium facing side of the magnetic head to protect the contact detection sensor, the insulating film having a thickness greater than the contact detection electrode, a drive mechanism for passing the magnetic disk medium over the magnetic head, and a controller electrically coupled to the magnetic head for controlling operation of the magnetic head, wherein the controller adjusts magnetic spacing between the magnetic head and the magnetic disk medium via thermal distortion of the exothermic resistor element. The contact detection sensor may be used as a second TFC resistor element.

Abstract translation: 根据一个实施例，磁数据系统包括磁盘介质，具有写入器元件和/或读取器元件的磁头，用于热飞跃高度控制的放热电阻器元件（TFC），具有电阻器的接触检测传感器 元件和至少一个接触检测电极，以及在磁头的面向介质侧的绝缘膜，以保护接触检测传感器，绝缘膜的厚度大于接触检测电极;驱动机构，用于使磁盘 介质在磁头上，以及控制器，其电耦合到磁头用于控制磁头的操作，其中控制器通过放热电阻器元件的热失真来调节磁头和磁盘介质之间的磁间隔。 接触检测传感器可以用作第二TFC电阻元件。

公开(公告)号：US20120262816A1

公开(公告)日：2012-10-18

申请号：US13085417

申请日：2011-04-12

Applicant: Hideaki Tanaka ,  Kiyonori Shiraki ,  Atsushi Kato ,  Ichiro Oodake ,  Hiroshi Agari

Inventor： Hideaki Tanaka ,  Kiyonori Shiraki ,  Atsushi Kato ,  Ichiro Oodake ,  Hiroshi Agari

IPC: G11B5/02

CPC classification number: G11B5/607 ,  G11B5/3133

Abstract: A thermally actuated head for magnetic head for magnetic data recording having a contact sensor for detecting contact between the head and a magnetic disk. The contact sensor includes a thermal sensor film and first and second leads, wherein the leads extend at least as far from the ABS as the thermal sensor film. More preferably the leads extend slightly further from the ABS than the sensor film so that contact between the magnetic disk and the contact sensor occurs at the leads rather than at the sensor film. The sensor film can be constructed of NiFe, preferably having 30-70 atomic percent Ni or more preferably 40-60 atomic percent Ni or most preferably 40-50 atomic percent Ni. The leads are preferably constructed of one or more of Ru, Rh or Ta or an alloy whose primary constituents are Ru, Rh or Ta.

Abstract translation: 一种用于磁数据记录的用于磁头的热致动头，具有用于检测磁头和磁盘之间的接触的接触传感器。 接触传感器包括热传感器膜和第一和第二引线，其中引线至少与热传感器膜一样远离ABS延伸。 更优选地，引线比ABS比传感器膜略微延伸，使得磁盘和接触传感器之间的接触发生在引线而不是传感器膜处。 传感器膜可以由NiFe构成，优选具有30-70原子％的Ni或更优选的是40-60原子％的Ni或最优选的是40-50原子％的Ni。 引线优选由Ru，Rh或Ta中的一种或多种或其主要成分为Ru，Rh或Ta的合金构成。

公开(公告)号：US07681303B2

公开(公告)日：2010-03-23

申请号：US11897674

申请日：2007-08-30

Applicant: Akira Kondo ,  Koji Tanaka ,  Kimitoshi Etoh ,  Ichiro Oodake

Inventor： Akira Kondo ,  Koji Tanaka ,  Kimitoshi Etoh ,  Ichiro Oodake

IPC: G11B5/127 ,  H04R31/00

CPC classification number: G11B5/1278 ,  G11B5/315 ,  G11B5/3163 ,  G11B5/3169 ,  G11B5/3173 ,  G11B5/3196 ,  G11B5/6011 ,  Y10T29/49021 ,  Y10T29/49036 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052 ,  Y10T29/49798

Abstract: Embodiments of the present invention provide a method of manufacturing a magnetic head slider, the method being adapted so that throat height of a main magnetic pole piece of a perpendicular recording magnetic head can be controlled with high accuracy. According to one embodiment, a first Electrical Lapping Guide element (ELG) is disposed on the same layer as a plated underlayer of a shield of one write head in a row bar, and other ELGs are disposed on the same layer as that of a main magnetic pole piece of another write head. Front end positions (Tops) are detected from changes in resistance values of the other ELGs and an ending position of lapping is calculated. Since the front end positions (Tops) of the other ELGs are accurate, it is possible to assign a correlation to throat height “Th” of the main magnetic pole piece and the resistance value of the first ELG by detecting this resistance value existing when the front end positions (Tops) are detected.

Abstract translation: 本发明的实施例提供一种制造磁头滑块的方法，该方法适于使得可以高精度地控制垂直记录磁头的主磁极片的喉部高度。 根据一个实施例，第一电研磨导向元件（ELG）设置在与行杆中的一个写头的屏蔽的电镀底层相同的层上，并且其它ELG设置在与主体相同的层上 磁极片另一个写头。 根据其他ELG的电阻值的变化来检测前端位置（Tops），并计算研磨的结束位置。 由于其他ELG的前端位置（Tops）是准确的，所以可以通过检测存在的电阻值来分配与主磁极片的喉部高度“Th”和第一ELG的电阻值的相关性 检测到前端位置（上）。

公开(公告)号：US20080072418A1

公开(公告)日：2008-03-27

申请号：US11897674

申请日：2007-08-30

Applicant: Akira Kondo ,  Koji Tanaka ,  Kimitoshi Etoh ,  Ichiro Oodake

Inventor： Akira Kondo ,  Koji Tanaka ,  Kimitoshi Etoh ,  Ichiro Oodake

IPC: G11B5/127 ,  B23P17/00 ,  H04R31/00

CPC classification number: G11B5/1278 ,  G11B5/315 ,  G11B5/3163 ,  G11B5/3169 ,  G11B5/3173 ,  G11B5/3196 ,  G11B5/6011 ,  Y10T29/49021 ,  Y10T29/49036 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052 ,  Y10T29/49798

Abstract: Embodiments of the present invention provide a method of manufacturing a magnetic head slider, the method being adapted so that throat height of a main magnetic pole piece of a perpendicular recording magnetic head can be controlled with high accuracy. According to one embodiment, a first Electrical Lapping Guide element (ELG) is disposed on the same layer as a plated underlayer of a shield of one write head in a row bar, and other ELGs are disposed on the same layer as that of a main magnetic pole piece of another write head. Front end positions (Tops) are detected from changes in resistance values of the other ELGs and an ending position of lapping is calculated. Since the front end positions (Tops) of the other ELGs are accurate, it is possible to assign a correlation to throat height “Th” of the main magnetic pole piece and the resistance value of the first ELG by detecting this resistance value existing when the front end positions (Tops) are detected.

Abstract translation: 本发明的实施例提供一种制造磁头滑块的方法，该方法适于使得可以高精度地控制垂直记录磁头的主磁极片的喉部高度。 根据一个实施例，第一电研磨导向元件（ELG）设置在与行杆中的一个写头的屏蔽的电镀底层相同的层上，并且其它ELG设置在与主体相同的层上 磁极片另一个写头。 根据其他ELG的电阻值的变化来检测前端位置（Tops），并计算研磨的结束位置。 由于其他ELG的前端位置（Tops）是准确的，所以可以通过检测存在的电阻值来分配与主磁极片的喉部高度“Th”和第一ELG的电阻值的相关性 检测到前端位置（上）。

公开(公告)号：US07310203B2

公开(公告)日：2007-12-18

申请号：US10237860

申请日：2002-09-10

Applicant: Nobuo Yoshida ,  Ichiro Oodake ,  Moriaki Fuyama ,  Kazue Kudo ,  Kimitoshi Etoh ,  Shigekazu Ohtomo ,  Hiroshi Fukui

Inventor： Nobuo Yoshida ,  Ichiro Oodake ,  Moriaki Fuyama ,  Kazue Kudo ,  Kimitoshi Etoh ,  Shigekazu Ohtomo ,  Hiroshi Fukui

IPC: G11B5/47

CPC classification number: G11B5/3967 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/3163 ,  Y10T29/49046

Abstract: There is provided a thin film magnetic head, with letting a distance of a portion, where a width of a track portion in an upper magnetic pole changes, from a flying plane from a medium be Ly, and letting a distance of a portion, where a distance between right and left of a surface portion in a lower magnetic pole in a track width direction is wider than the width of the upper magnetic pole in the track width direction, from the flying plane from a medium be Tp, by creating a thin film magnetic head that is equipped with a recording head that has a relation of Tp≦Ly, it becomes possible to reduce a needless leakage magnetic field in the track width direction with securing magnetic field strength.

Abstract translation: 提供了一种薄膜磁头，其中使上部磁极中的轨道部分的宽度从介质的飞行平面改变的部分的距离为Ly，并且使一部分的距离在其中 在轨道宽度方向上的下磁极中的表面部分的左右之间的距离比通过轨道宽度方向上的上磁极的宽度，从介质的飞行平面变为Tp，通过产生薄的 配备有具有Tp <= Ly关系的记录头的胶片磁头，可以确保磁场强度而减小轨道宽度方向上不必要的泄漏磁场。

公开(公告)号：US20070177299A1

公开(公告)日：2007-08-02

申请号：US11717899

申请日：2007-03-13

Applicant: Kazue Kudo ,  Gen Oikawa ,  Tetsuya Okai ,  Ichiro Oodake ,  Hiromi Shiina

Inventor： Kazue Kudo ,  Gen Oikawa ,  Tetsuya Okai ,  Ichiro Oodake ,  Hiromi Shiina

IPC: G11B5/33 ,  C25C1/08 ,  G11B5/127

CPC classification number: G11B5/3967 ,  G11B5/3109 ,  G11B5/3163 ,  Y10T428/115 ,  Y10T428/1186

Abstract: At least one of lower and upper magnetic cores is composed of magnetic films each of which contains two or more elements of Co, Ni, and Fe, which are formed by electroplating in a plating bath with pH 2 or less, and which have a saturation magnetic flux density of 23,000 gauss or more.

Abstract translation: 下磁芯和上磁芯中的至少一个磁芯由磁性膜组成，每个磁性膜含有两个或更多个Co，Ni和Fe元素，它们通过电镀在pH2或更小的电镀浴中形成，并且具有饱和 磁通密度23000高斯或更高。

公开(公告)号：US08842388B2

公开(公告)日：2014-09-23

申请号：US12380302

申请日：2009-02-25

Applicant: Atsushi Kato ,  Ichiro Oodake ,  Gen Oikawa ,  Masahiko Soga

Inventor： Atsushi Kato ,  Ichiro Oodake ,  Gen Oikawa ,  Masahiko Soga

IPC: G11B5/127 ,  G11B5/17 ,  G11B5/31 ,  B05D5/12

CPC classification number: G11B5/1278 ,  G11B5/17 ,  G11B5/3123 ,  G11B5/315 ,  G11B5/3163

Abstract: Embodiments of the present invention provide a perpendicular magnetic recording head including a coil having small resistance. According to one embodiment, a nonmagnetic insulating layer formed on a main magnetic pole and a magnetic yoke are etched to form a recessed portion. The thickness of a conductive layer is increased by the depth of the recessed portion in a process for forming the conductive layer of the upper coil on the recessed portion to reduce resistance of the coil. Simultaneously with the formation of the recessed portion, a part of a second layer of a connection tab is removed. Simultaneously with the formation of the conductive layer of the upper coil, a space in which the part of the second layer of the connection tab is removed is filled with the same material as that of the conductive layer to further reduce the resistance of the entire coil.

Abstract translation: 本发明的实施例提供一种包括具有小电阻的线圈的垂直磁记录头。 根据一个实施例，蚀刻形成在主磁极和磁轭上的非磁性绝缘层以形成凹部。 在用于在凹部上形成上部线圈的导电层的工艺中，导电层的厚度增加了凹陷部分的深度，以降低线圈的电阻。 在形成凹部的同时，除去连接片的第二层的一部分。 与上层线圈的导电层的形成同时，除去连接片的第二层的一部分的空间填充有与导电层相同的材料，以进一步降低整个线圈的电阻 。